EX600-WEN_WSV.eng

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

Fieldbus system PROFINET compatible SI Unit

Installation 12 SI Unit Model Indication and How to Order 15 Summary of Product parts 15 Mounting and Installation 16 LED Display 17 Specification 19 Specifications 19 Dimensions 20 End Plate Model Indication and How to Order 21 Summary of Product parts 22 Mounting and Installation 24 Wiring 24 Specification 26 Specifications 26 Dimensions 27 Maintenance 33 Troubleshooting 35 Parameter Setting 46

EXxx-OMV0028.eng

Parameter Setting Hardware Configuration (GSDML file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

SI Unit

15 Date Signature (creator) Date Signature (test engineer) 46 No.EX##-OMY0011-A Appendix D: Safety Characteristics Operation Value Item SFF >90% HFT Hardware Fault tolerance 1 PFH Probability of dangerous failure per hour <1 FIT Hardware classification Type B Safety Level SIL3 / PL e Mission Time 20 years 47 No.EX##-OMY0011-A Appendix E: EX260-FPS Timing Values Typical timing values of SMC

EXW1-NT1_eng

89, 02-826 Warszawa, Poland PORTUGAL (351) 21 472 45 00 Alameda dos Moinhos, 9G, 2720-381 Alfragide Portugal ROMANIA (40) 213205111 Str Frunzei 29, Sector 2, Bucharest, Romania SLOVAKIA (421) 41 321321 1 Fantransk 1223, 01301 Teplika nad Vhom, Slovakia SLOVENIA (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje, Slovenia SPAIN (34) 945 184 100 Zuazobidea 14, 01015 Vitoria, Spain SWEDEN (46

Voltage Monitor for PFMV5

terminology 13 Mounting and Installation 15 Installation 15 Wiring 17 Flow Setting 21 Function Setting 23 Default settings 23 F0 Auto-preset 24 F1 Setting of OUT1 26 F2 Setting of OUT2 29 F3 Response time 30 F4 External input 31 F5 Power saving mode 36 F6 Security code 37 F95 Selection of flow indication 38 F99 Reset to the default setting 40 Other Setting 41 Maintenance 45 Troubleshooting 46

Digital Flow Switch (Integrated display type)

Flow rate at normal condition 0.927 = Flow rate of standard condition -40No.PF-OMG0010-H Dimensions (in mm) PF2A703H/706H/712H Model A B C D E F G PF2A703H 55 mm 160 mm 40 mm 92 mm 67 mm 55 mm Rc1, NPT1, G1 PF2A706H 65 mm 180 mm 45 mm 104 mm 79 mm 65 mm Rc11/2, NPT11/2, G11/2 PF2A712H 75 mm 220 mm 55 mm 114 mm 89 mm 75 mm Rc2, NPT2, G2 Model H I J PF2A703H 36 mm M5 x 0.8 8 mm PF2A706H 46

HRX-OM-T004

message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46

HRX-OM-R028

message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46

High Vacuum L Type Valve

seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46

XL-OMY0001

180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46

High Vacuum L Type Valve

Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46

XLA Series

External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption for 0.5MPa 19 46

XLA- ∗ -F7NJ ∗ - ∗ Series

1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2 for 0.5MPa 19 46

XL-OMY0002

60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45 80 160 200 300 800 L/S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46

XLDV Series

gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46

XMD/XYD Series

1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46

K35-OMW0030

/ Output Signal transition PWR DC24V 24 V (Power supply) 0 V E-STOP ON (Emergency stop) OFF JOG+ ON (JOG operation move to OFF extended end direction) JOGON (JOG operation move to OFF retracted end direction) CAL ON (Manual mode) OFF 20mA Sig-in (+/-) (Analog input signal) 4mA 0mA 20mA Extended end direction Pos-out (Analog output signal) Retracted end direction 4mA 0mA (A) (B) (C) (D) 46

CEx-OMG0106

Blinking UP DOWN LEFT RIGHT Blinking -1.0 +1.0 Setting Point Tolerance Blinking 46 During initial setup, predictive control is executing. Hence, it is suggested to set the maximum retries to 5 or above. After setting of maximum retries. Press WRITE to switch to the next input condition.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

After assembly is completed, perform an operation test and check that there is no air leakage. 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 Direction of the shaft(key) 39 Fig. (19) Direction of assembly of the shaft 46 - Troubleshooting Refere nce Problem Possible cause Solution page 16 Supply pressure isnt applied correctly.