/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted

sPower supply voltageResponse timeHysteresisPF2D300/3010.25 to 4.5 l/min0.25 to 4.5 l/min0.05 l/min0.05 l/pulseReal-time flow rateAccumulated flow0 to 999999 l?2.5% F.S. or less?0.5% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-WWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RH?

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-HWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-40/GALDEN?

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ002-WWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RH?

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

sResponse timeHysteresisPower supply voltageResistancePF2A721Air, Nitrogen10 to 210 l/min10 to 210 l/min20 to 200 l/min2 l/min2 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A721Air, Nitrogen10 to 210 l/min10 to 210 l/min20 to 200 l/min2 l/min2 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A721Air, Nitrogen10 to 210 l/min10 to 210 l/min20 to 200 l/min2 l/min2 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?