80

(Standard) G1/8 NPT1/8 M6 With bracket (Shipped together) Grommet W Y 2 x 3.4 Mounting hole (Standard) G1/8 NPT1/8 M6 1 Applicable for air type (VDW0) and water type (VDW2). 2 When G or NPT is selected, choose the 1/8 port size standard model. 3 When M6 is selected, choose the M5 port size standard model. 4 When using deionized water or any other fluid that may corrode C37 (brass), select

Hand Valve Series VH

VHS 5-8-15

IDX-OM-W019

Specification for Option K 8 1 Safety instructions. 8 1 8 2 Specifications . 8 1 Chapter 9 Specification for Option R 9 1 Safety instructions. 9 1 9 2 Specifications of GFCI . 9 1 9 3 Cautions for handling the GFCI . 9 1 Chapter 10 Specification for Option S 10 1 Safety instructions. 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions. 11 1 11 2

Self-seal Fittings Series KC

D2 L1 L2 D1 M A (mm) M5 0.8 KCL04-M5 KCL04-01S KCL06-M5 KCL06-01S KCL06-02S KCL08-01S KCL08-02S KCL08-03S KCL10-02S KCL10-03S KCL12-03S KCL12-04S 16.7 18.4 18 8 10 8 12 14 8 10 8 23 17.4 25.1 29.1 27.1 1.9 1.9 6 11 7 13 21 16 24 37 29 38 63 81 4 10.4 25.3 1 8 24.2 20.3 19.5 27.5 19 29.5 30.7 32.7 21.5 34.2 37.2 38.7 44.3 2.3 2.3 2.2 2.2 M5 0.8 26.8 6 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2 12.8

240

Refer to back page 50 for Safety Instructions and pages 3 to 8 for Electric Actuator Precautions. Handling Caution LEF 8. Do not operate by fixing the rod and moving the actuator body. Excessive load will be applied to the rod, leading to damage to the actuator and reduced the life of the product. 13.

25

7 units 6 units 7 units 8 units 8 units 4 units 5 units 5 units 4 units 6 units 6 units 7 units 7 units 3 units Wiring/Piping Connectable number of ionizers (IZS42) with transition wiring (without external sensor) Warning 1.

Compact manifold regulator ARM5 Series

5/16 8, 5/16 5 13.5 21 38.5 Note) The O-ring is attached.

Stroke Reading Cylinder and Counter

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Compact Hydraulic Cylinder

(Tightening torque of M3 screw: 0.5 to 0.7 Nm) 8.

Non-contact Gripper

9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size: 100 Size: 120 Size: 150 20 20 10 0.4 (MPa) 16 16 8 0.4 (MPa) 0.4 (MPa) Lifting force (N) Lifting force (N) Lifting force (N) 0.3 (MPa) 0.3 (MPa) 12 12 6 0.3 (MPa) 0.2 (MPa) 0.2 (MPa) 0.2 (MPa) 8 8 4 0.1 (MPa) 0.1 (MPa) 0.1 (MPa) 4 4 2

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 15 VCC Series Special Tools Tool for Attaching/Detaching Valve VCC-G-A Knurled 8 4 x 1.8 21 For attaching

HRX-OM-Y120

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid

LEF-OM006xx

300 (400) 500 (600) 100 200 300 (400) 500 (600) (700) (800) (kg) 0.90 1.05 1.20 1.35 1.84 2.12 2.40 2.68 2.96 3.24 3.35 3.75 4.15 4.55 4.95 5.35 5.75 6.15 (kg) 0.12 0.19 0.35 1( ) 2) -5m 5m 10% 3() 452000Hz 1 () 4 5 6 7 8 <-> LEFS 16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400

Electric Actuator Miniature Rod Type Miniature Slide table Type

Press the (3)SET key 8 - 2.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

the stud axis For reducing R 1/8 female to M5. 1 8 KKA 1 8 R R x M5 female M-5B 1 8 6/4 x R 6/4 x M5 M-01AU-6 P.196 M-5HL-6 P.198 KP 1 8 P.199 Plug Hose nipple Use to plug unused M5 port.

RSH/RS1H

8 !

VCW

Port size VCW2 VCW20-12-01 1/8, 1/4 VCW30-12-02 1/4, 3/8 VCW3 VCW30-12-04 1/2 VCW40-12-02 Series 1/4, 3/8 VCW4 VCW30-12-04 1/2 2 3 4 Class 2 Class 3 Class 4 VCW40-12-06 3/4 Bracket material: Stainless steel Valve type Material and insulation type N.C.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

IDX-OM-W020

8-1 8 1 IDX-OM-W020 8 K AD48-8-A-X2112 1 IDFB6E15E-**-K AD48N-8Z-A-X2112 1 IDFB6E15E-**N-K KQ2H10-02AS 1 IDFB6E15E-**-K 10R1/4 KQ2H11-35AS 1 IDFB6E15E-**N-K 10NPT1/4 IDF-S1926 1 1) IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDFB Series 8-2 8 2 IDX-OM-W020 9 R 9 R 9-1 9-2 IDFB4E 15E-11-R 15A 30mA 9-3 IDFB Series 9-1 9 1 IDX-OM-W020 9 R IDFB4E to 11E 0.37inch (9.5mm) L N PE

IDX-OM-W034

Specification for Option L 8 1 Safety instructions . 8 1 8 2 Specifications . 8 1 8 3 Specification of heavy duty auto drain (ADH4000-04) . 8 2 8 4 Maintenance. 8 2 Chapter 9 Specification for Option R 9 1 Safety instructions . 9 1 9 2 Specifications of the GFCI . 9 1 9 3 Cautions for handling the GFCI . 9 1 9 4 Electric circuit . 9 2 Chapter 10 Specification for Option S 10 1 Safety instructions