Series AK1000

Pressure gauge unit 2) e 2P 3P 4PL r t Sample Order Number Port Unit psig/bar MPa Code qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) AK1202S e q 8 8 8 8 w 8 8 8 8 r r No code MPA q w 2P 3P 4PL 5PC MPA MPA MPA V3 V3 V3 2) Pressure gauge unit MPa or psig/bar selectable.

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(n:: 4. 8, 12, 16 .j (n :: 4, 8, 12. 16 .. ) (n = 4, 8. 12. 16) (n:: 2, 4. 6. 8 ) W ith 2 pes. (Dilferem surfaces 85 75 80 ' 0 Same sunacg). Wh'rl 1pc 4) 85 + 30{n 2 4l 10+30(2 2) 75+~24 80+30(11 2 With n pes , . f-f-("::--=-=2.c..; 4 ::-.6 8 '-c---4.,, 8 e.'-,-~.-,-,-'~')c-t-_-"_ _ c..;.-= 8. 12. ' 6 .. )_+_"",":.:=:.: 4 ,,-.",8."

MIST SEPARATOR

Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Semi-standard Port thread Part no. Rc G NPT AD47N-8(Z)-A AD47-8-A B External appearance drawing and part no. Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 17 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.

Series VS

M12 CONNECTORS L2 L1 MANUAL OVERRIDE INDICATOR LIGHT 1/8-4 PORTS PILOT PORTS NOTE #1 C SMC SMC SMC SMC H B I I J 14 14 14 14 14 14 CC D A 5 SMC SMC 1 1 K L M E F 3 3 12 12 12 12 G 12 12 N SMC SMC O P NOTES: 1) SIZE 1 1/4,3/8, 1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 3/4, 1 6 PORTS,1,3,5 PORTS 2) SIZE 1 1/4,3/8, 1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 1/2, 3/4,1 2 PORTS,2,4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

flats 12 N 8 R F Applicable tube O.D.

MICRO MIST SEPARATOR

Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Semi-standard Port thread Part no. Rc G NPT AD37N-8(Z)-A AD37-8-A B External appearance drawing and part no. Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 14 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Refer to the applicable tubing table to the left Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 Orifice diameter 2 4 8 10 16 Tubing O.D. Metric 3, 4 3, 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 Basic type N.C. PB PA PA N.O. PB B A B A B A N.C. N.O.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

High Power Cylinder:

1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5 40 (3/8) 12 18 24 30 36 1000 1500 2000 2500 3000 3/8 12 3/8 12 3/8 12 3/8 12

JXCx-OMU0004

P.50 6 * 8 e PLC PLC 9.

HEC_001W-E

ALARM -8-1 8.1 HOW TO IDENTIFY ALARM -8-1 8.2 ALARM INDICATION -8-2 8.3 HOW TO RESET ALARM -8-3 8.4 ALARM CODE LIST -8-3 8.5 TROUBLESHOOTING -8-5 9 APPENDIX -9-1 9.1 SIGNAL AND STYLE OF CONNECTORS -9-1 9.2 POWER SUPPLY CABLE -9-3 9.3 CALCULATION OF DEW POINT (FROM PSYCHROMETRIC CHART) -9-4 9.4 APPLICABLE STANDARD/REGULATION -9-5 9.4.1 OVERSEAS STANDARD -9-5 9.4.2 WHEN THE PRODUCT IS EXPORTED

Table of Contents

stations) VV5Q04-08FU2-D 1 set (F kit 8 station manifold base no.)

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 7 47 32.5 4 8 40 Up to 1000 24 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 5 8.9 54 38 4 8 50 Up to 1000 32 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 6 5.1 66 46.5 5 63 Up to 1000 32 20 G 3/8 16 M8 x 1.25 8 M16 x 1.5 17 38.6 16 121 4 9 6.3 77 56.5 5 80 Up to 1000 40 25 G 3/8 16 M10 x 1.5 10 M20 x 1.5 22 38.4 17 128 4 11.5 6 99 72

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

VFA3000

1 8 1 4 1 8 1 4 1 8 1 4 VFA32302 position double 0.17 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3330-X1 3 position closed center 0.32 1 8 11.7 (0.65) 14.4 (0.8) 01 02 Base mounted (EXH: ) 1 8 VFA3430-X1 3 position exhaust center 0.32 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3530-X1 3 position pressure center 0.32 1 8 14.4 (0.8) 9.9 (0.55) 16.2 (0.9) 10.8 (0.6) 01 02 (EXH: ) 1 8 1 4 3

Rotary Table/

8 !1 @1 !2 q @0 u !

VR4151/4152

N.C. common type (With VM430) X102 01 Port size Rc 1 8 NPT N01 1 8 G F01 1 8 Dimensions Bracket mounted Panel mounted 2-6.5 hole Mounting screw M6 x 1 x 12 Rc 1/4 Spare tank connecting port processing possible 4-M6 thread Bottom of bracket Bracket side 4-7 hole Knob side Bracket plate t = 2 Panel thickness t = 3 or less Rc 1/8 signal pressure port 2-M6 x 1.0 thread depth 8 Panel mounting

Vacuum Regulator

40 8 x 6.5 55.7 51.3 55.7 51.3 Pressure gauge Rc 1/8 Pressure gauge port 107 One-touch fitting Air 21.6 70.4 Fitting Part Dimensions (mm) 26.5 Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 8 8.5 11 14 Elbow V 26.6 40.5 65 5.2 6 1/4" 8, 5/16" 10, 3/8" 1 1.5 4 7 27.5 27.5 28.5 30.5 21 21 21 21 10.5 10.5 10.5 11 N P A B IRV20A-lllZ : With digital pressure switch 64.5 53 52 U V 41

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Line filter

.: AMX-OMX0018-B PRODUCT NAME Line filter MODEL / Series / Product Number AFF20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AFF30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AFF40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.