High Vacuum L Type Valve

standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 2) for 0.5MPa 46 102 400 300

XLDV Series

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

Return Filter

(Note1) (Petroleum,Water-glycol, Emulsion,Phosphoric ester) Applicable model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 INOUT Port size (Rc) 3/4B 1B 1 1/4B 1 1/2B 2B 2 1/2B 3B Drain port size M162 Rated flow Paper 50 80 120 160 260 450 600 rate Micromesh 60 100 150 200 300 550 700 (L/min) Operating pressure 1.0MPa Operating temperature 80oC Nominal filtration 1.

PFxx-OMA1007

setting Page 94 PrES [ 0.0] 0 PrES [diSP] Display [MES ] Measurement display setting [F16] Page 97 tEMP [diSP] Display AC [diSP] Display [F30] AC [SAvE] Accumulated value hold [ oFF] Not stored Page 98 [F33] [Po_E] Not Applicable on this product. [25] AMS series [50] AMS30 series [100] AMS40 series [200] AMS60 series [FrtE] Standby flow rate (Threshold) [100] AMS20 series [200] AMS30 series [300

AIR CYLINDER

How to judge: The area within the curb line of graph 1 shows the relationship between the specified length stroke cylinder and allowable lateral load, which applies to piston rod end. 5 - Ex.) 25A-CS2F125-300 According to the graph 1, nodal point of cylinder stroke 300mm and 125 is 115N. Lateral load to rod end needs to be smaller than this.

Heat Resistant Solid State Auto Switch

Heat resistant lead wire (between sensor unit and amplifier unit) 3.4 Lead wire Oilproof heavy-duty vinyl code (amplifier unit grommet) 3.4, 0.2 mm2, 3-wire, 3000 mm Impact resistance Sensor unit: 1000 m/s2, Amplifier unit: 300 m/s2 Insulation resistance 50 M or more under the test voltage 500 VDC (between lead wire and case) Withstand voltage 1000 VAC, 1 min.

CG1-SMV13_en

review all specifications of the product referring to its latest catalogue information, with a view to giving due consideration to any possibility of equipment failure when configuring the equipment. 100 0.05 0.09 0.15 0.24 0.39 0.64 1.00 125 0.07 0.11 0.18 0.29 0.47 0.76 1.20 150 0.08 0.13 0.21 0.34 0.54 0.89 1.30 200 0.10 0.17 0.28 0.44 0.70 1.10 1.70 250 0.13 0.21 0.34 0.54 0.86 1.30 2.10 300

Rotary Actuator

When excessive impact (300 m/s2 or more) is applied to a reed auto switch during operation, the contact point will malfunction and generate or cut off a signal momentarily (1 ms or less). Please consult with SMC if a solid state auto switch can be used according to the environment. 13 - Do not use in an area where surges are generated.

MHS

28 47 82 130 204 359 525 780 1320 () mm 4 4 6 8 8 12 16 20 24 32 g 60 100 140 237 351 541 992 1,850 3,340 6,460 1) 1625 =20mm 3263 =30mm 80125 =50mm 0.5MPa MHS4 MHS4 -16D MHS4 -20D MHS4 -25D MHS4 -32D MHS4 -40D MHS4 -50D MHS4 -63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300

MHx-OMZ0003

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.

MHx-OMZ0004

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 128 3 4M40.7 8 3.4 8 2 11 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% 0.4 (W) [0.40.1] P .1367 LED 300 12 - 4-3.

MHx-OMZ0005

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 3 4M40.7 8 3.4 8 2 14 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 15 - 4-3.

LEJ-OM004xx

. *2 (4) S troke [mm] Standard Produced upon receipt of order 300 200 400 500 600 700 800 900 1000 1200 1500 Str o k e (m m ) Ty pe LEJS40 LEJS63 *2Strok es other than standard and produced up o n receipt o f order are available as special orders, so plea s e contact with our com pany . (9) Driver type *4 (7) Cable type *4 *5 *6 Com patible driv er P owe r supply v oltage [V ] Without cable

JXCx-OMT0005CN

2) () OFF ON( *4) ON ON ON( *2) () OFF ON ON ON ON( *2) OFF OFF ON ON OFF OFF OFF OFF( *4) OFF ON ON( *3) EMG() OFF OFF( *4) OFF ON OFF *1 ON *2 DRIVE ONOFF *3 *4 ON Byte2,3 Byte Bit 0-3 4 READY ONREADYON 2 5 ALARM JXCD1 PLC OFFON 6-7 3 0-7 Byte4-7 Byte 0.01[mm] *5 800.00[mm]80d=13880h 4Byte = 80h 5Byte = 38h 6Byte = 01h 7Byte = 00h 4 5 6 7 Byte8,9 Byte 1[mm/s] *5 300

SFOD-OMT0005CN

OFF OFF ON ON ON(*2) () OFF ON(*4) ON ON ON(*2) () OFF ON ON ON ON(*2) OFF OFF ON ON OFF OFF OFF OFF(*4) OFF ON ON(*3) EMG() OFF OFF(*4) OFF ON OFF *1 ON *2 DRIVE (ONOFF) *3 *4 ON Word1 Word Bit 0-3 () 4 READY ONREADYON 1 5 () 6-15 () Word2,3 Word Bit 2 0-15 () 0.01[mm] *5 )800.00[mm](80d=13880h) Word2()=3880h Word3()=0001h 3 0-15 () *5 20(P.83) Word4 Word Bit 1[mm] )300

JXCx-OMT0061CN

RWr RWr bit H L 0 (L) 0 0 1 0 1 2 1 0 1 (H) 1 1 4 ON ON OFF 2 3 OFFONOFF, OFF 4 READY ON LECPMJ PLC 5 ALARM OFFON 0 6 OFF ON 7 ON,OFF 8C () D RWr0,bit5: ALARM ONRWw0,bit2:ON RWr0,bit5: ALARM ON RWw0,bit2:ONOFF 17.CC-Link (P.77) E RWr0,bit5: ALARMON RWw0,bit2:ONOFF 17.CC-Link P.77) F 0.01[mm] 1 F0 L )800.00[mm](80d=13880h) RWr1**3880h RWr2**0001h 2 F0 H 1[mm/s] )300

LEC-OM038xx

The remote READY is turned off in the test mode. 38 - Remote Register Bit/Byte Data Correspond Model CorrespondAddress Value range Unit /Size Ing mode -ing ID No. name 3 RWrn 2 Current position 4 +/-2147483647 0.01mm 1 RWrn+1 0 H Current RWrn+2 L speed 2 0 to 65500 mm/s Numerical data input H Current RWrn+3 L Force 2 0 to 300 % 3 RWrn+4 2 ID1 Target position 4 +/-2147483647 0.01mm 1 RWrn+

LEC-OM036xx

0,1 7 ALARM bit 0,1 Please refer the operation manual of the step motor controller (LECP6) and the servo motor controller (LECA6) to check the detail of each signal. 37 - I_ Bit/Byte Data CorrespondModel/ CorrespondValue range Unit Size Ing mode ing ID Address No. name 2 3 Current 3 2 position 4 +/-2147483647 0.01mm 4 1 5 0 6 H Current speed 2 0 to 65500 mm/s 7 L 8 H Current Force 2 0 to 300

LEC-OM034xx

refer the operation manual of the step motor controller (LECP6) and the servo motor controller (LECA6) to check the detail of each signal. 39 - I_ Bit/Byte Data CorrespondModel/ CorrespondValue range Unit Size Ing mode ing ID Address No. name 16 3 Current 17 2 position 4 +/-2147483647 0.01mm 18 1 19 0 20 H Current speed 2 0 to 65500 mm/s Numerical data 21 L input 22 H Current Force 2 0 to 300