Information

L6 A Note) Model Applicable tubing O.D. d H Weight (g) D L1 L2 L3 L4 L5 M T Min. Max. Min.

AS-FPQ/AS-FPG

AS-FG AS-FP AS-FP AS-FM AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 715

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

KE AS-FG Dimensions AS-FP H1 AS-FM (Hexagon width across flats) AS-D Applicable tubing O.D. d AS-T H2 ASP (Hexagon width across flats) L4 L3 ASN L5 AQ ASV D1 L2 AK VCHC M M L1 ASR ASQ Metric Size Inch Size L4 Max. L5 (1) L5 (1) L4 Max. Weight (g) Weight (g) Panel-cut dimensions Panel-cut dimensions H1 H2 d D1 L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M Model Model Min. Max. 34.4 Min.

MHx-OMY0005

BC 8 2 B C 3. () 4.

IR1000/2000/3000

Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

Process Pump

D-DN

VFS4000-OMY0001

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

25

Avoid using in a place that exceeds an ambient temperature range. b. Avoid using in a place that exceeds an ambient humidity range. c. Avoid using in a place where condensation occurs due to a drastic temperature change. d. Avoid using in a place in the presence of corrosive or explosive gas or where there is a volatile combustible. e.

High Speed Pilot Operated

D-G

PSxx-OMT0005CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

TUH Series

Make periodic inspections to check for the following problems, and replace parts as necessary. a) Blemishes, Nicks, Abrasion, Corrosion b) Air leakage c) Twisting, flattening or tangling of the tubing d) Hardening, deterioration or softening of the tubing 2. Do not attempt to patch or repair fittings and tubing which have been replaced. 1.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sb Cv b Cv b Cv b Cv Flow characteristics 6.1 7.3 9.0 0.3 0.2 0.2 1.6 1.8 2.4 0.4 0.2 0.3 1.5 1.8 2.3 1/4 3/8 1/2 3/4 6.1 7.2 9.0 0.27 0.21 4.8 5.1 16 15 0.34 0.46 4.1 4.5 18 20 VZ VS AC DC 30 or less

FQ1

Options Element sealing method Flat gasket (D.O.E) 1 N/A Bracket Quick plug Nil B P Housing material A square plug set is normally used for the drain unit.

 

Double acting Process pump PA PB PA Nil None With flow rate adjustment 1 B A B A B A Air Operated Valve LVP PB N.C. N.O.

SYJ Series

D type DIN connector with 9.4mm pitch between terminals if not interchangeable. To distinguish from the D type DIN connector, N is listed at the end of voltage symbol. (For connector parts without lights, N is not indicated. Please refer to the name plate to distinguish.) Dimension are completely the same as D type DIN connector. When exchanging the pilot valve assembly only.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Model ASV310F/410F/510F Applicable tubing O.D. d (Hexagon width across flats) Metric Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

Cylinder with Lock Double Acting, Single Rod Series CNS ø125, ø140, ø160 How to Order CNS L 100 125 D 100 M9BW D L 125 CDNS With auto switch With auto switch Number of auto switches (Built-in magnet) Nil 2 pcs. Mounting style S 1 pc. Basic style B Tubin

D-A9/M9/M9W/M9AL auto switches are shipped together (not assembled).

CLS

Cylinder with Lock Double Acting, Single Rod 125, 140, 160, 180, 200, 250 Series CLS How to Order CLS L D 125 100 M9B M9B With Auto Switch CDLS M9BW L D 125 100 With auto switch (Built-in magnet) Cylinder unit auto switch Port thread type Nil TN TF Lock unit auto switch Nil Without auto switch Mounting style B L F G Rc NPT G Nil Without auto switch Select applicable auto switches from the

ZL112

Manual override Non-locking push type Locking slotted type Nil D 1068