Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

).B RY(n+4).B Reserve RX(n+4).C RY(n+4).C RX(n+4).D RY(n+4).D RX(n+4).E RY(n+4).E RX(n+4).F RY(n+4).F RX(n+4).0 Digital input 0 RY(n+4).0 RX(n+4).1 Digital input 1 RY(n+4).1 RX(n+4).2 Digital input 2 RY(n+4).2 RX(n+4).3 Digital input 3 RY(n+4).3 RX(n+4).4 Digital input 4 RY(n+4).4 RX(n+4).5 Digital input 5 RY(n+4).5 RX(n+4).6 Digital input 6 RY(n+4).6 RX(n+4).7 Digital input 7 RY(n+4).7 Reserve

Booster Regulator/Air Tank

port 3/8" Tank OUT port 3/8" Inspection port 3/4" (With plug) ARJ VBAT05A(N)1-E-X105 VBAT05S(N)1-E-X105 Safety valve (Supplied with product) AR425 to 935 Booster regulator IN port 1/4" Booster regulator IN port 1/4" Safety valve port 1/4" ARX EXH: 1/4" EXH: 1/4" (370) (370) OUT OUT AMR (307) (307) 257 60 Inspection port 150 148 163 ARM 4 x 11 4 x 11 32 32 3/4" (With plug) ARP 100 100 200

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (

SZ3000

] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 36.7 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n-One-touch fitting 2-One-touch fitting (A,B ports) Applicable tube O.D.: 4 6 (X,PE ports) Applicable tube O.D.: 6 (L4) L3 U Side D Side Applicable connector

Speed Controller with Indicator

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V R NPT Note 1) Sealant AS3ll1FSl-l02 1/4 V V V

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

4.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 !3 w !0 !

Slide Unit Series CX2/CXWM/CXWL

ZZ 2 x 2 x 5.2 through 2 x 2 x 9.5 counterbore depth 5 (6H7 hole pitch) depth 4 4 positions for set screws for fixing shock absorbers (M5) 2 x 2 x Rc 1/8 Plug (R 1/8) 4 x M6 x 1.0 thread depth 12 6H7 depth 8 +0.012 0 2 x Rc 1/8 Cylinder port Max. 6 2 x 2 x M6 x 1.0 thread depth 12 2 x 2 x 6H7 depth 8 +0.012 0 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x M10 x 1.0 Adjusting bolt 50 CX2

Slide Unit Series CX2/CXWM/CXWL

ZZ 2 x 2 x 5.2 through 2 x 2 x 9.5 counterbore depth 5 (6H7 hole pitch) depth 4 4 positions for set screws for fixing shock absorbers (M5) 2 x 2 x Rc 1/8 Plug (R 1/8) 4 x M6 x 1.0 thread depth 12 6H7 depth 8 +0.012 0 2 x Rc 1/8 Cylinder port Max. 6 2 x 2 x M6 x 1.0 thread depth 12 2 x 2 x 6H7 depth 8 +0.012 0 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x M10 x 1.0 Adjusting bolt 50 CX2

Fieldbus system EtherCAT compatible SI Unit

channel) 0 (4 channels) Analogue output Unit EX600-AYA (2 channels) 0 4 (2 bytes per channel) Analogue I/O Unit EX600-AMB 4 4 (2/2 channels) (2 bytes per channel) (2 bytes per channel) EX600-AT# 1 8 Temperature (2 bytes per channel) 0 measurement Unit (4 channels) Frequency count Unit EX600-DFB 1 8 (2 bytes per channel) 0 (4 channels) IO-Link master Class A EX600-LAB1 1 (4 ports) 22, 38,

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

A-HEC-OM-J004

Set-up . 4-1 4.1 Set-up, Transport and Transfer. 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.2 Piping . 4-2 4.2.1 Preparation of Cooling Water . 4-3 4.2.2 Quality of Cooling Water . 4-5 TOC-1 A_HEC-OM-J004-4 Table of Contents 4.2.3 Preparation of Recirculating Fluid .4-6 4.2.4 Draining the Recirculating Fluid .4-7 4.3 Wiring. 4-9 4.3.1

Flow Control Equipment

/ 1 8, / 1 4 / 3 8 / 1 2 In-line M3/M5 / 1 8, / 1 4 / 1 4, / 3 8 2.5 to 25 20 to 40 32 to 63 32 to 63 40 to 100 40 to 100 AS1000 AS2000 AS3000 AS3500 AS4000 AS5000 4.1-23 / 1 4, / 3 8 / 1 4, / 3 8, / 1 2 / 1 4, / 3 8, / 1 2 63 to 125 1 40 to 200 160 to 250 300 300 AS420 AS500 AS600 AS800 AS900 / 1 4, / 3 8, / 1 2 / 3 4 4.1-27 1 / 11 4 / 1 2 1 2, 4.0-1 Applicable tube O.D Applicable cylinder

IZx-OMX0087

Name of Parts . 4-1-1. Controller . 4-1-2. High voltage power supply module . 4-2. Operation modes . 4-3. High voltage power supply module CH number setting . 4-4. Controller setting . 4-4-1. Operation overview . 4-4-2. Channel selection mode . 4-4-3. Frequency set mode . 4-4-4. Offset voltage adjustment mode . 4-4-5. Balance control selection mode . 4-4-6.

2-Color Display Digital Flow Switch Series PFM

Port size Port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 13 11 13 39 17 17 17 15 17 43 G 1/4 G 1/4 21 21 941 Series PFM7/PFM5 Made to Order 3 Please contact SMC for detailed specifications, lead times and prices.

Dual Speed Controller with One-touch Fitting Series ASD

ASD230FG (4, 6, 1/8", 5/32", 1/4"), ASD330FG (6) are made of POM. HNBR !

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

Air cylinder

(Different side) 60+30(n2) n=2, 4, 6, 8 75+30(n2) n=2, 4, 6, 8 80+30(n2) n=2, 4, 6, 8 85+30(n2) n=2, 4, 6, 8 95+100(n2) n=2, 4, 6, 8 Other qty. (Same side) 90+100(n2) n=2, 4, 6, 8 100+100(n2) n=2, 4, 6, 8 105+100(n2) n=2, 4, 6, 8 110+100(n2) n=2, 4, 6, 8 65 1 switch 60 75 80 85 70 70 2 switches (Different side) 75 80 85 2 switches (Same side) 75 80 85 70+30(n2) n=2, 4, 6, 8 Other qty.

HRX-OM-I051

fluid . 4-2 4.3.2 Supply of circulating fluid . 4-3 4.4 Requirement for System Startup . 4-4 4.4.1 Turning ON power. 4-4 4.4.2 Circulating fluid temperature setting . 4-5 4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen

Rotary Clamp Cylinders

4 !5 !3 !7 !8 !6 !6 !0 !2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !