Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket), Calibration

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket), Calibration Certificate

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration

Type: 10S (Side Ported), SI Unit Specification: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 20 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail, w/Bracket)

Type: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 20 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail,

Type: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 20 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail, w/Bracket)

Type: 10S (Side Ported), SI Unit Specification: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 20 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail, w/Bracket)

Accuracy: Basic Type, Size: 32, Motor Mounting: D (In-line Type), Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 100mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: R (Robotic Cable, Flexible Cable), Cable Length: 5m, Driver: w/o Driver, I/O Connector: w/o

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 300mm, Motor Option: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: L (Foot), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: w/o Driver, I/O Connector: w/o Connector

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: BJM (w/ Earth Leakage Breaker + w/ Automatic Fluid Fill Function + Applicable to Deionized Water Piping)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: H (C37; Port 3/4; Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 2K (w/Light, 24VDC, Conduit Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread), Bracket: XC (w/o Bracket), Rotation Angle: A (90°)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: H (C37; Port 3/4; Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 3A (w/o DIN Connector, 24VDC, DIN Terminal w/Surge Voltage Suppressor), Other Options: Rc, One-touch Fitting, Bracket: XB (w/Bracket), Rotation Angle: A (90°)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: H (C37; Port 3/4; Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 2A (w/Light, 24VDC, DIN Terminal w/Surge Voltage Suppressor), Other Options: A (G Thread), Bracket: XB (w/Bracket)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: H (C37; Port 3/4; Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 2K (w/Light, 24VDC, Conduit Terminal w/Surge Voltage Suppressor), Other Options: E (Oil-free, NPT Thread), Bracket: XB (w/Bracket), Rotation Angle: A (90°)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: H (C37; Port 3/4; Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 2T (w/Light, 12VDC, Conduit Terminal w/Surge Voltage Suppressor), Other Options: E (Oil-free, NPT Thread), Bracket: XB (w/Bracket), Rotation Angle: A (90°)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 2A (w/Light, 24VDC, DIN Terminal w/Surge Voltage Suppressor), Other Options: Z (Oil-free, Rc, One-touch Fitting), Bracket: XC (w/o Bracket), Rotation Angle: A (90°)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: H (C37; Port 3/4;, Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 2A (w/Light, 24VDC, DIN Terminal w/Surge Voltage Suppressor), Other Options: A (G Thread), Bracket: XB (w/Bracket)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: H (C37; Port 3/4;, Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 2C (w/Light, 110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Options: A (G Thread), Bracket: XB (w/Bracket)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 2A (w/Light, 24VDC, DIN Terminal w/Surge Voltage Suppressor), Other Options: F (Low Concentration Ozone Resistant, FKM Seal, G Thread), Bracket: XC (w/o Bracket), Rotation Angle: A (90°)