DOC1023126

(Becomes close to the trapezoidal acceleration as the setting value reaches 0) Acceleration and deceleration ratio 10 10 10 to 100 EQY251 to 50 EQY321 to 70 Torque when held *2 50 70 Sets the torque when stopped after the positioning operation. (Unit: %) H 150 100 Sets the position loop P constant.

AIR COMBINATION

50 11 20 6 60 3/41 AC55B-B 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 1 1 AC60B-B 1/8 196.2 234.1 46 98.1 30 43.3 3.2 70 50 11 20 6 60 Optional specifications Semi-standard specifications With barb With Metal bowl Metal bowl Square type Digital Round type Round type Metal bowl With Metal Model drain with with pressure pressure pressure pressure gauge (with color zone) with

Clean Gas Filter

thread) SF SF 13.85 ED001S-X10V 0.38 26 TSJ 1/4 Tube Swage Joint SFD 33.18 ED101S-X10V 0.49 70 56.75 ED201S-X10V 0.70 140 LLB 13.85 ED001S-X10V 0.42 26 UOJ 1/4 Union O-ring Joint 33.18 ED101S-X10V 0.53 70 AD 56.75 ED201S-X10V 0.75 140 Note 1) Inlet pressure 0.7 MPa, at pressure drop 0.02 MPa Note 2) Element part numbers include numbers 3 to 7 in the construction figure.

CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D

VZS

79 2 53 62 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181

VM

22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 22 46 78.2 30.5 47.7 80.2 31.5 48.7 21.5 4 20.8 21.8 14 3.2 72 70 22 70 72 10 12 VHK-B2A 49 17

KJ

(mm) Model Effective area (mm2) Weight (g) 3-connection thread M L 8 6 4 DT04-00 32 DT06-00 36 10 10 10 12 5.7 14 15 16 23.5 23.5 DT08-00 47 12 14 16 25 24.5 DT10-00 10 12 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female Connector: DHF H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Pressure Relief 3 Port Valve With Locking Holes

11 27.5 49.5 90 152.3 71 60 108 70 3.2 4 22 1 3 - Revision history Rev.

Mechanically Jointed Rodless Cylinder Series MY2

The spacing (l) of the side support must be no more than the values shown in the graph at right. kg 100 m 90 l 80 70 (650) Caution 60 Load mass m m If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Make sure to level the cylinder tube when mounting the cylinder.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L D TG R E FB * Supplied with 4 mounting screws.

VCW

107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

2/3 Port Valve

Select a model from the highest operating pressure difference and the characteristic figure of flow rate in p.4.1-70. Thread T F N Orifice size 1 2 3 4 Rc(PT) NPTF G(PF) NPT 1.5mm 2.2mm 3mm 4mm Refer to table q for configuration. Port size 01 02 03 1 8 1 4 3 8 Valve/Body 4 Common/single Refer to table q for configuration.

ZP

Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.

Valve Single Unit

Nil Rc Blanking plate assembly G F N NPT NPTF T B 26 53.8 70 C 51 80.8 97 A Effective area 14 mm2 Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 16 26 mm2 22 SX5000 (10) 30 mm2 25 Series Assembly part no. SX3000-75-1A SX5000-76-1A SX3000 SX5000 Plug These are inserted in cylinder ports or SUP/EXH ports which are not being used.

Silencer Series AN

Series 25 19 dB (A) Page 5-10-4 VEX AN101-01 AN110-01 AN120-M5 AN120-M3 BC sintered body type Ideal for the exhaust of a compact valve or pilot air. 16 dB (A) 21 dB (A) 18 dB (A) 13 dB (A) 100 m AN Page 5-10-5 Silencers Exhaust Cleaner 70 m AMC One-touch fitting connection type Can connect with One-touch fitting directly. 25 dB (A) 30 dB (A) It differs depending upon the model.

ITV

Note 8) Add 50 g for digital input type, 70 g for 16 points preset input type respectively.

Digital Flow Switch (Integrated display type)

1.0 to 40.0 L/min 1.0 to 42.0 L/min 0 to 42 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2 to 100 L/min 2 to 105 L/min 0 to 105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 2 to 90 L/min 2 to 95 L/min 0 to 95 L/min 4.60 V 18.4 mA 70% 30% 2 to 80 L/min 2 to 84 L/min 0 to 84 L/min 4.20 V 16.8 mA 60% 40% Other specifications are the same as the standard product.

Rotary Actuator/Vane Style Series CRB1

(71) 110 95 22 48 4 100 17 29 14 38 62 (63) 124 (139 ) 36 1/8 140 (155 ) 70 (71) 140 125 22 48 4 100 23.5 29 14 38 62 (63) 124 (139 ) 42.5 1/8 128 Series CRB1 (Size: 50, 63, 80, 100) Simple Specials: -XA1 to -XA24: Shaft Pattern Sequencing Shaft shape pattern is dealt with simple made-to-order system (Refer to front matter 33).

10

AC Specification (Built-in Full-wave Rectifier Type) AC Specification (Built-in Full-wave Rectifier Type) Class B Class B Apparent power (VA) Note 1) 2) Temperature rise F [C] Note 3) Apparent power (VA) Note 1) 2) Temperature rise F [C] Note 3) Size Size Size 1 Size 1 7 140 [60] 9 140 [60] Size 2 Size 2 9.5 158 [70] 10 158 [70] Size 3 Size 3 158 [70] 158 [70] 12 14 Class H Class H Apparent