Process Pump

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 14 Working Principle 1. When air is supplied to P1 port, it enters drive chamber A. 2. Diaphragm A moves to the left, and at the same time diaphragm B also moves to the left. 3.

HEC-OM-S019

Alarm b contact (CLOSE During Alarm) 10 Temperature Alarm Common 10 10m 02 2m 04 4m 06 6m N AC100V L AC100V 6-8 PT-RTD 5 Unused 9 Unused RS-485 Communication connector Note: Always use shielded cable connected to this connector. 6-9 Unused 3-4 Unused 3-5 Unused 1-3 Unused 12-14 Unused 1 BUS + 2 BUS 5 SG 4 FG 15 FG Power supply connector (IEC60320,C14) E PE HEA100 1 2 Specifications Continued

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Nil S n Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type 2 pcs. 1 pc. n pcs.

IDX-OM-P026E

Checks and Inspection Hose Circulating pump Water quantity 20 to 30 L/min Pressure 0.1 to 0.3MPa 0. 10. 3 2030 L/m i n Fig. 2 ( ) Tank (drum can, etc.) b) Operation procedure when a cooling tower is used 1. If a cooling tower is used, supply the cleaning liquid and circulate it for a certain amount of time. 2.

FGX-OM-N027

Maintenance 8 1-1) Element replacement 8 1-2) How to replace element 8 2-1) Replacement of seals 10 2-2) How to replace holder assembly 10 3 / 13 FGX-OM-N027-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Series KC Self-seal Fittings

Nylon Urethane D1 d M D2 L1 L2 A KCL04-99 KCL06-99 KCL08-99 KCL10-99 KCL12-99 4 6 8 10 12 7 8 12 25 30 4.2 4.2 11.4 11.4 21.6 14.9 35.2 25.0 50.2 39.7 4 6 8 10 12 16 17 18.5 21 22 22.6 24.1 25.2 28.6 29.4 10.4 12.8 15.2 18.5 20.9 10 10 12 17 17 18 20 23 26.5 28.5 34.3 36.5 40.3 44.3 46.8 Note) D1, D2: max. diameter 78 Series KB Piping Module plug: KBP Elbow module: KBV Female connector:

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30 2 phase to 80 5 phase to 80 2 phase to 100 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30 2 phase to 80 5 phase to 80 2 phase to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B

Single Axis Electric Actuator Series LJ1

LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30 2 phase to 80 5 phase to 80 2 phase to 100 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30 2 phase to 80 5 phase to 80 2 phase to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B

KB

KBH1-R1S KBH2-R1S KBH2-R2S KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R(PT) 1 2 R(PT) 3 8 R(PT) 1 2 R(PT) 3 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 4 KBE1-04 KBE1-06 KBE2-06 4 R(PT) 1 8 Air supply port: KBE, KBH, KBB, KBS, KBL 6 KBE2-08 KBE2-10 KBE3-08 8 10 10 8 KBE3-10 KBE3-12 KBE4-12 2 (P.2.1-77, 2.1-78) R1 KB 1 H S 12 Female connector elbow union: KBL Style With sealant (only male thread

Mini Free Mount Cylinder ø4, ø6, ø8, ø10 Series CUJ

Mini Free Mount Cylinder 4, 6, 8, 10 Series CUJ How to Order Bore size 4 6 8 10 4 mm 6 mm 8 mm 10 mm Made to Order Refer to pages 2 and 24 for details. 6 D 10 CUJ B D 10 F8N With auto switch CDUJ B 6 With auto switch (Built-in magnet) Number of auto switches 2 pcs. 1 pc. Nil S Mounting B Basic (Through-hole) M9: with 1 pc.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

FEP Tubing (Fluoropolymer)

(mm) 4 4 6 8 10 10 12 12 Tubing I.D. (mm) 2 2.5 4 6 7.5 8 9 10 Color Symbol N Translucent R Red (Translucent) BU Blue (Translucent) B Black (Opaque) Inch nominal size Inch nominal size 5/32" 5/16" Specifications Air, Water Note 1), Inert gas Note 4) Fluid How to measure the minimum bending radius.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

FGE-C

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) 1. 2. 3. 1. 2. 3. 4. 4/12 FGX-OM-L009-B 1 1.5 3) 3)1 1 () 5/12 FGX-OM-L009-B FGESL Series FGESL O (P) 0.02MPa () FGE S L A:179mm FGE S V V (P11) L B:419mm FGE S L C:669mm V (V )V 50mm O .

Compact Guide Cylinder/With Air Cushion Series MGP

MGP20-B-PS 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR MGP25-B-PS Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR MGP32-B-PS Gasket A NBR MGP40-B-PS Gasket B NBR MGP50-B-PS Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4, $5 MGP63-B-PS

02-mgp-e

MGP20-B-PS 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR MGP25-B-PS Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR MGP32-B-PS Gasket A NBR MGP40-B-PS Gasket B NBR MGP50-B-PS Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4, $5 MGP63-B-PS

3 Port Solenoid Valve SYJ300/500/700 Series

-1A SYJ300-10-2A Phillips' head screw SY100-33-3 M1.7 17, Non-gloss nickel plating Phillips' head screw SY100-33-2 M1.7 17, Non-gloss nickel plating Blank plate SYJ300-10-1 Blank plate SYJ300-10-1 P A Manifold gascket VJ300-5-2 A P Manifold gasket VJ300-5-1 Manifold gasket VJ300-5-2 Manifold gasket VJ300-5-1 Applicable base SS3YJ3-20 SS3YJ3-20R Applicable base sub-plate SS3YJ3-41 SS3YJ3-S41

Toggle Type Air Gripper

Tightening torque Tightening torque Model Screw (Nm) A M6 4.8 B M5 2.8 MHT2-32DZ C M8 12 A M6 4.8 B M6 4.8 MHT2-40DZ C M8 12 A M8 12 B M8 12 MHT2-50DZ C M10 24 A M10 24 B M10 24 MHT2-63DZ C M10 24 13 - 3-4. Construction / Parts list Components No.

ITV0000

Note: Due to the common supply/exhaust feature, different pressure range combinations are not available. 10 stations 10 The asterisk () specifies mounting. Add an astarisk () at the beginning of electro-pneumatic regulator part numbers to be mounted. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.