PF-OMM0004_C

min 216 L/min 540 L/min 10100 L/min 50250 L/min 3.555.0 L/min ( 3.5 L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL

IP8001 Series

/oC or less Max output flow rate *5 80 L/min(ANR) or more (SUP=0.14MPa) 200 L/min(ANR) or more (SUP=0.4MPa) Air consumption *5 2 L/min(ANR) or less (SUP=0.14MPa) 4 L/min(ANR) or less (SUP=0.4MPa) -20oC80oC(Non Explosion,IS Explosion:T4/T5)6,7 Ambient temperature and operating fluid temperature -2060(IS Explosion:T6) Explosion protected construction (Option, preparing) *8 ATEX Intrinsic safety

CQM

Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L A73CL 5 m Z A73CZ None. N A73CN In addition to the models in the above table, there are some other auto switches that are applicable. For more information, please refer to page 7-5-11. D-P5DWL type: 40 and 50 only available. Made to Order Specifications Please contact SMC.

Manifold Specifications

VK Applicable solenoid valve Type 25 (Non plug-in type) How to Order D 25 05 00C VV4Z1 VZ 4(A), 2(B) port G L M D G L M D VZ1120-M5 Stations VF VZ110-M5 (3 port valve) 02 2 stations 1(P), 3(R) port One-touch fitting for 6 VFR Applicable blanking plate assembly VZ1000-10-2A 20 20 stations SUP/EXH block mounting position VP4 DIN rail length specified B D U Both sides: 2 to 20 stations D side

ZSM1-115/121

Lead wire should be as short as possible, within 1 m. ON Setting pressure OFF Atmospheric pressure 0 3. Number of rotations of pressure adjusting screw Installation/Piping L H Number of rotations Caution 0 5 10 15 18 23 1. When piping switch by hand, hold body. Electrical wire must not be subjected to excessive force. 2. Do not drop nor apply excessive force.

IDX-OM-W095

3/min 1.09 1.02 1.06 3.3 m 3/min 7.2 GWP 1 (GWP) GWP Regulation EU No 517/2014 Regulation (EU) No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 R410A 2,088 2,090 IDFC60/70/80/90 Series 7-2 IDX-OM-W095 7.3 Port size Compressed air inlet Compressed air outlet Port size B A E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161 405 681 71 330 704 355

IDX-OM-V020

L O K H IDX-OM-V020 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Unit: mm Model Port Size A B C D E F G H J K L M [N] O P IDFA60 R1 307 745 605 161 405 681 71 330 704 355 126 94 46 12.5 IDFA70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFA80 R2 438 957 863 169 480 958 219 78 100 11.0 463

Large blow and

Without bracket Air pressure supply (P) port Thread size: Q 45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185

Series CQ2

L Y69BL 5m .

SMC Pneumatic Clean Series

Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRSH100-Al-20-l HRSH150-Al-20-l HRSH200-Al-20-l HRSH250-Al-20-l HRSH300-Al-20-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude Note 1), 9) C Temperature: 20 to 45, Altitude: less than 3000

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Lead wire length 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z In addition to the models in the above table, there are some other auto switches that are applicable.

LEKF-OMZ0035

Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for every additional 5 m. (At 15 m: Reduced by up to 20%) 12. When checking the conductivity of the cable, be careful not to deform the connectors mating hole and terminals.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 351 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

Clean Rodless Cylinder Series CYP

Specifications Allowable Moment/Maximum Load Mass Allowable moment (Nm) Max. load mass (kg) Bore size (mm) 15 32 Bore size (mm) Model Air and inert gases Fluid M M M m Double acting Action 15 32 0.3 3 0.6 4 0.3 3 1 5 CYP 0.5MPa Proof pressure 0.05 to 0.3MPa Operating pressure range Note) Since the limit values for maximum load mass and allowable moment differ depending on conditions such

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Applicable Auto Switches: Lead wire length (m) Auto switch type Load voltage Indicator light Applicable load Type Electrical entry Wiring (output) Special function 0.5 (Nil) 3 (L) 5 (Z) Tie-rod mount Band mount AC DC PLC A56 A53 5V 12V IC circuit B53 3-wire (NPN equiv.)

VP300-OMP0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 1) 1) 1) 1) ISO VG32 (MSDS) 6 No.VP300-OMP0001 VP Series VP Series VP Series VP Series 3 3 3 3 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 30 () 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VP300-OMP0001 VP Series VP Series VP Series VP Series/ / / / L L L L /M /M /M /M 3.2~3.7mm () (+-) () (1mm

IDX-OM-V024

L O K H IDX-OM-V024 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Power cable entry [IDFB60-11: Power cord with plug, length 110(2800)] Unit :inch (mm) Model Port Size A B C D E F G H J K L M N O P 12.1 29.3 23.8 6.3 15.9 26.8 2.8 13.0 27.7 14.0 5.0 IDFB60 R1 (307) (745) (605) (161) (405) (681) 3.7

3 Port Solenoid Valve/

M12 Connector Cable (4 Pins) Made by OMRON Part number Cable length [mm] ZS-37-L 300 ZS-37-M 500 ZS-37-N 1000 ZS-37-P 2000 ZS-37-C 5000 Part number Cable length [mm] Changing the entry direction After separating the terminal block and housing, the cord entry can be changed by attaching the housing in the opposite direction 180.