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C Fluid N2 add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

B: Fluid N2 add Specifications: Note 3) add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

No.SYJ700*-OMK0001-A -8- Revision history A Safety Instructions PR 1st printing : KU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.SYJ700-OMK0001-A

[December 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. DeviceNet is registered trademark of ODVA, Inc. 2011-2021 SMC Corporation All Rights Reserved No.EX-OME0003-H

[January 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. EtherNet/IP is a registered trademark of ODVA, Inc. 2017-2022 SMC Corporation All Rights Reserved No.EX-OMU0028-D

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 15 No.SX3000-OMM0002-B Revision RENEWAL 2018.8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018

Leakage due to deterioration of the rubber part. 7Troubleshooting 1 Reduction of the set pressure 3 Increased leakage from the bonnet breathing hole and exhaust port There is leakage from the ports other than the bonnet breathing hole and exhaust port. 8 8 Dimensions -12- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019-2022 SMC Corporation All Rights Reserved No.EX-OMW0016-A

Material Note 1 Body A PBT 2 Body B PBT 3 Needle PBT 4 Knob POM 5 Stopper Stainless steel 6 Needle guide Brass Electroless nickel plated 7 Disk seal HNBR 8 Stud Brass Electroless nickel plated 9 O-ring NBR 10 O-ring NBR 11 O-ring NBR 12 Cassette 13 Seal NBR 14 O-ring NBR Only Meter-in 15 Gasket NBR/Stainless steel 16 Seal NBR 10 - S Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Description Material 1 Body C3604, C3771 2 Union nut C3604 Resin sleeve, plug Nylon 66 Brass sleeve C2700 3 11 Revision history A -: Fluid N2 Turbine oil class1 (ISO VG32) add SpecificationsNote 3,4,5) add Applicable Tubing : TUZ add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to

There is leakage at the places other than the bleed hole and EXH port. 9 -13- -14- Revision history A Thread type (NPT,G) addition B Format change and content review C Sectional view filter deletion of P.5 D Name plate layout change E Content review 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2022 SMC Corporation All Rights Reserved No.EX-OMN0009-G

If any trouble should happen with the uni,please send it back to the supplier for repair or replacement. 8 No.SYJ300-OMO0002-A Revision history A Added the SYJA3000 SS 1st printing PP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on

Insufficient bolt tightening After stopping air and re-tighten the bolts. 32 No.VQC1000V-OMM0002-B S Revision history Safety Instructions Specific Product Precautions Valve construction Manifold Options 2020.7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

H: Contents are added [September 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2021 SMC Corporation All Rights Reserved No.EX-OMB0014-H

[July 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008-2022 SMC Corporation All Rights Reserved No.D-S-OMJ0004-G

Revision history A: Tube connection type added Precautions change B: Fixed failure countermeasures 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Description Maintenance/Service Work Description Date IDU Series 13-1 Service Record 131 Revision BSep.2022 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2022 SMC Corporation All Rights

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 12 No. 100-OMV0001 S Revision history 1st Printing :WQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

. -29No.D-S-OMU0002-A Dimensions Teach pad Indicator light Mounting thread D-MPA M8-4 pin connector D-MPB M12-4pin connector D-MPC (mm) B Model A Detectable range D-MP025 40.5 25 D-MP050 64.9 50 D-MP100 114.9 100 D-MP200 214.7 200 -30No.D-S-OMU0002-A Revision history A: Contents revised in several places [June 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249