Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Without auto switch Auto switch (mm) E Size Elliptic retaining ring (PAT.) 22 20 24 25 28 32 32 40 Note 1) Cylinder tube width tolerance: 0.2 Note 2) Minimum mounting pitch of auto switch is specified. Refer to back page 3.
SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70
) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:
ZP3P-20PTSF ZP3P-25PTSF ZP3P-35PTSF ZP3P-50PTSF p. 2 q Pad unit With Buffer p.6 e Buffer assembly Pad diameter Part no. 20 25 35 50 Dimensions ZPB2(J/K)10-B5 V V ZPB2(J/K)20-B5 V V ZPB3(J/K)10-B01 V V ZPB3(J/K)20-B01 V V p. 12 e Buffer assembly w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V w T female thread adapter p. 11
When error occurs Precautions W hen an e rror occurs,take the following steps. The tenSile strength of the cord is 49N (Skgf). Con t e nl~s___ __-+;;-:::-:::-:-~D~;S~~S~~ o ~n,-:-:cc_ ; I i Tensile strength greater than that will cause Set data is changed by some Influence Push the RESET key to set troubte.
1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Note CRJ Aluminum alloy Body A Light gray color Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !
1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !
E (16 outputs) 0 2 EX600-DY#F Digital output unit (16 outputs) 0 2 EX600-DYPE1 (24 outputs) 0 3 EX600-DYPG1 (4 outputs) 0 1 EX600-DM#E (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DM#F (8 inputs/8 outputs) 1 1 -66No.EX-OMY0027 Allocated bytes Unit Unit part number Input Output EX600-AXA 4 (2 bytes per channel) 0 (2 channels) Analogue input Unit EX600-AXB 8 (2 bytes per channel) 0 (4 channels
E: Modified errors in text. F: Modified errors in text. G: Contents revised in several places. [September 2016] H: Contents revised in several places.
Error output is selected: Refer to page 43 e. Output OFF is selected: Refer to page 43 Press the SET button to set. Return to function selection mode.
A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E
PNP Analogue 1 to 5V F* PNP Analogue 4 to 20mA E and F: Provided for the isolated type only.
Tubing length = (2E + X) E dimension E dimension X 1% of E-dimensions (as a guide). E-dimensions vary according to the fitting size. Please refer to the WEB catalog or the Best Pneumatics No. 7 for details. 2. Insufficient tubing length or use of the tubing under tensile stress may cause leakage or breakage of the fitting.
e 40 40 32 32 1000 1000 25 25 20 20 5 500 5 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-5 Heating capacity(HRS060-A-20-(BJM)) 9.5.2 HRS060-W-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15
Power supply connector Cable Qty. x size 3cores14AWG 3cores2.0mm2 *including ground N E(Earth) L Fig 3-3 Cable connection 5. Insert the power supply connector to the power supply connector socket. 6.
P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.
Do not use devices that generate electromagnetic radiation such as *Cooling capacity decrease approx. 20W when high pressure pump option selected Month A B C D E F . Caution, Warning or Danger, followed by important safety information which must be carefully followed. cellular phones near the product.
B Display/Operation panel G RemoteAlarm output connector D Compressed air INOUT I Temperature sensor connector D C Heat radiating air suction port H Communication connector D A Power switch F ACDC connector C E Power connector 6 Outline Dimensions (mm) Controller Heat exchanger G H I 8 Maintenance 7 Key Parts C E F A C B