) (mm) Width across corners I 85 103 132 H 128 144.5 171.5 FX 73 90 110 FZ 93 114 138 GA 16 24 24 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99 128 CD 20 20 25 L 45 54 56 N 9 11 13 QA 10 12.5 12.5 QB 7 8.5 10 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21
temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01 27 Unit specification Flow rate range With unit switching function Fixed SI unit Note) Nil M 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21
JS20, 32, 40, 63 M M U U D J F H B E G P A Rod end nut (mm) 30 Description H B C D d: Nominal thread size d Nut for JS10 M4 x 0.7 3.2 7 8.1 6.8 Nut for JS16 M5 x 0.8 4 8 9.2 7.8 Nut for JS20 M8 x 1.25 5 13 15 12.5 D C Nut for JS32 M10 x 1.25 6 17 19.6 16.5 Nut for JS40 M14 x 1.5 8 22 25.4 21 H B Nut for JS63 M18 x 1.5 11 27 31.2 26 (mm) Max. tension and compression N Allowable eccentricity
steel Black zinc chromated Stopper nut 3 Resin Nut 14 Aluminum alloy LX Bumper bolt Coupling 4 Bearing steel 15 Nickel plated Bumper Resin Bearing 5 16 Aluminum alloy Resin Motor cover Body 17 6 Anodized Tension ring Mounting plate Mild steel Stainless steel 7 Nickel plated 18 Ball bushing Cable cap 8 19 Bearing steel Plug Guide rod Chrome plated 20 9 Magnet Aluminum alloy Tube Anodized 21
Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum
W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5
A side: Orange (for supply valve) B side: Green (for release valve) Release flow adjustment needle (With light/surge voltage suppressor) 33.3 4.4 Pressure setting trimmer Pilot valve exhaust port Hysteresis setting trimmer (M3: Port PE) Silencer (AN203-KM8) 57.1 62.1 47.5 39.7 29.5 21 33.6 23.5 10 Vacuum port (5.25) (13.5) 3.75 (8.25) 6 One-touch fitting Port V Supply port 16.75 88 19 Button
20 l/min (ANR) Pressure Characteristics (Representative values) ARG20 ARG30 ARG40 0.25 0.25 0.25 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point Set point 0.2 0.2 0.2 0.15 0.15 0.15 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) Inlet pressure (MPa) Inlet pressure (MPa) 21
Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-148 for Precautions on every series. Please use the adsorbent set (refer to page 14-19-1 for Accessory/Replacement Parts) when replacing the adsorbent. HA 2.
loaded with a differential line driver method is used, it is 10 m or less. 61 Incremental Type Series LECSA Absolute Type Series LECSB Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Model Selection Specific Product Precautions AC Servo Motor Control Signal Wiring Example: LECSB LECSBm-m LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21
Failure Note 3) N OPC 2 12 MBR RA2 Electromagnetic brake interlock DOCOM 13 S/S Y000 PP 23 COM1 Y010 NP 25 10 m or less COM3 15 LA A-phase pulse detector (Differential line driver) Y004 CR 5 16 LAR COM2 17 LB B-phase pulse detector (Differential line driver) 18 LBR Xmmm INP 10 19 LZ Z-phase pulse detector (Differential line driver) 20 LZR Xmmm Control common 14 LG RD 11 Xmmm Plate SD OP 21
Part Number Description: SUPPLY DIAPHRAGM Product Line: I Product Line Description: INSTRUMENTATION Family Code: 808 Family Description: IP200 POSITIONER Class Code: 21 Part Code: 2 Reference Code: K Click here to report information errorImage shown may not match exact part number, SUPPLY DIAPHRAGM, INSTRUMENTATION, IP200 POSITIONER, 21, IP200 NO SIZE PART, .00880
SEPARATOR, 21, AMR NO SIZE RAPART, .92400 lb
Part Number Description: ADAPTOR PLATE B END Product Line: V Product Line Description: VALVE Family Code: 243 Family Description: VF5000 SOL VALVE 4/5 PORT Class Code: 21 Part Code: 2 Reference Code: J PDF Documentation: Click here to report information errorImage shown may not match exact part number, ADAPTOR PLATE, B END, VALVE, VF5000 SOL VALVE 4/5 PORT, 21, VF5000
(NVSP4026) SOL 4/5 PORT, 21, V4000F(NVSP4026), .00220 lb
Part Number Description: ELEMENT GUIDE (FGDTB) Product Line: O Product Line Description: OTHERS Family Code: 913 Family Description: FG HYDRAULIC FILTER Class Code: 21 Part Code: 2 Reference Code: K Click here to report information errorImage shown may not match exact part number, ELEMENT GUIDE (FGDTB), OTHERS, FG HYDRAULIC FILTER, 21, FG NO SIZE RATING, .00000 lb
Please contact us for the latest version.sales@ocaire.com, 21 STA MNLFD, SPL, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb
Size: 1/8, Model Combination: AF+AR+AL, Port Size: 1/4, Size 21, Accessory: None, All Sizes, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl, Flow Direction: Right to Left, Size 21
Size: 1/8, Model Combination: AF+AR+AL, Port Size: 1/4, Size 21, Accessory: None, All Sizes, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl, Flow Direction: Left to Right; Size 21
Size: 1/8, Model Combination: AF+AR+AL, Port Size: 1/4, Size 21, Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: Metal Bowl, Flow Direction: Right to Left, Size 21