Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19 75, 100 58.5 50.5 6 Series CQ2Y Mounting bracket dimensions are the same as those of the anti-lateral

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA1 MSUA1-S, SE Scale: 70% C 8-M3 x 0.5 depth 5 51 31 38 23.5 B 25 4-M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (positioning pin hole) 35h9 0 0.062 22.5 +0.025 0 +0.043 0 3-3H9 depth 3 ( A , B , C ) 17 H9 27 2.5 2 2-4.5 through 3-R1.5 12.5 37 8 6.5 10.3 6.5 36h9 0 0.062 31 4.2 2 31.5 2 27 16 9 5 Angle adjustment bolt 4.5 2-4.5 through 3-R1.5

Air Cylinder CLA Series Fine Lock Model

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1

Mechanical Joint Rodless Cylinder/Basic type Series MY3A/3B

25 40 With air cushion MY3A MY3B 84 27 37 54 MY1B 116 37 54 84 Weight Up to 53% reduction Overall length(Z+Stroke) Z dimension Weight (mm) (kg) Series Series 16 25 40 63 16 25 40 63 MY3A MY3B MY1B MY3A MY3B MY1B 110 150 240 320 0.34 0.87 2.95 8.26 122 178 276 356 0.35 0.97 3.08 8.99 160 220 340 460 0.73 1.57 4.41 14.5 For100mm stroke MY3B/ Air cushion MY3A/ Rubber bumper

Process Pump Series PA3000/5000/PAX1000 Series PB1000

3.28ft 1MPa = 145psi Performance Curves/Air Operated Type PA313 Flow rate characteristics PA513 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa 30 30 Total lifting range m Total lifting range m SUP=0.3MPa 20 20 SUP=0.3MPa SUP=0.2MPa SUP=0.2MPa 10 10 0 0 4 12 16

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa 30 30 Total lifting range m Total lifting range m SUP=0.3MPa 20 20 SUP=0.3MPa SUP=0.2MPa SUP=0.2MPa 10 10 0 0 4 12 16

Series M Miniature Fittings M3, R(PT) 1/8, M5

A C B ) M-01AN-4 M-01AN-6 M-01AU-4 M-01AU-6 5 7 5 7 16 18 16 18 2.1 4.0 2.1 4.0 1.8 2.5 1.8 2.5 Nylon tube Soft tube Hose nipple: M-01H-4, -6 Effective orifice(mm2 Weight (g) ) Part No.

For Water Digital Flow Switch Series PFW

Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire Nil N Port size Size Applicable model Flow rate (l/min) Symbol Output specification 40 4 16

Air/Manually Operated High Purity Chemical Valve Series LV

/N.O. with same configuration/Double acting Compatible with 100C fluid temperature 1.12-4 Integral Fitting Type Series LVC Air Operated P.1 to P.6 LVC20/23 4 4, 6 1/8, 1/4, 3/16 LVC30 8 6, 8, 10 1/4, 3/8 LVC40 10 10, 12 3/8, 1/2 LVC50 16 12, 19 1/2, 3/4 Model Orifice diameter Millimeter Tube outside dia. Inch Symbol Type Basic type Valve type N.C. PB PA PA N.O. B A B A B A PB N.C.

Series LX Construction and Mounting

Description Material Aluminum alloy Stopper B Motor 1 10 Sensor plate Direct acting guide 2 11 Chromated Mild steel Coupling 3 Resin/Alloy steel Aluminum alloy 12 Nut Alloy steel Magnet Rolled screw 4 13 Bumper Body Rubber Anodized 5 14 Aluminum alloy Resin Motor cover Anodized Aluminum alloy Table 6 15 Anodized Aluminum alloy End plate Photo micro sensor 7 16 Anodized Aluminum alloy

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219 357 253.5 L2 81 322.5 127.5 196.5 300 162 231 369 265.5 L3

LEFS16, 25, 32, 40 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LEFS16, 25, 32, 40 Series LEFS RoHS How to Order LEFS 16 100 B 1 1 S 6N 2 ' . / 4 0 ( + Size 2 Motor type 16 25 32 40 Symbol Type Applicable size Compatible controllers/driver LEFS16 LEFS25 LEFS32 LEFS40 LECP6 LECP1 LECPA Step motor (Servo/24 VDC) Nil ) ) ) ) Servo motor (24 VDC) A ) ) LECA6

(N)CQ2

Note 2) Not available with bore size over 63mm, or strokes over 100mm. 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm 140 mm 160 mm 180 mm 200 mm Body option Mounting B A D L G F Through hole (std.)

SI Unit: 1A3N (32 Outputs, 1 to 16 Stations), Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: R (External Pilot), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: 1A3N (32 Outputs, 1 to 16 Stations), Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: R (External Pilot), A, B Port: C6 (ø6 One-touch Fitting)

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller ELECTRIC ACTUATOR. 2-FINGER TYPE ELECTRIC GRIPPER. 1.95000 lb. A10.

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller ELECTRIC ACTUATOR. 2-FINGER TYPE ELECTRIC GRIPPER. 1.09500 lb. A10.

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller, 2-Finger Electric Gripper, ELECTRIC ACTUATOR, A10, 220.25 lb

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller, 2-Finger Electric Gripper, ELECTRIC ACTUATOR, 430.25 lb

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller, 2-Finger Electric Gripper, ELECTRIC ACTUATOR, 430.75 lb