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Description Material Part No. o Clamp A Steel plate AXT625-4A @ Clamp B Steel plate Subplate Bas Cv:0.9 O-ring NBR AXro50-031 O-ring NBR AXT625-36 O-ring (3 req d) NBR AXT625-34 G O-r'rng NBR AXr625-35 o Adapter AXT625-28-1 Terminalassy AXT625-28-24 o C.onduit cover assy NWF2000-4A( stations Note) Subplate shown: Plug-in typ wilh tenninal. Main Parts No. Description Part No.

3 Port Air Operated Valve Series SYJA300 1

8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting) 2-4.5 Manual override (Non-locking) Manual override (Non-locking) (External pilot port) (For mounting) (For solenoid valve) 12 23.5 11 A (44) (36) 21 28

FILTER REGULATOR

1/43/8 1/8 38.4 AW40K-B 70 147.1 91.7 37.3 80 37.3 1.5 28 42.5 75.7 42.5 1/43/81/2 1/8 1/8 44.3 38.4 80.8 75.7 AW40K-06-B 75 149.1 93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 AW60K-B 95 234.1 175.5 47.5 30 47.5 3.2 28 42.5 80.8 42.5 1 1/8 Optional Bracket mount dimensions Panel mount dimensions Model Q S T U AW20K-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AW30K-B 41 40 45.8 6.5 8 53

Square Tube Type Air Cylinder Series MB1

Note) Pin, cotter pin and flat washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

T) (mm) Dimensions PB T U Model LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm PA 28 9.6 34 17.5 A B 35 20 U 57 25 With flow rate adjustment & bypass (Max. T) (Max.

Solid State Auto Switch

D-M9NA D-M9NAV D-M9PA D-M9PAV D-M9BA D-M9BAV Lead wire orientation In line Perpendicular In line Perpendicular In line Perpendicular Wiring 3-wire 2-wire Output NPN PNP Applicable load IC circuit/Relay/PLC 24 VDC Relay/PLC Power supply voltage 5/12/24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40

Solid State Auto Switch

D-S79# D-S99# D-S99V# D-S7P# D-S9P# D-S9PV# D-T79#(C) D-T99# D-T99V# Lead wire orientation In line Perpendicular In line Perpendicular In line Perpendicular Wiring 3-wire 2-wire Output NPN PNP Applicable load IC circuit, Relay, PLC 24 VDC Relay, PLC Power supply voltage 5/12/24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current

Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

AWM20 to AWM40

/AWD30 28 27.8 M38 x 1.5 1/4, 3/8 1/8 55 3.5 30.5 41 37.5 66 53 201 86 29.5 30 29.5 AWM40/AWD40 28 27.8 1/4, 3/8, 1/2 M42 x 1.5 1/4 80 1.5 38.5 49 42.5 76 70 239 92 37.5 38 37.5 Optional specifications Semi-standard specifications Bracket mount Panel mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model M N Q R S T U V W Y Z B B B B B AWM20/

AWM20 to AWM40

/AWD30 28 27.8 M38 x 1.5 1/4, 3/8 1/8 55 3.5 30.5 41 37.5 66 53 201 86 29.5 30 29.5 AWM40/AWD40 28 27.8 1/4, 3/8, 1/2 M42 x 1.5 1/4 80 1.5 38.5 49 42.5 76 70 239 92 37.5 38 37.5 Optional specifications Semi-standard specifications Bracket mount Panel mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model M N Q R S T U V W Y Z B B B B B AWM20/

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

New

28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

Air Cylinder Series MB

20 30 30 32 28 28 40 60 60 64 Y-04MNote 1) 50 12.5 Y-05MNote 1) 64 16.5 Y-08MNote 1) 80 23.5 Y-10MNote 1) 80 23.5 Y-12MNote 2) 119 28.5 Note 1) A pin, cotter pin and a flat washer are equipped as standard.

CLA

i.\4 L, Material: Free cutting sulfer sleel Malenal: Cast lion -NX A 1 ~ 1-05 50-63 74 27 28 60 M18X 1.5 15.5 2Q 121'0711 1 ~ Y-04d 40 22 24 55 M1 4X 1.S 13 25 12171) 1 6'j-~ 38 p .OS 80 91 37 36 71 M22Xl.5 225 26 18,&070 281l V. SO-63 27 28 60 M' 8Xl .5 15 27 12'870 1 6 ~f 38 ~10 100 105 37 40 83 M26Xl .S 24.5 28 20-8-08< 3():gJ Y-08d 80 37 36 71 M22Xl .S 19 28 181. 010 28!

Rotary Table

Table 7 Bolt dimension [mm] Bolt Size L Bolt 10 27 M6 20 28 M8 30 31 M8 50 35 M10 70 42.5 M10 100 48.5 M10 200 61.5 M12 Fig. 3 23 - Direction and Angle of Rotation (Adjusting bolt, Internal shock absorber type) When the cylinder is pressurized from port A, the table rotates clockwise.

Mechanically Jointed Rodless Cylinder Series MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2C 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Fieldbus System

Note 3) Note 4) Cylinder port size Port size Symbol C2 C3 C4 CM N1 N3 NM With 2 One-touch fitting With 3.2 One-touch fitting With 4 One-touch fitting Mixed sizes and with port plug Note) Note 1) When two or more symbols are specified, indicate them alphabetically.

Compact Rotary Actuator Series CRQ2

L1 (3 x P) Q1 = M C2 = C Y = C1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = DD2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 L1 max X 2 X 2 L2 max Y Y Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 257 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

BP1000

BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material S 316L SS secondary remelt SH Wetted Parts Body Diaphragm Nozzle Seat Seal Hastelloy C-22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28

MHK2

x 35 mm round bar Workpiece diameter: From dimensions of model that has opening width 28 mm or more.