Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Air Slide Table

Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Dimension L 0 1 2 3 4 5 6 7 8 9 10 No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

150 + l 20 151 150 130 129 170 + l 149 + l 180 + l 159 + l 25 158 157 137 136 179 + l 158 + l 187 + l 163 + l 32 165 165 141 141 187 + l 163 + l 212 + l 184 + l 40 187(196) 164 159(168) 207(216) + l 179(188) + l 192 242 + l 210 + l 50 217(229) 190 185(197) 237(249) + l 205(217) + l 222 252 + l 215 + l 63 227(239) 195 190(202) 247(259) + l 210(222) + l 232 303.5 + l 245 + l 80 288.5(302.5)

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

2-Color Display Digital Flow Switch Series PFM

Flow range Sensor 0.2 l/min 0.5 l/min 1 l/min 2 l/min 10 l/min 25 l/min 50 l/min 100 l/min 0.2 l/min 10 l/min (5 l/min) PFM710 PFM510 0.2 l/min 10.5 l/min (5.2 l/min) 10.5 l/min (5.2 l/min) 0 0.5 l/min 25 l/min (12.5 l/min) PFM725 PFM525 0.5 l/min 26.3 l/min (13.1 l/min) 26.3 l/min (13.1 l/min) 0 1 l/min 50 l/min (25 l/min) PFM750 PFM550 1 l/min 52.5 l/min (26.2 l/min) 52.5 l/min (26.2 l/

PFxx-OMX0002

to 6000 L/min 120 to 12000 L/min Instantaneous flow 30 to 3150 L/min 60 to 6300 L/min 120 to 12600 L/min Set point range Accumulated flow 0 to 999,999,999,990 L 0 to 999,999,999,900 L Flow specifications Instantaneous flow 2 L/min 5 L/min 10 L/min Minimum resolution Accumulated flow 10 L 100 L Accumulated volume per pulse (Pulse width = 50 msec.)

Compact Hydraulic Cylinder

Cotter pin 4 x 20 l (2 pcs.)

Air Cylinder

159 + l 150 172 + l 136 158 + l 149 171 + l 32 141 163 + l 156 178 + l 141 163 + l 156 178 + l 40 164 184 + l 182 202 + l 159 (168) 179 (188) + l 177 (186) 197 (206) + l 50 190 210 + l 210 230 + l 185 (197) 205 (217) + l 205 (217) 225 (237) + l 63 195 215 + l 217 237 + l 190 (202) 210 (222) + l 212 (224) 232 (244) + l 80 236 245 + l 254 263 + l 230 (244) 239 (253) + l 248 (262) 257 (277)

One-touch Fittings

57.4 45.4 9 18.4 L M L D L L M Q Q D 2 x N 2 x O Q Q Different Diameter Cross: KQ2TX Applicable tubing b Applicable tubing O.D.

Electric Grippers

LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) M4 x 0.7 1.4 LEHF10 LEHF20 LEHF32 LEHF40 30% (F.S.) 25% (F.S.) 20% (F.S.) Bolt Max. tightening torque [Nm] Model LEHS10(L) LEHS20(L) 30% (F.S.) 25% (F.S.) 20% (F.S.) LEHS32 LEHS40 LEHS10(L) LEHS20(L) LEHS32 LEHS40 M3 x 0.5 0.9 M3 x 0.5 0.9 5.

Air Slide Table Series MXQ

(mm) B A 2 2.5 4 5 5.5 10 Model MXQ 6 (L) MXQ 8 (L) MXQ12 (L) MXQ16 (L) MXQ20 (L) MXQ25 (L) (1) 3 132

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Refer to L dimensions Enter a number from the DIN rail dimension table below. d L 8 (10) D (24) (35) 5.5 A L Rail mounting hole pitch: 12.5 0 98 24.8 5 160.5 40.6 7 185.5 46.9 1 110.5 28 6 173 43.8 8 198 50.1 2 123 31.1 9 210.5 53.3 3 135.5 34.3 4 148 37.4 No.

Series PF2W Digital Flow Switch For Water

Sensor 1 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 500 L/min Flow rate range 1 L/min 10 L/min PF2A510 0.5 L/min 10.5 L/min 5 L/min 50 L/min PF2A550 52.5 L/min 2.5 L/min 10 L/min 100 L/min PF2A511 105 L/min 5 L/min 20 L/min 200 L/min 210 L/min 10 L/min PF2A521 50 L/min 500 L/min 525 L/min 25 L/min PF2A551 Sensor Flow rate range Static Electricity

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

L: Plug lead type L plug connector, With lead wire With light/surge voltage suppressor Plug lead unit manifold VV4QD15-05M51 set Manifold base part no.

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

Compact Cylinder with Lock Series CLQ

M6 x 80 L M10 x 100 L M5 x 55 L 65 80 100 55 CL1 -15D -15D x 70 L x 85 L x 105 L x 60 L 70 85 105 60 -20D -20D x 75 L x 90 L x 110 L x 65 L 75 90 110 65 MLGC -25D -25D x 80 L x 95 L x 115 L x 70 L 80 95 115 70 -30D -30D x 85 L x 100 L x 120 L x 75 L 85 100 120 75 10.5 CNG -35D -35D 7 12.5 17 x 90 L x 105 L x 125 L x 80 L 90 105 125 80 -40D -40D x 95 L x 110 L x 130 L x 85 L 95 110 130 85