Tie-rod Type Hydraulic Cylinder

(same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) Different surfaces 90 90 120 15 2 pcs. "n" pcs. 2 pcs. "n" pcs. 2 pcs. "n" pcs.

Stainless Steel One-touch Fittings Series KG

Nylon Urethane KGW04-M5 KGW04-01 8 32 38.5 18 30 37.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 8 3.0 3.0 1 8 10 6 17 12.8 20 10 1 4 KGW06-02 46 46.5 10.9 10.9 17 14 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 18.5 20.5 14.2 15.2 14 12 23 3 8 KGW08-03 17 51.5 52.5 74

Booster Regulator/Air Tank

) 1019 VBA Series Dimensions VBA22A-03 300 59 39 Pressure gauge (Option) 28 Pilot port OUT side gauge port 1/8 IN side gauge port 1/8 1/8 IN port 3/8 139 43 46 15 Silencer (Option) OUT port 3/8 21 24 EXH port 3/8 4 x 12 98 53 3.2 73 118 (When silencer installed: 153.5) (When high-noise reduction silencer installed: 179) VBA42A-04 404 85 40 Pressure gauge (Option) Pilot port 1/8 43 IN side

MB

8 !

45

Applicable up to 8 solenoids.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

= 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 15 75 90 100 110 D-A9l n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16)

Plug-in Unit

Note 2) Symbols for inch sizes are as follows: N7: 1/4" N9: 5/16" N11: 3/8" NM: Mixed 0 1 8 With 8 input blocks Note)Max. 4 for EX240 and max 8 for EX250. SI unit COM.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Slide Unit Series CX2/CXWM/CXWL

For dimensions of 25 stroke, refer to page 494. 493 Series CXWM 25 With End Lock: CXWM2525 stroke R 2 x 2 x M6 x 1.0 thread depth 12 Max. 201 2 x 2 x 6H7 depth 8 +0.012 0 2 x M10 x 1.0 Adjusting bolt 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x Rc 1/8 Cylinder port 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) Max. 6 2 x RB1006 shock absorber (Single

CNG

4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.

Slide Unit Series CX2/CXWM/CXWL

For dimensions of 25 stroke, refer to page 494. 493 Series CXWM 25 With End Lock: CXWM2525 stroke R 2 x 2 x M6 x 1.0 thread depth 12 Max. 201 2 x 2 x 6H7 depth 8 +0.012 0 2 x M10 x 1.0 Adjusting bolt 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x Rc 1/8 Cylinder port 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) Max. 6 2 x RB1006 shock absorber (Single

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Air Slide Table

6 15.5 MXQR 6 6 7 2.5 19 8 7 M2.5 x 6 14.5 12.5 M2.5 x 8 7 8.3 M5 x 0.8 M 15 MXQR-CS 6-X11 25.5 5 MXQR-CS 8 18 B 7 8 3 22 9 MXQR 8 7.5 16.6 14.6 8 9.8 M6 x 1 15 MXQR-CS 8-X11 M3 x 8 M3 x 10 28 F 25 MXQR-CS 8-X12 38 5 MXQR-CS12 22 E G MXQR12 M8 x 1 M4 x 12 M4 x 12 9.5 12 4 29 14 11 20.5 18.5 11 13 15 MXQR-CS12-X11 32 C MXQR-CS12-X12 25 42 MXQR-CS16 5 23 Table mounting parts MXQR16 M10 x 1

0.55

1/4, 3/8 1/8 base model 5(R), 3(R) port 1/8 1/2 5(R), 3(R) port 5/3(R) port 1/4 1/8 1(P) port 3/8 5(EA), 3(EB) port M5 x 0.8 1(P) port 5(R), 3(R) port 3/8 1/8 EXH Common EXH Individual EXH Common EXH Common EXH Common EXH port type VF3;30 VF3;33 VF5;20 VF5;23 VF1;30 VF1;33 Applicable valve model Applicable 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations stations Manifold

KG

27 27.5 29 29 1 8 Applicable tubing 6 1 4 17 11.4 9.0 12.8 10 20 Connection thread 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 27 32 30 33 32 34.5 8 21.6 14.9 18.5 15.2 12 23 Applicable tubing 21.6 14.9 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 22 20.9 17 28.5 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101

CNG

4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA CNS Long stroke CLS Description Material Note Component Parts No.

HRX-OM-M005

Appendix . 8-1 8.1 Specification . 8-1 8.1.1 Product specification . 8-1 8.1.2 Refrigerant with GWP reference . 8-8 8.1.3 Communication specification. 8-9 8.1.4 Alarm signal selection . 8-11 8.2 Outer Dimensions . 8-12 8.3 Flow Chart . 8-13 8.3.1 HRZD020-WS-WS, HRZD020-W1S-W1S, HRZD020-W1S-WS, HRZD020-WS-W1S . 8-13 8.4 Offset Function . 8-14 HRZD Series TOC--3 HRX-OM-M005 Table of Contents

5 Port Air Operated Valve

(For mounting) (26) 1/8, 1/4 [1(P)port] (18.4) 1/8, 1/4 [1 (P) port] (18.4) (18.4) VGA (18.4) (Distance between ports) (Distance between ports) 1/8 [5(EA), 3(EB)port] 1/8 [5 (EA), 3 (EB) port] VPA 1P 3EB 1P 3EB 8 VPA3 7.5 7.5 5EA 5EA 8 7.5 2 (Breathing hole) 36 2 x 2 (Breathing hole) 36 12.5 30.5 71 66 3 position closed center/exhaust center/pressure center VFA3 30(-P) 01 02 3 4 5 23 1/8

Stainless Steel 316

(mm) Connection thread Model R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 R1/4 4 10 R1/8 R3/8 M5 R3/8 12 6 R1/8 R1/2 R1/4 R1/8 Union Tee Union Tee 8 R1/4 Applicable tubing O.D.

Series KG Stainless Steel One-touch Fittings

Nylon Urethane KGW04-M5 KGW04-01 8 M5 0.8 32 38.5 18 30 37.5 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 3.0 3.0 8 1 8 10 6 17 20 12.8 10 1 4 KGW06-02 46 46.5 17 14 10.9 10.9 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 14 18.5 20.5 14.2 15.2 12 23 3 8 KGW08-03 17 51.5 52.5 74