Air Filter

Rc AD38-6-A G NPT AD38N-6(Z)-A D Note 1) Option symbol 8 Semi-standard symbol Semi-standard: 8 Piping port thread ty pe (5) Part No. Rc G AD38-8-A NPT AD38N-8(Z)-A Appearance and part No. Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. (5) includes Bowl seal (4). Refer to the section [11. Disassembly Drawing] (P29).

ZR

PV PS/PD RV2 Symbol PV/PS PD RV3 PV/PS/PD RV4 Rc Air supply port 1 8 Manifold Unit Rc Vacuum pad connection port 1 8 Rc Air supply port 1 8 Common specifications M5 Pilot valve connection port Release valve connection port M5 Common exhaust port Rc 1 2 Rc 1 8 External vacuum supply port Refer to pages 13-3-9 to 13-3-20 for further specifications of each unit.

1.1

IDF-TR7000-8 IDF-TR14000-8 IDF-TR18000-8 Mass (kg) 360 400 650 450 300 350 13 40 152 400 650 450 300 350 13 40 179 32 Thermo-cooler Series HRG Dimensions [Foundations bolt set] HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products A Mounting hole diameter: 10.5 (mm) A Nominal thread size Applicable Thermo-cooler Part no.

KB

29.0 32.0 27.5 35.5 17 17.6 R 1 4 R 3 8 R 1 4 R 3 8 R 1 2 R 3 8 R 1 2 19 25.2 31.0 22 35.5 31.5 24 27.0 Reference dimensions after R thread installation.

KS/KX

5.0 8 26 15 15 12.8 24 17 6 28 1 8 1 4 20 26 28 34 43 69 77 95 89 106 14 8.6 8.6 4 28 29 32 33 38 39 29 32 33 34 1 8 18 15.2 27 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 17 21.6 14.9 8 Applicable tubing 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 Connection thread 42 40 43 24 20.9 26 35 22 8 35.1 35.1 12 Reference dimensions after R thread installation.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Adapter with throttle Rc 1/8 ZS-31-X188 1 pc. Adapter with throttle NPT 1/8 ZS-31-X189 1 pc.

VK300

Solenoid direction Port size Opposite side of A port Nil 1 8 Rc G NPT NPTF 01 Rc Nil C4 4 cassette F N T Same side of A port S C6 6 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station CE-compliant VV061 20 20 stations Q CE-compliant Nil P port: Rc 1/8 R port: Rc 1/8 VV100 Note) Applicable only for DIN terminal

Fieldbus system Ethernet POWERLINK compatible SI unit

Occupied word size Unit Unit part number Input Output System diagnostic 1 0 Diagnostic data Unit diagnostic 1 0 SI unit EX600-SPL1-X26 (32 outputs) 0 2 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs) (with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 1 0 EX600-DXE (16 inputs) 1 0 EX600-DXF (16 inputs) 1 0 EX600-DYB (8 outputs) 0 1 EX600-DYE

mb1

8 !

Dual Speed Controller with One-touch Fitting Series ASD 1

Port size 10 8 6 12 1/8" 1/4" 3/8" 5/32" 3/16" 5/16" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

Clamp Cylinder with Lock

#5 r #6 #8 !

VXA21/22

IN MaterialO Model Body Seal Brass, Stainless steel NBR, FPM, EPR Orifice size (mm) Model Port size Rc(PT) VXA212 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 , 3 8 1 2 0 2 3 4.5 VXA213 0 2 VXA223 0 2 4.5 6 8 VXA224 0 2 VXA225 0 2 10 VXA226 0 2 4.1-57 VXA21/22 Normally Closed (N.C.)/Normally Open (N.O.)

IIIIIII

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

pa

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

/

External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154

Micro Mist Separator

: 8 Semi-standard: 8J Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C4LF-8J-A C4LF-8-A G G C4LFF-8J-A NPT C4LF-8(Z)-A NPT C4LFN-8J(Z)-A Appearance and part No.

Fieldbus system DeviceNet TM compatible SI unit

Occupied byte Unit Unit part number Input Output EX600-SDNA (32 outputs) 0 4 EX600-SDNA (24 outputs) 0 3 SI unit EX600-SDNA (16 outputs) 0 2 EX600-SDNA (8 outputs) 0 1 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs) (With open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 2 0 EX600-DXE (16 inputs) 2 0 EX600-DXF (16 inputs) 2 0 EX600-DYB (8 outputs

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 !1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

70astamb1

8 !

MXH

4.8 6 6 8 8-2-6 5 Series MXH Specific Product Precautions 3 Be sure to read before handling.