M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

, Cable length (L) 1415999 Straight 2 m 1415996 Straight 6 m 1416000 Angle 2 m 1415997 Angle 6 m 1558810 Straight 2 m 1558823 Straight 6 m 1558836 Angle 2 m 1558849 Angle 6 m Type 1 Type 2 Type 3 Type 1 Type 2 49.9 L 49.9 L 36 36 3 2 4 2 4 7/8" 26 1 3 1 5 10.7 12.58 12.58 Socket pin arrangement Socket pin arrangement 7/8 inch 53 L 53 L 26.5 26.5 40.4 40.4 10.7 7/8" 7/8 inch 26 4 3 2 1 2 1

Made to Order

indicator) Solid state auto switch 24 VDC Relay, PLC Note 1) 2-color display 0.5 m 3 m 2-wire Grommet 5 m -X -X Note 1) PLC: Programmable Logic Controller Note 2) Please contact SMC for auto switches, auto switch proper mounting positions and operating ranges other than the above.

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Air Fittings & Tubing

E B C D A 7 8 2.1 5.5 7.1 7.7 6.5 8.5 19.5 20.5 8.5 9.5 1.8 3 M-01H-4 M-01H-6 SM3A, #12/#13 2.1-49 Miniature Fittings Series M Series M5 Barb fitting for nylon tube: M-5AN-4, -6 Weight (g) 1.6 1.7 Effective area (mm2) 2.1 4.0 Part No. C B A 1.8 2.5 5 8 12 14 M-5AN-4 M-5AN-6 SM5B, #1/#2 Barb fitting for soft tube: M-5AU-3, -4, -6 Part No.

Auto Switch Guide

The standard lead wire length of solid state switches with timer, water resistant 2-color indication type, wide range detection type or heat resistant 2-color indication type is 3 meters in length. (0.5 m is not available.) Lead wire lengths of 3 m and 5 m are standard for magnetic field resistant 2-color indicator type solid state switches. (0.5 m is not available.)

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Modular Design with Uniform Body Style

6*1 0.1 to 0.6 MPa v v v v v + Nil 0.5 m V V V V V b Lead wire length Semi-standard L 3 m V V V V V Z 5 m V V V V V r + c Pressure unit of the scale plate Nil MPa V V V V V P*2 MPa/psi dual scale v v v v v + d Mounting position Nil Right V V V V V R Left V V V V V V: Without restrictions v: With restrictions (Refer to *1 and *2.)

Solid State Auto Switches

Weight (g) D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 (mm) Dimensions D-M9W D-M9WV Indicator light M2.5 x 4 L Slotted set screw M2.5 x 4 L Slotted set screw 2 8 3.2 4.6 Indicator light 4 2.6 2.8 2.7 20 2.7 2.8 4 22 DD3.2 2.6 9.5 6 Most sensitive position 4 6 Most sensitive position 1591 2-Color Indication Type

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

ISO Cylinder

V (2 pcs.) V (1 pc.) M Double foot V (1 pc.) V (2 pcs.) V (1 pc.) V (2 pcs.) G Flange V (1 pc.) V (2 pcs.) V (1 pc.) U Trunnion V (1 pc.) V (2 pcs.) V (2 pcs.) V (2 pcs.) N Clevis V (1 pc.) V (2 pcs.) V (2 pcs.) V (1 pc.) V (2 pcs.) Mounting bracket symbol Accessory symbol V Rod end V (1 pc.) V (2 pcs.) V (1 pc.) Mounting Bracket/Accessory Part Nos.

Table of Contents

(95% particle size collection) Oil mist removal rate Max. 0.1 mg/m3 (ANR) (2) (At saturation of element oil, less than 0.01 mg/m 3 (ANR) 0.008 ppm) 2 years or when pressure drop reaches 0.1 MPa Element life Note 2) At oil mist density of 30 mg/m 3 ANR is blown out by compressor.

ZP

flat 7 KJH02-M5 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 M-5AU-4-X83 [Weight: 1.6 g] 2 1 Refer to "ZP3-TB -A10-B5" for dimensions. 2 When calculating the weight, add the weight of the fitting to "ZP3-TB -A10-B5".

Auto Switch Guide

The standard lead wire length of solid state switches with timer, water resistant 2-color indication type, wide range detection type or heat resistant 2-color indication type is 3 meters in length. (0.5 m is not available.) Lead wire lengths of 3 m and 5 m are standard for magnetic field resistant 2-color indicator type solid state switches. (0.5 m is not available.)

Series KV2 Fittings

m m m p p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p

ZP

flat 7 KJH02-M5 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 M-5AU-4-X83 [Weight: 1.6 g] 2 1 Refer to "ZP3-TB -A10-B5" for dimensions. 2 When calculating the weight, add the weight of the fitting to "ZP3-TB -A10-B5".

smcmaintenancepartslist

Note 2) Not possible with bronze elements. 20 Port size Rc 2 Symbol Nominal filtration accuracy (m) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 50 70 74 75 100 105 120 Symbol Element category X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Material Element type 2 3 Bronze B S T G H P M L Sintered metal Stainless steel Polypropylene Glass fiber Cotton Cotton Stainless steel

Table of Contents

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

MY1

Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(Type 20 manifold) 10 SYJ3 2 5 M 1 M3 3 Body ported Base mounted (4 port) 2 3 SYJ3 10 3 5 M (Manifold use only) Base mounted (5 port) 10 4 M 2 5 3 SYJ3 Clean series 4 port Manual override Port size Body option Nil: Non-locking push type Nil: Without sub-plate 3: Main/Pilot valve common exhaust type For type 31, S31, 32, S32 manifold 5 port R port P, E port (With gasket and screws) D: Push-turn