Compact Cylinder with Solenoid Valve/

D-A90(V) OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT() Blue Weight (g) D-A93(V) Model D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Brown OUT (+) Brown 41 Lead wire length (m) 0.5 6 6 6 6 8 8 Contact protection box CD-P11 CD-P12 Resistor 3 30 30 30 30 41 Reed switch Zener diode Dimensions (mm) OUT () Blue Blue D-A90/D-A93/D-A96 2 2.8 4.5 2.7 D-A96(V) DC (+) Brown 4 LED

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

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Digital Flow Switch (Integrated display type) ( compatible)

PF3W704 PF3W720 PF3W740 PF3W711 -98No.PF-OMW0010-D PF3W721 -99No.PF-OMW0010-D Flow characteristics of the flow rate adjustment valve PF3W704S PF3W720S PF3W740S -100No.PF-OMW0010-D Dimensions PF3W704/720/740/711 Basic type Symbol Piping port size A AA B D E F H J K L N P Model PF3W704 3/8 70 50 30 66 40.6 15.2 14 35 26 18 13.6 2.7 depth 14 PF3W720 3/8, 1/2 78 54 30 66 40.6 15.2 18 39 30 18

Regulator

Hexagon wrench (Nominal size: 4) Tightening torque: 0.6+/-0.05 N m Note) Applicable to the product without pressure gauge. (13) Plug (with O-ring) (13) Plug (with O-ring) Regulator (AR20K-D / AR30K-D / AR40K-D/ AR50K-D/ AR60K-D) Regulator (AR20-D / AR30-D / AR40-D/ AR50-D/ AR60-D) -23- 10-8.

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

MNB

(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B

Lubricator

0.3 +/0.05 N m -17- AL30-D, AL40-D, AL50-D, AL60-D AL30-D, AL40-D, AL50-D and AL60-D can replenish lubricant while being pressurized. When supplying lubricant under pressure, loosen the lubrication plug slowly by approximately one turn to exhaust the air in the bowl.

Rotary Actuator

Round shaft Round shaft Round shaft Single flat D D D C D D D Round shaft Single flat Single flat (mm) Size 10 15 20 30 40 C D 8 14 9 18 10 20 13 22 15 30 Note) Dimensions and tolerance of the shaft and single flat (a parallel key for size 40) are the same as the standard.

AC Servo Motor Driver (CC-Link Type ）

H T E (Note)L d W D T Max.

AC Servo Motor Driver (CC-Link Type ）

H T E (Note)L d W D T Max.

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

Air cylinder

(The tightening torque should be about 2 to 3 Nm.) (5) Modification of the detecting position should be made in the condition of 3. 16 Table 3 Table 4 17 Table 5 Auto switch model D-Y59 D-Z7 D-Z80 D-Y69 D-Y7P D-Y7H D-Y7W D-A3 D-A44 D-G39 D-K39 D-M9 D-M9V D-M9A D-F5 D-J5 D-J51 D-Y7BA D-P4DW D-A5 D-A6 D-A9 D-A9V Bore size A B A B A B A B A B A B A B A B A B 32 10 6.5 14 10.5 7.5 4 7.5 4 7 3.5

SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 P N 1 2 D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

Plug-in/Plug Lead: Single Unit

Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.

CXT

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

CU

(V), D-A93(V), D-A96(V) Specifications D-A96 D-A90 In-line D-A90V D-A93 In-line D-A93V In-line D-A96V Auto switch part no.

NCA1

CM2 CG1 MB How to Order MB1 NC D A1 B 150 0400 A XC8 CA2 Bore size Adjustment range A: 0 to 1" B: 0 to 2" Auto switch CS1 Mounting C76 Stroke Adjustable strokeExtend C85 C95 Dimensions CP95 P + Stroke d + Stroke + Adjustable range LD + Stroke NCM 4-DD D across flats 2-EE (NPTF) c + Adjustable range Stroke NCA AA D-X 20Depth ND 4-NT Data SN + Stroke ZZ + 2 stroke + Adjustable range (A: 1",

NCA1

B 150 0400 A XC9 Bore size Auto switch Adjustment range A: 0 to 1" B: 0 to 2" Mounting Adjustable StrokeReturn Stroke Dimensions P + Stroke LF + Stroke (2) EE (NPTF) 4-DD D across flats AA D across flats 4-NT Depth ND d + Adjustable range SN + Stroke ZZ + Stroke + Adjustable range Bore size (in) MM KK A AA B C D DD E EA EE G J JA K R WF Y LF P ZZ TN XT SN d mm 150 (1.5") 5/8 7/16-20 3/4