Series CXSJ 11-/12- ø6, ø10 21-/22- Dual Rod Cylinder/Compact Type

M L Bearing type Compact type Slide Bearing Ball bushing bearing Bore size/Stroke (mm) Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bore size 6 10 Auto Switch Specifications (Refer to the WEB catalog for detailed specifications and auto switches not in the following table.)

AC20-A to AC40-A

Air Combination Air Filter + Regulator + Lubricator AC20-A to AC40-A JIS Symbol 2 1 L How to Order AC A 30 03 DG Option/Semi-standard:Selectoneeachforatom. Option/Attachment/Semi-standardsymbol:Whenmorethanone specificationisrequired,indicateinalphanumericorder.

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.

JIS Standard Compact Hydraulic Cylinder

JIS Standard Compact Hydraulic Cylinder 20, 25, 32, 40, 50, 63, 80, 100 CH KD Series 10 MPa How to Order CHKD B 32 30 32 30 M9BW CHDKD B With Auto Switch With auto switch (built-in magnet) Made to Order specifications For details, refer to page 265. Mounting bracket type Symbol Type Port position Note) Number of auto switches B Basic type 2 pcs. 1 pc. n pcs.

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

, 45, 60 CS2 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Manufacture of intermediate strokes at 1 mm intervals is possible.

Shot Pin Cylinder CKZP Series ø 57, ø 71

T 25 TF L CKZP 57 TF T 25 CKZP 71 Switch output display Bore size Retracted Extended Nil Yellow Red 71 71 mm R Red Yellow Port thread types TF G TN NPT Proximity switch T TURCK P P&F Stroke 25 25 mm 50 50 mm Proximity Switch Specications Specications Bore size 57 71 Manufacturer TURCK P&F Power supply voltage 10 to 30 VDC 10 to 30 VDC Fluid Air Output N.O., PNP N.O., PNP Maximum operating

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Nil S n Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type 2 pcs. 1 pc. n pcs.

Compact Cylinder: Plate Type Double Acting, Single Rod Series CQU Size: 20, 25, 32, 40

Size Rod end thread 20 25 32 40 Piston area equivalent to 20 mm Piston area equivalent to 25 mm Piston area equivalent to 32 mm Piston area equivalent to 40 mm Rod end female thread Rod end male thread Nil M Cylinder stroke (mm) Size Stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20, 25 32, 40 Applicable Auto Switches/Refer to pages 13 through

ACG

Series ACG How to Order ACG 30 A 03 G1 Option Symbol Description Applicable model Body size Nil 1 2 3 6 8 C J N R ACG20 to 40 Port size Symbol (8) 0.02 to 0.2 MPa setting ACG20 to 40 20 30 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

Floating Joint: Standard Type JA Series

3-050 4-070 5-080 6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 180 200 180 200 Caution Maintenance Warning 1.

Thermo-chiller Basic Type HRSE Series

Note 7) Purchase an earth leakage breaker with current sensitivity of 15 mA or 30 mA/power supply 100 VAC separately. Note 8) Dimensions between panels, not including the dimensions of protrusion. Note 9) Weight in the dry state without circulating uids.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

20 Sensitivity of leak current mA 30 Rated operating current Note 5) A 15 8 Rated power consumption Note 5) kW (kVA) 4.6 (5.2) 5.0 (5.6) Noise level (Front 1 m/Height 1 m) Note 5) dB (A) 66 Accessories Alarm code list stickers 2 pcs.

Heatless Air Dryer ID Series

40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04 06 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200 to 220 VAC (60 Hz) Single phase 220 VAC (50 Hz) 0 F G N NPT 1 5 6 134

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

3 q Size w Motor mounting position r Lead [mm] e Motor type Symbol LEY25 LEY32 A 12 16 B 6 8 C 3 4 25 32 Symbol Type Size Compatible controller/driver 25 32 Nil Top mounting D In-line LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) A Servo motor (24 VDC) LECA6 t Stroke [mm] y Motor option u Rod end thread Nil Without option B With lock Nil Rod end female thread 30 30 to to 500

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

Plate Cylinder: Double Acting, Single Rod 25, 32, 40, 50, 63 Series MU How to Order B 25 D 30 M Z MU B 25 D 30 Z M S M9BW MDU With auto switch With auto switch (Built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. Mounting B L F G C D Basic Foot Rod flange Head flange Single clevis Double clevis Auto switch Nil Refer to the below table for applicable auto switch models.

Card Motor Series LAT3

Card Motor Series LAT3 RoHS How to Order 1 N 1 D LAT3 10 Sensor resolution Nil Controller mounting Nil 30 m DNote 3) Screw mounting F 1.25 m DIN rail mounting I/O cable lengthNote 2) Stroke Nil 10 20 30 Without cable 10 mm Note 1) Refer to page 3 for detailed specifications of the controller. Note 2) If Without controller has been selected, the I/O cable is also not included.

MLU

Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order Without Auto Switch B 25 30 D F MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc. "n" pcs.

Heavy Duty Stopper Cylinder Series RSH/RS1H ø20, ø32 ø50, ø63, ø80 3

Port Note 2) Lever detection switch type Direction of transfer R Type E2E-X1C1 E2E-X2D1-N Applicable model RSH 20, 30 RS1H 50, 63, 80 10-9-4

SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02