Series: Standard w/ Magnet, Mounting: MS2, Side Lug, Bore Size: 5" - Large Bore, Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS1, Foot, Bore Size: 8" - Large Bore, Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS2, Side Lug, Bore Size: 6" - Large Bore, Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Series: Non-rotating, Mounting: MF1, Front Flange, Bore Size: 1 1/2", Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Series: Standard w/ Magnet, Mounting: MS2, Side Lug, Bore Size: 8" - Large Bore, Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Series: Standard, Mounting: MS2, Side Lug, Bore Size: 8" - Large Bore, Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Series: Double Rod, Mounting: MX0, Basic, Bore Size: 2 1/2", Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Series: Double Rod, Mounting: MT4, Center trunnion, Bore Size: 2 1/2", Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Series: Non-rotating, Double Rod, Mounting: MX0, Basic, Bore Size: 2 1/2", Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Series: Standard, Mounting: MS4, Side Tapped, Bore Size: 6" - Large Bore, Stroke: 12", Air Cushion / Rod Boot: -, Thread: -, Adjustment Range: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, X Option: -

Fieldbus system EtherCAT compatible SI Unit

DX#B DY#B DM#E AXA AYA LBB1 SEC3 System Valve 32 Diag. Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 Unit 6 Diag.

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

LV50-OMQ0002

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

7ND9071en

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

Economy Valve

Caution Upper cylinder chamber Lower cylinder chamber DIN terminal block Terminal block Sm Sp Ground Terminal no. 1 2 E DIN terminal + Terminal + Applicable cable O.D. Type T: 4.5 to 7 mm Type E: 2.3 to 2.8 mm REG.

LV50-OMQ0004

[L/min] Flow rate [L/min] Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n] LFE3 0.02 Pressure loss [MPa] 0.015 P r essur e l oss[ M P a] 0.01 0.005 0 0 50 100 150 200 Fl ow r at e[ L/ m i n] Flow rate [L/min] -25No.LV50***-OMQ0004-F IN side straight pipe length (reference value) Straight pipe length 5 Change of accuracy [%F.S.]

CEx-OMP0016

Allowable kinetic energy E max=0.43 (J) V=Vax1.4=350x1.4=490mm/s W 30 Ev= xV2= x0.492=0.36 (J) 2g 2x9.8 Load factor a5= E = 0.36 =0.84 Emax 0.43 Examination of load factor a5 = 0.84 1 OK With above allowable value, there is no problem on the selection. ML2B25 is selected.

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

rep-modular-e

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