VFR6000 Series

Worn coil (1) Low line voltage 11 VFR6000-OMA0001-B REMEDY No.

VEX-OMY0001

) () a b P1P2 2(A) 1(P) -13No.VEX-OMY0001 (7) (1) (2) (3) (4) (5) (6) (12) (7) (8) () (9) (5) (6) (14) (10) (P2) (5) (4) (11) (4) (13) DCAC (7) 14 No.VEX-OMY0001 o. (1) (2) (3) (4) (5) 1 ISO VG 32 (6) (7) (8) (9) (10) (11) (12) () (13) (14) ()() 15 No.VEX-OMY0001 C 2020.6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81

Fieldbus system DeviceNet TM compatible SI unit

Red MS or NS Refer to failure 11. LED is ON. The valve does not Refer to failure 12. work correctly. The digital input or output device does not work Refer to failure 13. correctly. The analogue input or output device does not work Refer to failure 14. correctly. Contact SMC. -35No.EX-OMN0030-D Trouble counter measure method No. Part No.

EXxx-OMN0027CN

SF BF: () (PLC) LED 27 PROFIBUS DP SF: BF PROFIBUS DP 11 SF BF SI 0126 1~125 SF BF PLC SF: BF SI PLC V_SEL PLC SI PWR LED DC24 V+10/-5 SI ~ SI 12 SI EX600-SPR1A (PNP ) EX600-SPR2A (NPN ) SI SI -49No.EX-OMN0027CN-D No. (PNPNPN) SI PWR LED DC24 V10% 13 (PNPNPN) SI PWR LED DC24 V+10/-5 PLC -50No.EX-OMN0027CN-D No.

EX510-GPR1.eng

Input unit 1 connector 2 inputs type 1 Communication socket (BUS) 10 ( ) 12 Supplying power for output instruments such as a solenoid valve with an accessory connector ( ). 11 2 Power supply socket (PWR(V)) Supplying power for controlling GW and for input devices such as a sensor with a power supply connector ( ). 11 3 Power supply socket (PWR) Input unit 1 connector 1 input type connecting

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Ball bushing O-ring NBR Snap ring Nickel plated Carbon tool steel Rod end nut Nickel plated Steel Mounting nut Steel 12 Series MQM Dimensions Basic type: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore

Modular Type Regulator Series AR

26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40

Dedicated Controller Series LC1 Uniaxial Type

BUSY (11) Operating signal COM +24V 1 COM 11 GND NO.0 When this signal is off, an alarm is being generated for the actuator/controller.

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

Air Slide Table Series MXQ

Maximum allowable moment: Mmax (Nm) Table 4 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) Model 10 20 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

l+ T 2 Position Double Solenoid ^AITIITNTM n s l / . l . t h \ i k ' 1 i '11 "JITT|T|.,tT7TfIt-1Vr1 u' "-11h1'\lr dITl\Ih Ll.1'rl+ 'fl 2 Position 2 Position Single Solenoid Double Solenoid 2 Position Single Solenoid orrn-nm^ ^lTriinT.^ dllJ*#lr.F @ll'+*l=\l-o MlTF'lfilir @ t / , t . , , 1 . \ 1 d -TITl !

Multistage Ejector (N)ZL Series

Suction cover 1 9 PVF Sound absorbing material B ZL112-SP01 Front cover Without valve 2 10 PVF Sound absorbing material A (set no. for 9, 10 &11) End cover 3 11 PE Suction filter Body When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on pages 5 & 6. 4 Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent

3 Position Cylinder Series RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

FQ1

HEPO II element Absolute filtration accuracy: 2 to 13m US FDA compatible Nonwoven fabric element with high filtration accuracy of more than 99% removal and without fiber outflow and release of chemical components Material: PP (EJ102S ... x 0) PP depth element Nominal filtration accuracy: 1 to 75m Material: PP EJ202S ... x 11 (L125) EJ302S ... x 11 (L250) EJ402S ... x 11 (L500) Set the

Digital Pressure Switch

No.PS-OMU0009-D PRODUCT NAME Digital Pressure Switch MODEL / Series / Product Number ZSE20C(F) ISE20C(H) Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 16 Installation 16 Piping 19 Wiring 21 Outline of Settings [Measurement mode] 24 Pressure Setting 25 3 Step Setting Mode 26 Simple

Multistage Ejector

(page 16) 10 Vacuum port adapter assembly ZL112A-AD2-A Vacuum pressure sensor: Vacuum port adapter Pressure gauge assembly ZL112A-PG-A Vacuum pressure sensor: Vacuum pressure gauge : Units for pressure 1 = kPa, 2 = inHgpsi2 11 O-ring ZL112A-OR1-A 5 pcs.

Digital Pressure Switch

No.PS-OMU0003-D PRODUCT NAME Digital Pressure Switch MODEL / Series / Product Number ZSE20A(F) ISE20A Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 15 Installation 15 Piping 17 Wiring 19 Outline of Settings [Measurement mode] 22 Pressure Setting 23 3 Step Setting Mode 24 Simple

Digital Pressure Switch

No.PS-OMU0006-D PRODUCT NAME Digital Pressure Switch MODEL / Series / Product Number ZSE20B(F) ISE20B Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 15 Installation 15 Piping 17 Wiring 20 Outline of Settings [Measurement mode] 23 Pressure Setting 24 3 Step Setting Mode 25 Simple

Digital Pressure Switch

No.PS-OMS0007-H PRODUCT NAME Digital Pressure Switch MODEL / Series / Product Number ZSE20(F) ISE20 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 14 Installation 14 Piping 16 Wiring 18 Outline of Settings [Measurement mode] 20 Pressure Setting 21 3 Step Setting Mode 22 Simple

Vacuum Ejector Body Ported Type/Box Type (Built-in Silencer)

ZH-OM00401 Contents Safety Instructions 2 How to Order 4 Operating Environment 6 Mounting 6 Piping 9 Air Supply 10 Model Selection 11 Ejector Characteristics 11 When Operating the Ejector 12 Identification 12 Construction 13 Specifications 13 Exhaust Characteristics / Flow Rate Characteristics (Representative Value) 14 Circuit Examples 16 Maintenance 18 Trouble shooting (Vacuum Adsorption