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14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

C[dm3/(sbar)] 6.4 8.7 9.2 6.4 8.7 9.2 6.2 8.1 10 6.6 8.9 11 Port size Rc 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 Note) Weight (kg) A/B EA/EB Pilot port size SA C[dm3/(sbar)] 6.3 8.2 9.6 6.3 8.2 9.6 5.8 7.5 9.5 5.5 6.7 9.4 b 0.16 0.28 0.14 0.16 0.28 0.14 0.23 0.27 0.18 0.24 0.25 0.15 b 0.13 0.13 0.17 0.13 0.13 0.17 0.15 0.11 0.14 0.15 0.14 0.14 Cv 1.4 2.1 2.2 1.4 2.1 2.2 1.4 2.0 2.4

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

500 0 5 10 0 5 10 Number of needle rotations Number of needle rotations 703 ASD-FG Series Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 !

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2 : : : 1, 2 3 1 2 3 4 -3No.EX-OMN0037CN-A / 1 1.5 *3) *3) 1 1 () -4No.EX-OMN0037CN-A () () () () -5No.EX-OMN0037CN-A / , () * UL UL1310 Class2 0V -6No.EX-OMN0037CN-A * IP67 / *() ,, SI SI SI * IP67 M12M8 -7No.EX-OMN0037CN-A CE , * 20-23 PLC PLC * -8No.EX-OMN0037CN-A SI 1 SI 32 10 SI SI ON/OFF PNP NPN

to 1000 L/mim 20 to 2000 L/mim Instantaneous flow 5 to 525 L/mim 10 to 1050 L/mim 20 to 2100 L/mim Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes Rated pressure range 0 to

B is applied to approx 180cm3-capacity actuator. Note 4) Standard lever is not attached. Note 5) It is to be used together with A or B when tending to overshoot by the use of A or B. It is mounted to the body as a replacement of the standard compensation spring. Note 6) With terminal box, Non-explosion proof. Select 1 for the construction.

6.15 The Schmitt Trigger .6-10 6.16 The Hour Meter .6-11 7.

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 4095 5.25 21 4095 10.5 5.25 21 3868 5 20 3901 10 5 20 2048 3 12 2048 5.25 2.625 10.5 228 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 3901 -48No.EX-OMQ0015CN (2) & 2 : 010 V,05 V,020 mA : 15 V,420 mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 2047 5.25 21 2047

IODD file 1 D-MP025A/B/C SMC-D-MP025-ymmdd-IODD1.1 2 D-MP050A/B/C SMC-D-MP050-ymmdd-IODD1.1 3 D-MP100A/B/C SMC-D-MP100-ymmdd-IODD1.1 4 D-MP200A/B/C SMC-D-MP200-ymmdd-IODD1.1 : "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

Connection thread NPT 10 Effective area Note 2) (mm2) Note 1) M Weight (g) A D L (inch) D Applicable tubing 19.3 7.4 4 22.3 KQGH03-32 10-32UNF 18 5/32 10 19.9 10 5.6 12 24 KQGH03-N01S NPT1/8 M A L 21.1 12 4 24.1 KQGH07-32 10-32UNF H 13 20.2 18.8 12 1/4 24.3 12 KQGH07-N01S NPT1/8 10.4 Connection thread 20 18 25.8 KQGH07-N02S NPT1/4 26.4 18 30.5 14 KQGH09-N01S NPT1/8 (In case of R) 22.7 20.9

No.VG300-OMH0002-B 3 Port Solenoid Valve PRODUCT NAME VG342 Series MODEL/ Series Contents Safety Instructions -2,3 Precautions on Design -4,5 Selection -4,5 Mounting -5 Piping -5,6 Wiring -6 Lubrication -6 Air Supply -6 Operating Environment -7 Maintenance -7 Specific Product Precautions -8, 9 Trouble shooting -10 Remedy -11 -1VG300-OMH0002-B Safety Instructions These safety instructions

LQ 0.6 VND1 LVN 1 (A) 2 (B) 1 (A) 2 (B) 0.5 Pilot pressure (MPa) TI/ TIL 0.4 12 (P1) 10 (P2) PA 0.3 A 2 3 4 5 6 7 0.2 PAX VND 1 (A) 2 (B) 1 (A) 2 (B) 0.1 PB 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 0 1 0.1 Operating pressure (MPa) 17-4-39 4 Series VND Port size 6A, 8A, 10A (Valve open) Pilot port Indicator (Option) (Back side P2) Main port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

1/4, 3/8 1/2 3/8, 1/2 3/4 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AME150 AME250 AME350 AME150SAME, #1 AME350SAME, #3 AME250SAME, #2 4.6-25 Super Mist Separator Series AME Dimensions: AME450 to AME850 HAl AT IDl AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H AMl B C D E F G I 221

Scale indication range Connection thread size M5 0~8 1/8 0~10 1/4 0~10 3/8 0~10 Connection Chamfer dimensionD(Recommended value) thread size 1/2 0~10 M5 5.15.4 The scale indication range is also printed on the product. 10-32UNF 5.05.3 (5) Tubing outside diameter (O.D.) of (6)-2 For R, NPT, G thread Tightening method Scale indication range When installing the connection thread, tighten it

10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -() JIS B 8433-1993: 2) : : : 1 2 3 1 2 3 4 -2No.PS-OMH0002CN-D / / / / 1 1.5 3) 3) 1 1 () -3No.PS-OMH0002CN-D () () () () -4No.PS-OMH0002CN-D () * (ISE70 ) SUS630SUS430SUS304 (ISE75(H)) ON/OFF (ISE70 ) (10 10 ) UL1310 UL1585 UL -5No.PS-OMH0002CN-D * (50 N ) , ,ISE70 40 NmISE75(H)80

Center of gravity Y Y Z X Flange mounting surface Z X Center of gravity X Y Z 2.4 0.0 42.6 11 4. Product Specifications * For detailed specifications not included in this document, please refer to our website (www.smcworld.com) or operation manual. 4-1.