SMC Corporation of America
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min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Fluid: Air Initial setting

Compact front plate and guide body Made to Order Refer to p.5.4-1 for Made to Order specifications of series MGC. 3.20-1 Compact Guide Cylinder Series MGC 20, 25, 32, 40, 50 How to Order MGC B S C73 32 100 L R Guide cylinder (Compact style) Number of auto switches Bearing M L Slide bearing Ball bushing bearing Auto switch 2 1 n S n Without auto switch (Built-in magnet) *Refer to following

Particles of 0.3m or larger are 3.5 particles/l or less Since it is possible to release exhaust air from pneumatic equipment directly into a clean room, piping to exhaust ducts is unnecessary.

min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Fluid: Air Initial setting

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com P = 46 VT Applicable cable O.D. 6 to 12 VP VG n: Stations L Dimension VP Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 10 489 474 9 443 428 8 397 382 7 351 336 6 305 290 5 259 244 4 213 198 3 167 152 2 121 106 L L1 L2 S070 With mounting adaptor:

To find the total stroke time (t), follow arrow (1) from your stroke length (L) to the solid line representing the load ratio (d%) for the application then up to the total stroke time (t). To find the ending cylinder speed (u), follow arrow (2) from your stroke length (L) to the dotted line representing the load ratio (d%) then down to the ending cylinder speed (u).

: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHAqueous

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHAqueous

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water

U Min. bending radius of lead wire 10 Auto switch K M L B + Stroke A + Stroke E J S Note) This drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8. S and U dimensions for connector type auto switches (D-A7C, D-A80C, and D-J79C) are 7mm greater.

Operating direction: Right Operating direction: Left a b c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

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Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW 40, 50, 63, 80, 100, 125, 160 3.5MPa How to Order Bore size 40 50 63 80 100 125 160 40mm 50mm 63mm 80mm 100mm 125mm 160mm Aluminum tube Steel tube Tube material Aluminum alloy Steel tube Nil F Without auto switch Nil Auto switch type CHAW 40 100 L L With Auto Switch Select applicable auto switch models from

L (Example) A93L 5m. Z (Example) F9NWZ Note) Solid state switches marked "" are produced upon receipt of order. Note) For cylinders with auto switches, the switches (already attached to mounting brackets) are packed together with the cylinder for shipment, but are not mounted on the cylinder.