ZU Model Nozzle diameter (mm) Maximum suction flow rate (/min(ANR)) Max. vacuum pressure Air consumption (/min(ANR)) Weight (g) Type Model (kPa) High vacuum type Large flow type ZU05S 0.5 7 6.5 85 9.5 ZU07S 0.7 12 7.0 85 19.0 ZU05L 0.5 12 6.5 48 9.5 ZU07L 0.7 21 7.0 48 19.0 Supply pressure: 0.45 MPa Construction Dimensions ZU05S/ZU05L 59 EXH Diffuser Body 12.8 VAC SUP ZU07S/ZU07L 66 One-touch
Application Dimensions (lncfies) Splined Shaft Fitting Assembly (long) (c) 21 0050-31 Connecting feedback shaft to main spindle of actuator. (also used for P610) Splined Shaft Fitting Assembly (short) (P) P30501 0-20 Connecting feedback shaft fo main spindle of actuator.
Application Dimensions (lncfies) Splined Shaft Fitting Assembly (long) (c) 21 0050-31 Connecting feedback shaft to main spindle of actuator. (also used for P610) Splined Shaft Fitting Assembly (short) (P) P30501 0-20 Connecting feedback shaft fo main spindle of actuator.
N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 For LVM14R 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 For LVM16R N.O. N.C. 3 2 1 25.5 (16) N.O.
. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51 o.43 0.35 o.31 o.27 MGaL 0.73 o.58 o.48 o.71 0.64 2 0 . .
(mm) B N2504-N002 U4 33.9 (1.8) . 2 5 ( 1 1 1 ) 2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87
o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78
e.ilicalion F' Ior lhe aPPlcable ves as well Nole 5) The bui[-in slen@rlyped@s nor sat sly Lhe Mulli-Connector kil with 1.5m cable Muiti"connector kil t{th 3.0m cable Serlal kil wilhoul Sl unil (51 Input block (Fill out for ly'O unit only) ASnbriaae 8 niloul 31 slale mode 2 isolated cfiTnon As-lntedaae 4 rv4out 31 slave mode 2 isolated common 31 slave mode I iso ated comrnon As.lnlerhce 4in/21
32 Stork turbine 32 Turbin oil 32 General R turbine oil 32 Fucoal turbine 32 PTFE NBR Approx. 40 ml PA3000 automatically operated type 100 million cycles 50 million cycles LVH Approx. 100 ml PA5000 automatically operated type 50 million cycles 50 million cycles Approx. 22 ml PA3000 air operated type 50 million cycles LVD Approx. 90 ml PA5000 air operated type 50 million cycles Approx. 21
E 21 S LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.
E 21 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.
SN E 21 LQ1 Nut type fittings without a nut (including insert bushings) in one place Fitting type Union elbow T E Union tee Class Applicable tubing size Reducing Reducing Class Applicable tubing size (inch) No. 3 No. 3 Applicable tubing size (mm) 1 A 10 x 8 3/8" x 1/4" SMC SMC SMC 3 2 3 B 8 x 6 1/4" x 5/32" 3 3 4 A 6 x 4 1/2" x 3/8" P Panel mount union U 4 1 4 B 12 x 10 3/8" x 1/4" Union
A Applicable absorber B SR Dimensions RBC08C RBC10C RBC14C RBC20C RBC27C RJ08U 6.5 6.8 6 RJ10U 9 8.7 7.5 X RJ14U 12.5 12 10 16 18 20 RJ2015U 21 25 25 RJ2725U H B T 2 x D MM L Part no.
The auto switch could activate unintentionally if a shield plate is not used. 20Data Table (1) L d Bore size (mm) MXU6 MXU10 MXU16 21 5 25 5 35 10 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 8-30-1.
4 #0 Component Parts Description Material Note No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 21 22 Description Material Note No. 23 24 25 26 27 29 Cylinder tube Head cover Cushion boss Piston yoke Piston End cover Wear ring Head plate Cushion needle Stopper Belt separator Guide roller Parallel pin Belt clamp Bearing Spacer Spring pin Seal magnet Aluminum alloy Aluminum alloy Polyacetal Aluminum alloy
C2SiH8 Nitric Oxide Perfluoro-butadiene NO C4F6 Phosphorous Pentafluoride Octafluorocyclopentene PF5 C5F8 Phosphine Halocarbon 12B2 PH3 CBr2F2 Sulfur Tetrafluoride Trimethylsilane SF4 (CH3)3SiH Sulfur Hexafluoride Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21
If the wrench is applied on any other part, air leakage or other damage may occur. 862 Clean Regulator SRH Series Brackets For SRH3000 For SRH4000 Model B21-1-T1 1350112-T1 ARJ Material Rolled sheet steel (Electroless nickel plated) AR425 to 935 30 ARX 36 61 51 AMR 31 37 8.5 ARM Dimensions 10 ARP 21 20 28 6.5 8 IR-A 13.5 30 50 28 41 2.3 1.6 IR IRV VEX SRH SRH SRP SRF ITV IC ITVH ITVX PVQ
Green Gray Tan Symbol B R G BU W Y YR N S PU BR GD GR T S S S S S S S S S S = Standard, all other length color combinations are available by special order Tube Sizes 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 21
Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 Dimensions Model through D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric size Inch size TMH-23J TMH-04J TMH-01J TMH-03J TMH-05 1/8J 1/32J 3/16 6 1/4 8 5/16 10 3/8 12 1/2 8.4 9.3 11.7 11.6 13.1 13.5 15.5 18.8 18.2 21.2 22 3.3 4.5 4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J
(mm) Mounting screw P L1 H2 D W1 L2 H1 W2 W3 Model (Nominal x Length) 6 4 TM-04 TM-06 TM-08 TM-10 TM-12 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 2.2 2.8 2.8 3.2 3.2 2 x 6 4.5 91.5 9.5 5.5 77.5 6 12.5 7.5 77.5 6 15 9 93 6.5 2.6 x 8 2.6 x 8 3 x 8 3 x 8 12 10 8 16.3 8.8 14.3 7.5 12 9.8 How to Use Caution 1.