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Insufficient bolt tightening After stopping air and re-tighten the bolts. 32 No.VQC1000V-OMM0002-B S Revision history Safety Instructions Specific Product Precautions Valve construction Manifold Options 2020.7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

H: Contents are added [September 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2021 SMC Corporation All Rights Reserved No.EX-OMB0014-H

[July 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008-2022 SMC Corporation All Rights Reserved No.D-S-OMJ0004-G

Revision history A: Tube connection type added Precautions change B: Fixed failure countermeasures 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Description Maintenance/Service Work Description Date IDU Series 13-1 Service Record 131 Revision BSep.2022 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2022 SMC Corporation All Rights

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 12 No. 100-OMV0001 S Revision history 1st Printing :WQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

. -29No.D-S-OMU0002-A Dimensions Teach pad Indicator light Mounting thread D-MPA M8-4 pin connector D-MPB M12-4pin connector D-MPC (mm) B Model A Detectable range D-MP025 40.5 25 D-MP050 64.9 50 D-MP100 114.9 100 D-MP200 214.7 200 -30No.D-S-OMU0002-A Revision history A: Contents revised in several places [June 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

[January 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2022 SMC Corporation All Rights Reserved No.EX-OMW0006-D

Replace the whole product when replacement is necessary. 5 - Revision history Revised AFebruary 2011 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved 6 -

temperature becomes lower than this temperature. 10.3 Power Supply Cable Table 10-2 Power Supply Cable Description Specifications Connector Rating Voltage: 250V Rating Current: 10A Cable Rating Voltage: 300V AWG14 Do not use the included power supply cable for any purposes other than connection to this product. 10-2 HEC002-A/HEC006-A Revision Rev.1.7Mar.2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 7 VN-OMA013-D S Revision history B Renewal oo C Safety Instructions Po D Renewal RP 1st printing :oo 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice

URL http://www.smcworld.com 4-14-1 Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Tel: 03-5207-8271 Fax: 03-5298-5361 2021 SMC Corporation All Rights Reserved 15 -

B Note addition of metrology 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Incorrect description corrected on page 12, outside diameter dimension drawing layout changed on page 13. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

. -10- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -11-

Name Material Remark 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Handle POM 4 Needle POM 5 End cover Brass Electroless nickel plating 6 Spring Steel wire 7 U-seal HNBR 8 O-ring NBR 9 Needle O-ring NBR 10 Y seal NBR 11 Seal for fitting NBR 12 Cassette 16 Seal NBR For G thread only. 11 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

[January 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2021 SMC Corporation All Rights Reserved No.EX-OMO0007-E

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 13 VFR5000OMA0001B S Revision history A Renewal MZ B Safety Instructions PQ 1st printing: AZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

NBR 1 JIS B 2401, P3 O ring NBR 2 IL211 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 290311#1 Valve BRASS 1 JIS B 2401, P21 O ring NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Note5) The following combinations are available: A+G or B+G F Note6) "J" has a terminal box, but it is non-explosion-proof specifications. 30 12.Attached Drawing D 31 32 33 34 35 36 37 Revision history Revision D 10/ 7/2020 Revision E 25/12/2020 Revision F 25/ 4/2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com