HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 N S NBR Silicon rubber 13 13 ZM 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 50 50 20 or large are manufactured upon receipt

Drain Separator for Vacuum Series AMJ

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil Rc J ZY 03 3/8 Flow: Right Left F G R 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

ACG

ACG20 to 40 AF + ARG + [S] + AL (7) Pressure switch S AF + [S] + ARG ACG20B to 40B ACG20C to 40C AF + AFM + [S] + ARG ACG20 to 40 AF + ARG + AL + [V] Residual pressure relief 3 port valve AW + AL + [V] ACG20A to 40A Port size AF + ARG + [V] V ACG20B to 40B Body size Port size ACG20C to 40C AF + AFM + ARG + [V] Symbol 20 30 40 AW + AFM + [V] ACG20D to 40D 01 02 03 04 1/8 Note 6) When more

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option]

(Up to 22 solenoids possible) Specified layout Note 2) (Up to 21 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable connector (20 pins) PH: Flat ribbon cable connector (10 pins) Connector entry direction Note Symbol Note Symbol Stations Stations 1: Perpendicular connector 2: Lateral connector 02 02 2 stations 2 stations Double wiring Double wiring LOCK FREE FREE 08 04

PA3000/5000

Process Pump Automatically Operated Type (Internal Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N 3 5 Body only With silencer 3/8 standard 1/2 standard For AIR EXH: AN200-02 Port size Material of body wetted areas 03 04 06 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) PA5000 Diaphragm material Thread

PF2A

Rc NPT G M12 3 m lead wire with connector Without lead wire Symbol N Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Output specification Port size Applicable model Flow rate (l/min) Symbol Symbol Output specification 100 200 500 50 10 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710/750 PF2A711/721 PF2A751 67 PNP open collector 2 outputs

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc. Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.

Air Cylinder Double Acting, Single Rod JCM Series ø 20, ø 25, ø 32, ø 40

Mounting bracket Minimum order quantity Bore size [mm] Contents 20 25 32 40 Mounting nut (M5, Rc1/8, NPT1/8) 1 1 JSN-020B JSN-032B JSN-040B 1 mounting nut Rod end nut 1 NT-02 NT-03 NT-04 1 rod end nut Refer to page 10 for dimensions. 1 Can be used for M and MZ only.

Heatless Air Dryer ID Series

Indicator set Note) Adsorbent and adsorption tube filter for one air dryer (two adsorption tubes), set of O-rings How to Order ID400 ID 20 02 0 Semi-standard (option) ID200 Basic size Description Bracket Symbol Nil B Z 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage 20 30 40 60 Thread type Symbol Description 1 4 1 2 3 4 02 04

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

LVN Material Body Diaphragm Note Actuator section End plate Symbol TL/TIL Applicable tubing size PFA PPS PTFE Nil Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting

S Couplers Series KK130

/O.D. mm Symbol 01 02 03 04 N01 N02 N03 N04 Symbol 07 09 11 13 Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" Symbol 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose. Inch size 1

S Couplers KKA Series Stainless steel type

Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Availability Plug Yes No No Yes Socket Yes Yes No No Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

IR1000/2000/3000

5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic type (Knob) Air operated type Suffix 2 Set pressure range Nil For IR1000/2000 series Port size Bracket, Name plate, Mounting on the opposite side R Note 7) 0 1 2 0.005 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa Application Size Symbol IR1000 IR2000 IR3000 01 02 03 04

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH