Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: D [DIN Rail Mounting Style (for Manifold)]

Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: DN (D + N)

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H a r m f u l s u b s t a n c e s D G 3 H D G 3 H M D G 3 H V D G 5 H D G 5 H M D G 5 H V I i M E M B R A MEMBRANE A I R D R Y E R R DRYER UN I T N E A I B e f 0 r e . 0 p e r a t i n g , y 0 u s h 0 u l d f i r s t t h o r o u g h l y r e a d t h i s m a n u a l . K e e p t h i s i n s t r u c t i o n r n a n u a i .

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Made to Order

Proper Auto Switch Mounting Position/Applicable Cylinder Series: CDBG1-XC13 (mm) Auto Switch Mounting Height (mm) Lock position D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F7/F79F D-J79/F7NT D-F7W/J79W/F7BA H (Head side) R (Rod side) W (Both sides) A B Note 2) A B A B Note 2) Auto switch model D-F7V D-F7WV D-F7BAV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W Bore size 20 +0 +12 +11 +0 +11 +12 25 +0.5 +11.5

LJ1H

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

Table of Contents

V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 (mm) R A B C D E (g6) F (h9) G K L M N P Q S 90 100 241 Y Model 301 CDRB2BW15-D CDRB2BW20-D CDRB2BW30-D 5 6 8 12 14 16 34 42 50 20

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CDRB2BW10/15S D CDRB2BW20/30S D CDRB2BW40S D CRB2 A port B port CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D20!7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 (mm) R A B C D E (g6) F (h9) G K L M N P Q S 90 100 241 Y Model 301 CDRB2BW15-D CDRB2BW20-D CDRB2BW30-D 5 6 8 12 14 16 34 42 50 20

CRB2/CRBU2/CRB1

The angle is 69 when any of the following auto switches are used: D-S99(V), D-T99(V), and D-S9P(V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 R E (g6) A B C D F (h9) G K L M N

Aluminum High Vacuum Angle Valve

Symbol Nil Auto switch model r Auto switch type t Number of auto switches/Mounting position Mounting position Valve open/closed Valve open Valve closed Quantity Remarks Without auto switch (without built-in magnet) Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Without auto switch 2 pcs. 1 pc. 1 pc.

Battery-less

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

1

R C85 D-A7H/A80H D-A73C/A80C/F7 D-A7H, D-J79W D-A80H, D-F7BA D-F7, D-F79F D-J79, D-F7NT D-F7W Y + Stroke Please contact SMC for Series MGC.

CXWM/CXWL

(mm) Hs Ht Hw 23 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C Hw 23 Ht Hv D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C D-F7LF 12.5 10.5 15 15 23 12.5 10 23 15 15 22 23 23 24 30 12.5 15 12.5 15 12.5

Rotary Actuator/Vane Type

3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

CJ2

D-F7BAVL Auto switch model D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A7 D-A80 D-A79W Bore size (mm) A 2.5 3 B 2.5 3 A 1.5 2 B 1.5 2 A 3 3.5 B 3 3.5 A 3.5 4 B 3.5 4 A 0.5 1 B 0.5 1 10 16 Auto Switch Mounting Height D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-C7/C80 D-H7/H7W D-H7NF D-H7BAL Auto switch model D-F7V D-F7WV D-F7BAVL D-C73C D-C80C D-H7C D-A7 D-A80 D-A73C D-A80C

MY1

R S D WX Bottom ported (Applicable O-ring) Hole Sizes for Centralized Piping on the Bottom WX Y S d D R Model MY1C16 MY1C20 WX Y S d D R Applicable O-ring Model 30 6.5 9 4 8.4 1.1 32 8 6.5 4 8.4 1.1 C6 (Machine the mounting side to the dimensions below.) 8-11-61 59 Series MY1C Standard Type/Centralized Piping Type 25, 32, 40 Refer to page 8-11-9 regarding centralized piping port variations

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

MY1

WX S R D Bottom side (ZZ) piping (applicable O-ring) Y 2-d (Machine the mounting side to the dimensions below.)