Lightweight and Compact

Environmental friendly as refrigerant R410A Convenient functions Self diagnosis function and check display Page 70 Page 71 Timer operation function/Unit conversion function/Power failure auto-restart function/Anti-freezing operation function 41 types of alarm codes Communication function Page 71 Easy maintenance Page 69 Equipped with serial communication (RS232C/RS485) and contact I/Os (2

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

Environment

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

Pressure Control Valve AP100

AP100-02 500 Relief flow {l/min (ANR)} Dimensions 400 28 300 Panel cut dimensions 200 100 + 0 K P C U O 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 S L H 32.5 Set pressure (MPa) Note) The graph above shows the relief flow when the set pressure rises and falls from 0.1 MPa. 30 1.6 41 8.5 6.5 10 (69) 45.5 OUT IN 20 40 2 x 1/8, 1/4 40 758

AZ1000

Vespel is a registered trademark of DuPont. ) If connection size differs, flow characteristics also differ. 41 Single Stage Regulator for Ultra High Purity High flow (Tied-diaphragm) Series AZ9200 For UHP gas delivery Inlet pressure : Max. 300 psig (2.1 MPa) Flow capacity to 2000 slpm Body material: 316L SS How to Order Port Number q w e AZ92 S FV12 FV12 02 2PW Delivery pressure Bonnet option

COQ2BP

Maximum operating pressure 145 psi (10.2kgf/crnZ) Ambhtnt and fluid temperature 41 140"F (5 60"C) (M3xO.Sx16L) D-P7 BOPt Switch mounting bracket screw 2 pes. D-PS 050 (M3xO.5xI 4L) Lubrication Non-lube Support typo Standard Switch mounting nul: 1 pc. Spring washer. 2 pes. Cu8hlon Not available Rod .d thread Male lhread (Sid.) Nominal diameter: 3mrn : ~1,,;; Thread tolerance J!

NAAMS Standards Compliant

HF Handle position: Left Handle position: Right [mm] Bore size Arm opening angle HF Bore size H HA HD 50 250 61.5 40 63 250 64.5 40 15 36 30 49 45 61 60 73 75 87 90 101 105 114 120 124 50 15 41 30 55 45 68 60 81 75 94 90 107 105 117 120 124 63 5 NAAMS Standards Compliant Power Clamp Cylinder CKZ3N -X2742A -X2568 Dimensions: Clamp Arm Bore Size 50 Clamp Arm Code List Straight: Plain Bore size

Counter/Extension Cable

CV MVGQ + 0.05 0.00 0010.00 0.02 0010.03 OK CC RB J If the workpiece dimension + 0.05 0.02 the product is good. 10 is within , D-X 20Data 10-12-41

Safety Instructions

Fluoropolymer tubing, Series TL/TIL) Insert fitting Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ1 series MS Applicable fittings Note 2) Applications: Food, semiconductor, medical, automobile and machine tools fields LQ 20C 100C 200C 260C Recommended radius Refraction value 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31 0.9 0.5 0.25 0.15 55 35 0.9 0.5 0.25 0.15 75 41

09-chqb-e

Cover Tightening Torque Tightening torque(Nm) Bore size (mm) 32 40 50 63 80 100 12.5 1.2 74.5 7.4 100 10 411 41 Reassemble the cover with the above tightening torques. 203

09-chqwb-e

Cover Tightening Torque Tightening torque(Nm) Bore size (mm) 32 40 50 63 80 100 12.5 1.2 74.5 7.4 100 10 411 41 Reassemble the cover with the above tightening torques. 204

Magnet: None, Mounting: Basic, Cushion: Air Cushion, Bore Size: 2 1/2", Stroke: 41", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Basic, Cushion: Air Cushion, Bore Size: 2", Stroke: 41", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 2", Stroke: 41", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Basic, Cushion: Rubber Bumper, Bore Size: 2 1/2", Stroke: 41", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Basic, Cushion: Air Cushion, Bore Size: 2", Stroke: 41", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: None, Mounting: Basic, Cushion: Rubber Bumper, Bore Size: 2", Stroke: 41", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Basic, Cushion: Rubber Bumper, Bore Size: 2", Stroke: 41", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 41, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Support bracket

Type: Blank Plate, Type: Blanking Plate Assembly, Number of Stations: -, Port pipe connection port diameter: -, Specification: Applicable VV3Z5-40 type, VV3Z5-41 (R) type, Thread standard: -, Option: -