IDX-OM-W028

Dimentions IDU22E75E PORT SIZE AIR OUTLET PORT SIZE AIR INLET A (G) B (D) E SWITCH EVAPORATION WITH LAMP THERMOMETER VENTILATION VENTILATION DRAFT AIR OUTLET BALL VALVE (F) AUTO DRAIN C DRAIN TUBE TERMINAL LENGTH:1m) (O.D.10, BLOCK J P K L2 N1 M 13 4x POWER SUPPLY ENTRY 911)[OPPOSITON] (WIRE H measuremm Model Port size A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 123 5 279 46

JXCx-OMT0002

Memory Map . 44 8.1 Memory allocation . 44 (1) PLC input port signals (from the controller to PLC) . 44 (2) PLC output port signals (from the PLC to controller) .. 44 8.2 Signals . 44 (1) PLC input port signals (from the controller to PLC) . 44 (2) PLC output port signals (from the PLC to controller) .. 46 9.

Fieldbus system (DeviceNet compliant)

Refer to "Sensor connection" on page 46 for the connector part number and the applicable electric wire size. Fuse for replacement It is a fuse for replacement used for Input unit(EX510-DX ) and Output(EX510-DY ) unit. -56No.EX-OMI0003-H Revision history A: Correct words. B: Add the explanation of the setting method for each function. Correct words. C: Add the contents. D: Revision.

HRX-OM-R039

Frunzei, Nr.29, Sector 2 Bucharest, Romania Slovakia SMC Priemyselna Automatizacia, s.r.o. (421) 2-444 56 725 Nmestie Matina Benku, 10, 81107 Bratislava Slovenia SMC Industrijska Avtomatika d.o.o. (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje Spain SMC Espaa, S.A. (34) 945-184-100 Zuazobidea 14, 01015 Vitoria Sweden SMC Pneumatics Sweden AB (46) 8-603-12-00 Ekhagsvgen 29-31, SE-14171

XLF Series

Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.40.7 Air consumption cm3 Note 3 for 0.5MPa 19 46

High Vacuum L Type Valve

equivalent) Nut (Material: SUS304 or equivalent) (Shaft) Working principle Port 1(P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0016 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46

LEYx-OMZ0015

LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60 40 70 80 200 Work load [kg] Vertical 8 16 30 9 19 37 12 24 46

VQZ Series

.:3.5 to 7 (Reference) 0.5mm2, 2-core or 3-core, equivalent to JIS C 3306 Part no. for One-fitting for 1(P) port and Silencer for 3(R2,R), 5(R1) port. (2) Silencer for 3(R2,R), 5(R1) port Series (1) One-touch fitting for 1(P) port Silencer One-touch fitting VQZ100/1000 KQ2H06-M5 AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32for 6 VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S The

High Vacuum L Type Valve

standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 for 0.5MPa Note 3) Main pumping 46

E-MY2_E_D

. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30) 1342 6076 SWITZERLAND / (41) 52-396 3131 HUNGARY / (36) 1-371 1343 TURKEY / (90) 212 221 1512 IRELAND / (353) 1-403 9000

REGULATOR

27.5 27.5 0 28 28.5 37.5 64 37.5 65 1/43/8 M38X1.5 AR30K-B 1/8 53 85.6 30.7 29.4 29.4 3.5 28 30.4 37.5 65.9 37.5 66.9 1/43/81/2 M42X1.5 AR40K-B 1/8 70 91.7 35.8 33.8 33.8 3.5 28 34.8 42.5 71.3 42.5 71.3 3/4 M42X1.5 AR40K-06-B 1/8 75 93.2 35.8 33.8 33.8 3 28 34.8 42.5 71.3 42.5 71.3 3/41 M62X1.5 AR50K-B 1/8 90 125 43 43.3 43.3 3.2 28 44.3 42.5 80.8 42.5 80.8 1 M62X1.5 AR60K-B 1/8 95 130 46

AIR COMBINATION

35 7 14 4 41 AC30B-B 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5 48 1/43/81/2 AC40B-06-B 1/8 155.2 149.1 35.8 38.4 77.6 40 33.8 3 50 40 9 18 5 48 3/4 AC50B-B 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 3/41 AC55B-B 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 1 1 AC60B-B 1/8 196.2 234.1 46

Series MLGP

D (mm) Bore size B C Hexagon socket A 2d or more (mm) (mm) MLGPM MLGPL (mm) (mm) Head cap screw 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M61.0 32 98 34 78 22 18 M81.25 40 106 40 86 22 18 M81.25 50 130 46 110 27 22 M101.5 63 142 58 124 27 22 M101.5 Bypass port dia. 80 180 54 156 33 28 M121.75 100 210 62 188 39 33 M142.0 10 - 8) Depending on the operating condition, change the position

Solenoid Valve

No.SQ1000V-OMQ0002-B 30 No.SQ1000V-OMQ0002-B 31 No.SQ1000V-OMQ0002-B 32 No.SQ1000V-OMQ0002-B 33 No.SQ1000V-OMQ0002-B 34 No.SQ1000V-OMQ0002-B 35 No.SQ1000V-OMQ0002-B 36 No.SQ1000V-OMQ0002-B 37 No.SQ1000V-OMQ0002-B 38 No.SQ1000V-OMQ0002-B 39 No.SQ1000V-OMQ0002-B 40 No.SQ1000V-OMQ0002-B 41 No.SQ1000V-OMQ0002-B 42 No.SQ1000V-OMQ0002-B 43 No.SQ1000V-OMQ0002-B 44 No.SQ1000V-OMQ0002-B 45 No.SQ1000V-OMQ0002-B 46

Mini Rotary Actuator

Auto Switch Rotation range / Actuation / most sensitive position D-M9 auto switch D-F8 auto switch Size Rotating Operation Operation A B angle Hysteresis Hysteresis angle angle (mm) (mm) angle angle m m 90 20.5 16.5 05 46 10 20 10 180 23.2 19.2 90 22.4 18.4 1 41 10 15 10 180 25.6 21.6 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating

Electric Actuator Miniature Rod Type Miniature Slide table Type

(Stroke end etc.) 46 - No. Phenomenon Cause Countermeasure 2 Alarm for Pushing ALM 1) For the pushing operation, the Check the step data. /code: 1-096 is generated. position, target start-pushing /See 7.3 Caution (13) on p.44 position, is not set correctly. Controller version /SV1.0 or later 1. Input the reset signal.

Electric Actuator / Low profile slider type

. -46- No. Phenomenon Cause Countermeasure 1) Command invalid (unregistered) step data.

XMA/XYA Series

for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMA KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46

Title not found

x 6 1/4 B2 x 7 Thread Size 1/4 B2 x 2 31/32 1-1/16 Barb # (Size) Quantity of Barbs Part Numbering Example 45 1/4 B3 x 2 1/4 B2 x 2 1/4 B3 x 3 Also available with up to seven #1 or #2 barbs as listed in part numbers above 1/4 B3 x 4 Elbows: 1/4 NPT Male to Tube 25/32 5/8 19/32 1/2 9 16 Hex Typ. 1/2 7 8 3 4 Typ. 27/32 1/4 LB3 1/2 not shown 21/32 1/2 17 64 1 19/32 5/8 5/8 Hex 1/2 1/2 46

Compact Guide Cylinder

1.25 6.7 11 9 Rc1/8 NPT1/8 G1/8 16 16.5 41 28 92 42 106 82 98 72 50 12 140 M8 29.5 29.5 43 M10 x 1.5 22 M10 x 1.5 8.6 14 9 Rc1/4 NPT1/4 G1/4 13 19 49 35 115 52.5 133 104 122 92 Bore size [mm] WA WB X XA XB XC XL YY YL Z 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less Over 25 st 100 st or less Over 100 st 32 24 48 124 33 45 83 42 4 4.5 3 6 M8 x 1.25 16 21 40 24 48 124 34 46