Air-hydro Unit CC Series

Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz S L Small flow Large flow Control valve 0 None Flow control valve (With pressure compensation) Throttle valve Timid flow control valve (Only CCVS series) 1 Semi-standard 2 Combined valve 3 0 1 2 3 None Stop valve, Skip valve Stop valve Skip valve For the one without combined valve (0), solenoid valve

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRSH090-Al-20-l HRSH090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) (GWP1975) Refrigerant charge kg 1.32 Control method PID control Ambient temperature/humidity Note 1), 9) C/% 5 to 45/30 to 70% Circulating uid Note 2) Tap water, 15% Ethylene

VK300

VK300 Series How to Order Note) CE-compliant: For DIN terminal only [Option] Electrical entry D: DIN terminal DO: DIN terminal (Without connector) G: Grommet (Lead wire length: 300 mm) H: Grommet (Lead wire length: 600 mm) Rated voltage Valve option Rated voltage Nil V Y W E CE-compliant 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240

VK3000

Port size (P, A and B port) Rated voltage M5 01 M5 x 0.8 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 8 R1, R2: M5 Option 24 VDC 12 VDC Nil None With bracket (Not assembled) 240 VAC, 50/60 Hz For other rated voltages, please consult with SMC. F Option Part No. Description Part no.

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Hz) Class B NBR 200 VAC (50/60 Hz) FKM Stainless steel VDW 110 VAC (50/60 Hz) EPDM 220 VAC (50/60 Hz) VQ FKM 24 VDC Note) The armature assembly is a corrosion resistant construction. 12 VDC LVM 6 VDC 5 VDC VCA Nil Thread type 3 VDC Rc Please consult with SMC regarding other voltages.

VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 11 4 11 4 220 VAC 50/60 Hz 24 VDC 12 VDC 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Threadtype Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.

VEX1

VEX1 1 9 P Rated voltage (Only with solenoid) Thread type Port size 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VAC 12 VAC 240 VAC (50/60 Hz) 1 2 3 Symbol Symbol Port size Thread type Sub-plate A B 1/8 1/4 Rc G NPT NPTF Nil F N T 4 5 6 7 Base gasket VEX1 11 2 9 Other Option Body size Port size Electrical entry (Only with solenoid) Port size Body size Electrical

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz 3 Note 2) 2 1 Orifice dia.

Process Valve: 2 Port Valve For Flow Control VNB Series

110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Orifice dia.

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 1/8 (6A) Without port (For manifold) 1/4 (8A) Light/Surge voltage suppressor Nil With surge voltage suppressor None With surge voltage suppressor (Grommet type only) With light/surge voltage suppressor (DIN terminal type only) Semi-standard S Electrical entry Grommet DIN terminal Z Surge voltage suppressor

3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50 60 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN terminal.

Precision Regulator Series IR1000/2000/3000

82 Mounting hole Pressure gauge (Option) 12.5 60 2.3 48 Bracket (Option) 5.5 9.5 Panel mounting hole M5 depth 7 75 83 119 18 1 1 Max.4 IN Bleed Pressure gauge (Option) Exhaust SUP(1) OUT(2) OUT 43 Panel When mounting on a panel, refer to page 561 in Specific Product Precautions. 60 50 50 2 x Rc 1/8 Pressure gauge port 2 x Rc 1/4 Port size M6 x P0.5 15.5 82 60 9 IR3120-0 Mounting hole 48

3 Position Cylinder Series RZQ

Graph 1 Graph 2 120 60 B C 110 P1 100 50 63 63 Circuit C 90 Power valve: Precision regulator, etc. 80 40 70 Load mass (kg) Load mass (kg) or REA Regulator 60 30 50 50 REB 50 REC 40 20 A 40 40 Power valve: Regulator valve CY 30 CX 32 32 20 10 MQ B 10 RHC C 0 0 P1 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) RZQ When adjusting the air pressure in

VM

(Total Travel) 60 Toggle lever VM430-01-08 Panel mounting hole Hexagon nut thick 6, across flats 27 JIS Symbol 4-4.5 mounting hole 7 N F.O.F. 60 T.T.

58

Maximum allowable stroke when using clevis bracket 1,500 CS2 Mounting angle 45 Series 1.6 times 1,000 1,200 CS2 CS1 650 Stroke (mm) 410 CS1 500 Mounting angle 0 0 15 30 45 60 75 90 Mounting angle (DEG.)

AC Servo Motor Driver (SSCNET Type)

Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) -36- 6.6.3 Acceleration/deceleration Time Configuration < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount

OMS0020

2 Speed [mm/s] 1 0 to 400 3 Acceleration [mm/s2] 1 0 to 60 4 Deceleration [mm/s2] 1 0 to 60 1 to 20, 5 PushingSpeed [mm/s]Note2) 1 32768 to 32788 6 Thrust Setting Value Note 3) 0.1 More than 1Note 3) Step Data No. 1 7 Load Mass [g] 50 0,50,100 3 (Step Data No. 0Note6) to 1000 8 MovementMode (0:ABS, 1:REL) 1 0 , 1 9 ThresholdForceValue 0.1 0.1 to 5 10 Positioning width [m] 1 0 to Note1) 11

Vacuum Gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

ATX-OM-F003E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions HAW2/7 HAW22 to 110 2VHAW110-30 Flange (mm) Model A B C D E F G H J K L M N P Q R S T U V W Y Z ZA HAW2-04 360 190 83 35 270 35 130 203 159 159 182 209 60 60 94 4.5 10 1/2 1/2 1/2 HAW7-06 570 390 83 35 480 35 130 203 159 159 182 209 60 60 94 4.5 10 3/4 1/2 1/2 HAW22-14 948 575

Main Line Filter

Poses a risk of burns, if the equipment will be used in Certificate will be sent in 2 to 4 weeks later after the shipment of the product. high-temperature (40~60).