Slit Valve 0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
The MGC guide cylinder is ideal for material handling applications involving stopping, lifting, and pushing. It combines the functions of a conventional linear cylinder, and a non-rotation device. Features include standard air cushions, grease nipple, and switch capability. Other features include, slide or ball bushing bearings, compact design, adjustable air cushion, and lightweight guided
The MGC guide cylinder is ideal for material handling applications involving stopping, lifting, and pushing. It combines the functions of a conventional linear cylinder, and a non-rotation device. Features include standard air cushions, grease nipple, and switch capability. Other features include, slide or ball bushing bearings, compact design, adjustable air cushion, and lightweight guided
Fitting screw size: M2.60.45 P3 (D-sub9 female receptacle) Cap P2 (CH2 D-sub25 female receptacle) P1 (CH1 D-sub25 female receptacle) Power cable Serial RS-485 or RS-232C cable Ferrite core(accessory) Rear CH2 contact signal / Analog cable CH1 contact signal / Analog cable Figure 3-8 Power Cable Insertion and Communication Cable Connection Do not drop a screw or washer in the electrical unit
(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analog output of 5V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance P Peak hold mode Shows the maximum pressure reached at that moment.
Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.
ISO Standard Hydraulic Cylinder 40, 50, 63, 80, 100 CHSD Series 10 MPa CHQ How to Order CHK 100 M9BW CH D SD B 40 CHN Magnet for auto switch Number of auto switches Series type CHM Nil D Without Nil S n 2 pcs. Built-in Symbol D Nominal pressure CHS CHS 1 pc. 10 MPa "n" pcs.
Band mounting style is not available for D-A9V/M9V/M9WV and D-M9A(V)L types. D-A79W cannot be mounted on bore size 10 cylinder with air cushion. Lead wire length symbols: 0.5 m 1 m 3 m 5 m None Solid state auto switches marked with are produced upon receipt of order. D-A9/M9/M9W/A7/A80/F7/J7 auto switches are shipped together (not assembled).
Ordering Example of Cylinder Assembly Double clevis Cylinder model: CDJ2YD16-60Z-NW-M9BW-B Double knuckle joint Mounting D: Double clevis Pivot bracket N: Yes Rod end bracket W: Double knuckle joint Auto switch D-M9BW: 2 pcs.
Connector type F: D-sub connector (25 pins) P: Flat ribbon cable (26 pins) SUP/EXH block mounting position Power supply terminals LOCK FREE LOCK FREE U side (2 to 10 stations) U D B M Specifications Symbol P P12 N N12 D side (2 to 10 stations) 24 VDC, Positive common Both sides (2 to 20 stations) 12 VDC, Positive common Special specifications 24 VDC, Negative common For special specifications
(D-M9 only) Operation Environment Recommended Tool Description Model Wire stripper D-M9N-SWY * Stripper for a round cable (2.0) can be used for a 2-wire type cable. Warning (1) Never use in an atmosphere with explosive gases. Auto switches are not designed with explosion-proof construction. Never use in an atmosphere containing explosive gas since this may cause a serious explosion.
0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D
VS3115-D VS3110-G VS3110-D SCA006SCA001SCAD001SCAD001SCA006SCA001SCAD001SCAD001AC DC Solenoid capsule assembly r t AXT338-6 Spring Piano wire AC DC AZ832-16 Part No. for Mounting Bolt and Gasket y NBR AXT333-14 AXT338-15 Gasket u Resin AXT333-16 Plug for cap AC AXT333-7-11 i DC AXT333-32-8 Stopper BG-VS3010 Resin : Enter the operating voltage.
D-A9/M9/M9W/M9AL auto switches are shipped together (not assembled).
C D T Single clevis type Double clevis type Center trunnion type Nil D Without magnet (Without auto switch) Built-in magnet Bore size Cylinder Tube material With auto switch 125 mm 140 mm 160 mm 180 mm 200 mm J K Nil N R H Symbol 125 140 160 180 200 250 Without auto switch 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm Nylon tarpaulin Heat resistant tarpaulin With double-side cushion Without
+ #$ G C D T . %. .* $ %$* / % 0 1* $ %2 2 20 21* +," # $ %&"'(" )* ,# $ %&"'(" )* ++" # $ %&"'(" )* +, #$ 17-3-75 6 The VX series will be revised shortly.
Manual override Non-locking push type Locking slotted type Nil D 1068
D-M9B D-M9N, D-M9P D-A93 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905
TQ1230001-OM106-B ModelZPG16J-7A-X2 ModelZPG(B25,B30)J-7A-X2 (Suction cup formMultistage bellows type 2.5-Stage) (Suction cup formMultistage bellows type 3.5-Stage) Dimensions Model A B D E F G H ZPGB25J-7A-X2 25 26 27 10.2 32.5 48 52.5 ZPGB30J-7A-X2 30 33 32 13.8 38 54.5 59 Note1) D and (st) indicate the reference value during gripping at vacuum pressure: -85[kPa]. -18No.
TQ1230001-OM105-A ModelZPG16J-7A-X2 ModelZPG(B25,B30)J-7A-X2 (Suction cup formMultistage bellows type 2.5-Stage) (Suction cup formMultistage bellows type 3.5-Stage) Dimensions Model A B D E F G H ZPGB25J-7A-X2 25 26 27 10.2 32.5 48 52.5 ZPGB30J-7A-X2 30 33 32 13.8 38 54.5 59 Note1) D and (st) indicate the reference value during gripping at vacuum pressure: -85[kPa]. -19No.