Low Profile

(Coil temperature: 20C, at rated voltage) 3-port (SX090) : Based on dynamic performance test, JIS B 8419.

Electro-Pneumatic Proportional Valve Series VEF/VEP

Weight (kg) 0.9 Note) The non-lubricated specification is not applicable to these models. 0.9 1.0 1.4 1.4 Proportional Solenoid Specifications VEF3121 (Flow type) VEP3121 (Pressure type) Proportional solenoid recognition symbol 1 (Applicable power amplifier: VEA25 ) Applicable power amplifier VEA25 Max. current 1 A Coil resistance 13 (Ambient temperature 20C) Rated power consumption 13 W

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Note 2) The data for l/min (ANR) refers to the conditions of 20C, 1 atm. pressure and relative humidity of 65%. Note 3) Install a circuit breaker with sensitivity of 30mA.

HRX-OM-M005

E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +22C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow) Flow rate /min (ANR) 20 100 180 230 260 390 460 660 790 920 1580 1710 0.3 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm 2) Note 1) Flow rate values are measured at 0.5 MPa and 20C

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

12 10, 12 VCHC Controlled flow Free flow 230 100 260 390 460 660 790 920 1580 1710 Flow rate L/min (ANR) ASR ASQ Sonic conductance dm3/(sbar) 0.64 0.28 0.72 1.1 1.3 1.8 2.2 2.6 4.4 4.8 Flow Direction Symbols on Body Critical pressure ratio Controlled flow 0.2 0.25 0.3 0.25 0.25 Free flow 0.4 0.2 0.3 0.2 0.3 Meter-out type Meter-in type Note) Flow rate values are measured at 0.5 MPa and 20C

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values are measured at 0.5 MPa and 20C

Speed Controller: Standard Type In-line Type AS Series

0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7 250 0.94 340 1/8 90 0.7 250 0.94 340 1/4 115 2.3 810 2.3 810 1/4 130 2.3 810 2.3 810 3/8 124 0.2 4.6 1,670 4.6 1,670 1/4 221 0.35 4.6 1,670 4.6 1,670 3/8 214 4.6 1,670 4.6 1,670 1/2 205 7.9 2,840 7.9 2,840 1/4 242 11.9 4,270 11.9 4,270 3/8 233 11.9 4,270 11.9 4,270 1/2 224 Note) Flow rate values are measured at 0.5 Mpa and 20C

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values are measured at 0.5 MPa and 20C

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

Metric size 4 4 6 230 260 390 460 660 790 920 1580 1710 Flow rate (/min (ANR)) 180 Controlled flow (Free flow) Flow Direction Symbols on Body Effective area (mm2) 2.7 3.5 4 6 7 10 12 14 24 26 Meter-out type Meter-in type Note) Flow rate values are measured at 0.5 MPa and 20C.

Speed Controller with One-touch Fittings Series AS In-line Type 1

AS3001F AS2051F AS4001F AS2001F AS1001F Model Metric size 4 6 6 8 3.2, 4, 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 5/32" 3/16", 1/4" 3/16" 1/4", 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Inch size Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Air flow /min (ANR) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area (mm 2) Note) Flow rate values are measured at 0.5 MPa and 20C

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

operating pressure 5 to 60C (No freezing) 10 turns 10 turns 8 turns Ambient and fluid temperature Number of needle rotation Hexagonal lock nut With seal, Hexagonal lock nut, Nickel plated Option 181 106 64 29 10 6 3 Weight (g) 20 0.3 1700 26 920 14 460 7 230 3.5 105 1.6 Flow rate /min (ANR) Controlled flow (Free flow) Effective area (mm2) Note 1) Flow rate values are measured at 0.5 MPa and 20C

Speed Controller: Standard Type Series AS In-line Type 1

12.3 810 12.3 32, 40, 50, 63 124 AS3000-03 3/8 810 12.3 810 12.3 221 AS4000-02 1/4 1,670 25.5 1,670 25.5 40, 50, 63 80, 100 214 AS4000-03 3/8 1,670 25.5 1,670 25.5 205 AS4000-04 1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes 6 8 10 12 Flow rate l/min (ANR) Controlled 100 180 230 260 390 460 660 790 920 1580 1710 (free) flow Effective area mm 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are at a pressure of 0.5MPa, and temperature of 20C.

Switches Solid State Switch Connection and Examples

frequency 1kHz Green LED (stable detection) Red LED (unstable detection) Red LED (lights up when ON) Indicator light 10 to 55C Ambient temperature 25 to 70C Environmental resistance 45 to 85% RH Ambient humidity Power line: 240Vp, pulse width of 0.5s Noise resistance Temperature characteristics Voltage characteristics Detecting distance fluctuation Within +15/10% of detecting distance at 20C

Table of Contents

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

energy saving effect

in the users equipment: 25 kW Power supply: 200 V 60 Hz Circulating fluid flow: 125 L/min@0.5 MPa External piping: Bypass piping + Heat load 21 Conditions 20 19 25 kW load Heat load fluctuation (0 kW 25 kW) 0 kW load 0 10 20 30 40 50 Time [Minute] Applicable to an ambient temperature of 20C.

New

Subsonic flow : Flow greater than the critical pressure ratio Standard condition : Air in a temperature state of 20C, absolute pressure 0.1 MPa (= 100 kPa = 1 bar), relative humidity 65%. It is stipulated by adding the (ANR) after the unit depicting air volume.

7

Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).