SMC Corporation of America
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2 hrs. each in X, Y directions 4 hrs. in Z direction based upon JIS D 1601 Vibration resistance -XC22 Fluororubber seals 30 G 3 times each in X, Y, Z directions Impact resistance IP-67 (IEC Standard)(2) Enclosure CE1-R 5 m, 10 m, 15 m, 20 m Extension Cable (Option) Note 1) This includes the digital display error of the counter (CEU5).

VJ10-20-4A-6 2 pcs. 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

ZSE20A() ZSE20AF() ISE20A() 3 MPa,kPa,kgf/cm 2,bar,psi,InHg,mmHg MPa,kPa,kgf/cm 2, bar,psi LCD 3 (X2) 1)/ 2) 1)4 7 2)4 (1 11 7 ) ON OUT1OUT2 4 0,10,50,100,500,1000,5000 ms IP40 AC1000 V 1 50 M(DC500 V ) -550 -1060 () 3585RH() UL/CSA(E216656)CE(EMC RoHS ) 2 m 1(0 ms) 2 3MPa/kPa 490% 5 -76No.PS-OMU0002CN-D M5 01 N01 C4H C6H N7H C4L C6L N7L M5X0.8 R1/8 NPT1/8 4 mm 6 mm 1/4 inch

Displ m Displ m Block diagram spring Compd. spring Compd. m MPa MPa (A) m/N (B) m/N Force N Diaph.(C) m2 Daiph.(A) m 2 Force N -6- 3. How to order (Note 1) In the standard mounting position, the product name plate is attached to the front and the bracket is mounted to the back when viewed with the SUP side on the left and OUT side on the right. (Note 2) Accuracy: 3%F.S.

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Symbol 3 IN port 4 OUT port 6 Symbol -X04 Filtration: 10 m 4 X04 Standard product IN side OUT side Filtration: 10 m Symbol 5 -X05 Seal material: FKM Oil free: Seal Symbol -X02 Different diameters (IN side > OUT side) 2 X05 Standard product IN side applicable tubing O.D. (Metric size): 8 to 12 OUT side applicable tubing O.D.

Positive pressure ISE1 ZSE1 Vacuum Wiring specifications Piping specifications Grommet type (Lead wire: 0.6 m) 00 Nil For mounting on ZM ejector Single mounting R 1/8 Note 2) 01 Grommet type (Lead wire: 3 m) L Single mounting NPTF 1/8 Note 2) T1 Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Note 2) Single mounting style: M5 x 0.8 (female) threaded.

Order no. 1.5 m SAC-3P-1,5-PUR/M 8FR 1669738 3 m SAC-3P-3,0-PUR/M 8FR 1669741 5 m SAC-3P-5,0-PUR/M 8FR 1669631 10 m SAC-3P-10,0-PUR/M 8FR 1694169 Solenoid valve side pin wiring diagram 1 (+, ) Energy saving IC 3 (, +) Diode 3 (, +) 1 (+, ) LED Coil There is no grounding for this product.

EK M : Kinetic energy (J) : Load weight (kg) + Weight of movable part (kg) : Piston speed (m/s) EK= 2 M 2 Allowable Kinetic Energy When Locking 40 1.19 {12.1} 32 0.67 {6.8} 25 0.42 {4.3} 20 0.26 {2.7} Bore size (mm) Piston speed (m/s) J {kgf cm} Stopping Accuracy (Not including tolerance of control system.)

(Removal procedure and ) Applicable message I/O message size Input: Max. 8 byte, Output: Max. 8 byte (Changeable by switch settings) 1 2 Baud rate 125 kbps 250 kbps 500 kbps 500 m or less Thick cable 250 m or less 100 m or less Max. length of Network 3 4 Thin cable 100 m or less 156 m or less 78 m or less 39 m or less Total extended cable length Note: Max. extended cable length is 6 m. 11

NPN open collector 1 output, Lead wire with connector (Length 2 m) PNP open collector 1 output , Lead wire with connector (Length 2 m) NPN open collector 2 outputs, Lead wire with connector (Length 2 m) PNP open collector 2 outputs, Lead wire with connector (Length 2 m) Digital pressure switch specifications ZSE30A-01-N-ML ZSE30A-01-P-ML ZSE30A-01-A-ML ZSE30A-01-B-ML 1 to 3 are assembled

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

m for each cylinder Order no.: CP95-AL (2) length in meters 6-13-19

m for each cylinder Order no.: CP95-AL (2) length in meters 6-13-19

1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 Type Symbol Nozzle part no.

accuracy (Accessory) m 5 5 5 5 5 5 CH1 : Rc1 (Symbol FG1,Symbol NNPT1) Circulating fluid outlet, Circulating fluid return port CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2) Tank drain port CH1 : Rc3/4 (Symbol FG3/4,Symbol NNPT3/4 CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2 CH1 : Stainless steel, Copper (Brazing filler metal for the heat exchanger) 10, Bronze 10,Fluoropolymer,PP,PBT,POM,PU,PC,PVC

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRL-A-20 (Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1

2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2

-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRS400-A-46(Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1