CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Low Profile Air Gripper Series MHF2

MHK 4 x M3 x 0.5 thread depth 4 4 x M2.5 x 0.45 thread depth 3 (Attachment mounting thread) Auto Switch Mounting Groove Dimensions 26 MHS (Mounting thread) MHC M2.5 x 0.45 4 MHT 1.3 12 26 MHY 15 4 Accessory option: Hexagon socket head screw (special screws) MHW 3 2 x 2H9 +0.025 0 depth 2 3 -X 7 7 MRHQ 11 11 Groove for auto switch mounting (Mounting thread) 2 x M3 x 0.5 thread depth 4 MA D11

E-P HYREG ® Series VY1 1

10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis

AZ1000

10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

JXCx-OMT0005CN

/Set 2 121 Get/Set 4 1 122 Get/Set 4 2 123 Get/Set 4 124 Get/Set 1 IO *1 Polled I/O IO Output Input 0 4 byte 4 byte 1 10 byte 2 20 byte 3 12 byte 4 byte 4 10 byte 5 20 byte 6 20 byte 4 byte 7 10 byte 8 20 byte 9 36 byte 4 byte 10 10 byte 11 20 byte 125 Get/Set 2 JOG *1 IO 20 - 3IO IO Number Type Name 100 Input 101 Input 102 Input 14 110 Output 111 Output 112 Output 12 113

Fieldbus system Analog unit

Decimal number number 1 to 5 V 4 to 20 mA number number 0 to 10 V 0 to 5 V 0 to 20 mA 0FFF 4095 5.25 21 0FFF 4095 10.5 5.25 21 0F1C 3868 5 20 0F3D 3901 10 5 20 0800 2048 3 12 0800 2048 5.25 2.625 10.5 00E4 228 1 4 0 0 0 0 0 0 0 0.75 3 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD value LSB Byte1 Byte2 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB

Programless controller (with stroke study) Step motor (servo 24 VDC)

Safety Instructions. 4 2.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

model S D-Y7W(V) D-Y59 D-Y69 D-Y7P(V) 1 Red light at ON Greeen light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 13 4 4 10 2 2 7 2 2 5 2 2 4 12-10-24

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

model S D-Y7W(V) D-Y59 D-Y69 D-Y7P(V) 1 Red light at ON Greeen light at ON MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 13 4 4 10 2 2 7 2 2 5 2 2 4 12-10-24

MGG

4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

4-14-40.

Digital Flow Switches Series PF2A

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" O.D. 5/32" 5/32" 1/4" 5/16" Meter-out type Meter-in type Inch size 5/16" 3/8" 3/16"

Lubrication Equipment

(Turn proof structure at pressurized state) 1.17-2 AL1000 to 6000 Standard Specifications AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 Model 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 M5 X 0.8 Port Size Air 1.5MPa 1.0MPa Fluid Proof pressure Max. operating pressure 1/4: 30 3/8: 40 1/2: 50 130 1/4: 30 3/8: 40 50 Min.operating flow (l/min (ANR))(1) 50 190 220 4 15 130 130 130 7 25

MHZ2/MHZJ2

When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1

Pressure Gauge Guide

This will cause a malfunction. 8 1 R , 4 1 R G 1 4 The dimensions in ( ): Connecting thread R X2: Stud parts nickle plated 8 1 R PPA 8 1 R , 4 1 R AL 8 1 R , 4 1 R X3: Wetted parts stainless steel MPa 8 1 R 8 1 R , 4 1 R 8 1 R , 4 1 R X4: Oil-free (Wetted parts degreasing) 8 1 R 8 1 R , 4 1 R How to Order G 43 01 Option Connection thread size Symbol Specifications Nil X2 X3 Stud parts nickel

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

/C6 (6) C6 (6)/N7 (1/4") C8 (8)/N7 (1/4") Screw-in (Rc, NPT, G) 01 (Rc1/8)/N1 (NPT1/8)/F1 (G1/8) 02 (Rc1/4)/N2 (NPT1/4)/F2 (G1/4) Piping entry direction Straight, Rear Main materials of parts in contact with fluid PPS, PBT, FKM, Stainless steel 304, Brass (Electroless nickel plating), Si, Au, GE4F Piping*15 Body One-touch fitting Straight: 40 g Rear: 55 g Straight: 48 g Rear: 63 g Screw-in

IDX-OM-W022

3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of auto drain strainer . 4 2 4 2 4 Replacement of bowl assembly . 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 Table of Contents 1 Air Dryer Table of Contents Chapter 6