High Vacuum Angle Valve Note 2) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL Quantity Without auto switch 2 pcs. 1 pc. 1 pc.
Lead wire length Nil 6 10 15 20 25 30 0.3 m (Standard) 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Vacuum Pump System/Recommended Model (The models below will have faster delivery.) Combination Supply valve (Pilot valve) N.C. (VJ114) N.C. (VJ114) N.O.
Station 26 2~20 B 20 2~16 H 10 2~8 24VDC 12V 12 VDC * Mixed Porting Available by Special Order SUP/EXH B L O C K A S S E M B LY M O U N T I N G P O S I T I O N S U U Side 2 ~ 10 Stations D D Side 2 ~ 10 Stations B Both Sides 2 ~ 20 Stations *M Special Specifications (by Special Order) C O N N E C T O R M O U N T I N G P O S I T I O N U U Side D D Side V A LV E S TAT I O N S (BLANKING PLATE
L1 L2 M H E A 11.5 LQ1L1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 18 18.5 10 1/8" 11.5 LQ1L4C-M LQ1L4B-M LQ1L4A-M LQ1L3D-M LQ1L3C-M LQ1L3B-M LQ1L3A-M LQ1L2F-M LQ1L2E-M LQ1L2D-M LQ1L2C-M LQ1L2B-M LQ1L2A-M 1/8" 16.5 27 20.5 14 15 14.5 1/4" 1/4" 23 20 35 17 26.5 20 3/8" 3/8" 28 21 24 45 33 25 1/2" LQ1L4D-M LQ1L5D-M LQ1L5C-M
D B M 2 to 16 stations M Mixed FU1 Fuji Electric Co., Ltd.
M9B 2-wire 12 V Water resistant (2-color indication) MRHQ F9BA Lead wire length symbols: 0.5 m Nil (Example) M9B 3 m L (Example) M9BL 5 m Z (Example) M9BZ Auto switches marked with a symbol are produced upon receipt of order.
Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.
L1 L2 H M E A 11.5 LQ1L1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 18 15 1/8" 10 11.5 LQ1L4C-M LQ1L4B-M LQ1L4A-M LQ1L3D-M LQ1L3C-M LQ1L3B-M LQ1L3A-M LQ1L2F-M LQ1L2E-M LQ1L2D-M LQ1L2C-M LQ1L2B-M LQ1L2A-M 1/8" 16.5 27 20.5 14 15 14.5 1/4" 1/4" 23 20 35 17 26.5 20 3/8" 3/8" 28 21 24 45 33 25 1/2" LQ1L4D-M LQ1L5D-M LQ1L5C-M
D: Max. diameter Note 2) ( ): Valves for soft nylon. 8 4.2 M H Different Diameter Tee: KQ2T (1) (2) Applicable tubing O.D.
2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.
L1 [mm] 300 X Me 200 m 100 0 Work load m [kg] 0 1 2 3 4 5 600 Horizontal/Bottom 500 L2 400 L2 [mm] 300 Y Me m 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 L3 [mm] m 300 L3 Z 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 L4 400 L4 [mm] 300 X Me 200 m 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 m L5 [mm] 300 Wall L5 Y 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 400 L6 [mm
of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main
M If using the JXCm1m-BC, please use the latest version of the JXC-BCW (parameter writing tool). M There are currently 3 versions available: version 1 products (V1.m or S1.m), version 2 products (V2.m or S2.m), and version 3 products (V3.m or S3.m).
Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver !
VQ7 2 position single EVS 0.47 4/2 5/3 Page 3-3-16 Non-locking push type VFN (A/B EA/EB) L plug connector (M) (Standard) 2 position double With surge voltage suppressor (G)(L) (M)(D) With light/ surge voltage suppressor (L)(M) (D)(F) 100 VAC 50/60 Hz VZ5000 200 VAC 50/60 Hz 24 VDC 2.4 4/2 5/3 M plug connector (M) (Option) Page 3-3-53 24 VAC 50/60 Hz Locking B type (Slotted) (A/B
(Max. 20 stations) Rated voltage Clean series 5 24 VDC Series Actuation type A/B port size 3 10-SY3000 5 10-SY5000 1 2 position single 2 2 position double One-touch fitting (Metric size) One-touch fitting (Inch size) 3 3 position closed center Symbol Port size Applicable series C4 C6 M C4 C6 C8 M Symbol Port size Applicable series N3 N7 M N3 N7 N9 M 4 3 position exhaust center 5/32" One-touch
F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg
Note 2) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL Quantity Without auto switch 2 pcs. 1 pc. 1 pc.
M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M
(Initial value) Base mounted Solenoid specifications Grommet(G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Electrical entry JIS Symbol G, H, L, M, W D Internal pilot Rated coil voltage V DC AC50/60Hz 24, 12, 6, 5, 3 24, 12 10-SYJ51 M 2 4 10-SYJ52 M 2 4 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation (A) 2 (A) 2 Standard 0.35