IDX-OM-W034

3/h) (273 m 3/h) (384 m 3/h) (510 m 3/h) Air FlowRate (ANR)(Note 1) 120SCFM 173SCFM 258SCFM 353SCFM At Expected Outlet Press.Dew Point of 45 oF (7.2 oC) (205 m 3/h) (294 m 3/h) (438 m 3/h) (600 m 3/h) 130SCFM 181SCFM 297SCFM 406SCFM At Expected Outlet Press.Dew Point of 50 oF (10 oC) (221 m 3/h) (308 m 3/h) (504 m 3/h) (690 m 3/h) Operating Pressure 100psig (0.7MPa) Condition Rated Inlet

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

, NPT, G) Width across flats KA J DL DL RF MO DL MM HR E D E HN Air-hydro CA2H Air-hydro CA2WH Auto switch Made to order Precautions H1 AL Width across flats B1 Width across flats of hexagon hole WB 2-cushion valve A N F K N B C M H S + Stroke ZZ + Stroke With rod boot e 9 l f h + l ZZ + l + Stroke (mm) HN Stroke range Bore size (mm) B C (MAX) P A AL B1 D DL E F G H H1 HR J K KA M MM MO N

Digital Flow Switch (Integrated display type)

min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1.0 2.0 5.0 Flow L/min L/min L/min L/min L/min Setting/display flow range 0 to 9 L Accumulated Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 Pressure

Digital Flow Switch (Integrated display type)

L/min Instantaneous Setting/display flow range 1 2 125 to 3025 L/min 250 to 6050 L/min 550 to 12050 L/min flow Min. setting/display unit 5 L/min 10 L/min Flow Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 Pressure Rated pressure range 0.1 to 1.5 MPa Proof pressure 2.25 MPa NPN open collector

F/ISE

3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

indicator Flange side Flange side t Auto switch type r Temperature specifications XLA Symbol Auto switch Without auto switch (without built-in magnet) Remarks Temperature range 5 to 60C 5 to 150C Symbol Nil M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto

MHF2

Hmm 0.7MPa 0.3MPa 0.3MPa 60 0.7MPa 60 0.4MPa 0.4MPa 40 40 20 20 100 80 60 40 20 0 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 3 Series MHF2 Confirmation of external force on fingers: Series MHF2 Step 3 L L Mr Mp Fv My L L: Distance to the point at which the load is applied (mm) Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My(

Fieldbus system IO-Link Master Unit

ON/OFF the L+ power supply.

JXCx-OMU0004

(P.50 40 No.JXC-OMU0004-A 8.2 () OUT0 to OUT3 M 8.3 10. (P.50) (1) M 41 No.JXC-OMU0004-A 2 * M (3) () M () ON M 42 No.JXC-OMU0004-A 8.4 1 1 1 1 1 1 1 10.

MHF2

Note) F9NWV F9NW 3-wire (NPN) Diagnostic indication (2-color display) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire Lead wire length symbols: 0.5 mNil 3 m L 5 m Z (Example) M9N (Example) M9NL (Example) F9NWZ Note) Be careful for the differential of 2-color display type.

MHF2

Note) F9NWV F9NW 3-wire (NPN) Diagnostic indication (2-color display) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire Lead wire length symbols: 0.5 mNil 3 m L 5 m Z (Example) M9N (Example) M9NL (Example) F9NWZ Note) Be careful for the differential of 2-color display type.

End Lock Cylinder Series CBG1

+ l 179 (188) + l 207 (216) + l 40 164 192 159 (168) 187 (196) Z + Stroke 210 + l 242 + l 205 (217) + l 237 (249) + l 50 190 222 185 (197) 217 (229) ZZ + Stroke 215 + l 252 + l 210 (222) + l 247 (259) + l 63 195 232 190 (202) 227 (239) 245 + l 303.5 + l 239 (253) + l 297.5 (311.5) + l 80 236 294.5 230 (244) 288.5 (302.5) 253 + l 329.5 + l 247 (261) + l 323.5 (337.5) + l 100 244 320.5 238

CEx-OMP0016

s) : Impact speed (during locking or knocking of stopper) Va (m/s) : Average speed L (m) : Distance from C.G. of load M (Nm) : Maximum moment E (J) : Kinetic energy of load g (m/s) : Gravity acceleration (9.8m/s2) Load (N) W1 Moment (N.m) M1=F1x L1 F1 L1 V=1.4xVa M2=F2x L2 F2 We=1.4xVaxWx10 L2 W2 M3=F3x L3 M= WexL =5xVaxWxL 3 F3 L3

CE

Lead Wire Length Lead wire length designation (example) D-A73 L Lead wire length Nil L Z NNote) 0.5m 3m 5m None Note) Applies only to D C type connector switches.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Rear flange surface M Right flange surface Flange side r Temperature specifications/Heater t Auto switch type Symbol Temperature Heater Nil 5 to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93

3

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min

MXF

12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V Relay, PLC 2-wire 24 V Grommet F9NWV F9NW 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PWV F9PW 3-wire (PNP) 2-wire F9BWV F9BW 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

0.01

Clean Air Filter SFD Series RoHS Hollow Fiber Element HAA HAW Nominal filtration rating: 0.01 m (filtration efficiency 99.99%) AT IDF IDU Initial pressure drop: 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure: 1.0 MPa (at 20C) IDF FS IDFA IDFB SFD100 SFD200 SFD101/102 Made to Order Up to 100 L/min(ANR) Up to 500 L/min(ANR) Up to 100 L/min(ANR) IDH ID IDG IDK

C76

Nil (Example) C73C 5 m Z (Example) C73CZ 3 m L (Example) C73CL None N (Example) C73CN C76 C85 Solid state switches marked with are manufactured upon receipt of order.