Electrostatic Sensor Monitor . -6No.SFOD-OMO0004-B Model Indication and How to Order Options/Part number Description Part number Remarks Power and output lead wire ZS-28-A Length 2 m Bracket ZS-28-B With M3x5 L (2 pcs.) Connector for sensor lead wire ZS-28-C 1 pc. Panel mount adapter ZS-27-C With M3x5 L (2 pcs.) Panel mount adapter + Front protective cover ZS-27-D With M3x5 L (2 pcs.)
And, w hen t he sensi t i vi t y i s changed t o dul l , t here i s a possi bi l i t y t hat st aggeri ng of gradual pressure occur, because t he pressure correct i on becom e l ow er. N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P9) Press Skey f or 2 seconds or m ore, t hen go t o det ai l set t i ng m ode. To "F02" by usi ng t he and keys.
min or less 12 L/min or less 22 L/min or less Power supply voltage 24 VDC 10%, Ripple(p-p) 10% or less (with power supply polarity protection) Current consumption 25 mA or less Switch output 1 output (NPN or PNP) Max. load current 10 mA Max. applied voltage 26.4 V Residual voltage 1 V or less (at 10 mA) Short circuit protection Provided Repeatability 0.005 mm or less 0.010 mm or less 0.020
Note Auto switch model Switch mounting screw M2.5 x 10 L D-E7A.80A BMY1-025 25 32 40 Switch mounting nut D-M5 D-M5W D-M5T Switch mounting screw M2.5 x 12 L BMY2-025 Switch mounting nut 1116 ML1C Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 12 for Actuator and Auto Switch Precautions.
Nil S n Bearing type Slide bearing Ball bushing bearing M L Mounting style Auto switch Basic style Front mounting flange style Nil Without auto switch (Built-in magnet) B F For the applicable auto switch model, refer to the table below.
area (mm2) 2.1 4.0 Model L B D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats
CJP Rear trunnion Integrated clevis Boss-cut basic Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion T E BZ B L F G C D U CJ2 F Low friction direction Boss-cut front flange FZ CM2 Side at pressure When pressurized on head side Boss-cut front trunnion B Side at pressure When pressurized on rod side UZ C85 CG1 L 40 150 CM2Q F Standard MB C95 CDM2Q L F 40 C73
min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area
min (ANR)) 1710 1580 920 460 390 790 100 230 26 24 14 7 6 12 1.5 3.5 Effective area (mm2) Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle
min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) ASF Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 is the same as M5.
L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.
min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500 06,
min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Fluid: Air Initial setting
Compact front plate and guide body Made to Order Refer to p.5.4-1 for Made to Order specifications of series MGC. 3.20-1 Compact Guide Cylinder Series MGC 20, 25, 32, 40, 50 How to Order MGC B S C73 32 100 L R Guide cylinder (Compact style) Number of auto switches Bearing M L Slide bearing Ball bushing bearing Auto switch 2 1 n S n Without auto switch (Built-in magnet) *Refer to following
Particles of 0.3m or larger are 3.5 particles/l or less Since it is possible to release exhaust air from pneumatic equipment directly into a clean room, piping to exhaust ducts is unnecessary.
min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Fluid: Air Initial setting
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com P = 46 VT Applicable cable O.D. 6 to 12 VP VG n: Stations L Dimension VP Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 10 489 474 9 443 428 8 397 382 7 351 336 6 305 290 5 259 244 4 213 198 3 167 152 2 121 106 L L1 L2 S070 With mounting adaptor:
To find the total stroke time (t), follow arrow (1) from your stroke length (L) to the solid line representing the load ratio (d%) for the application then up to the total stroke time (t). To find the ending cylinder speed (u), follow arrow (2) from your stroke length (L) to the dotted line representing the load ratio (d%) then down to the ending cylinder speed (u).
Refer to page 336 for the lead wire length of L and M plug connectors. Refer to page 337 for the connector assembly with cover for L and M plug connectors. Note) Enter the cable length symbols in . Please be sure to fill in the blank referring to page 340.