Speed Controller with Uni One-touch Fitting AS Series

0 e t i y u !4 !5 !2 q o !7 r !3 o r !0 w u t y !2 !3 !1 q i !4 e Meter-in type Meter-in type Component Parts: Elbow Type Component Parts: Universal Type No. Description Material Note Body A Handle Body B Needle Needle guide Seat ring No.

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Manifold Regulator Modular Type ARM2500/3000 Series

A C D E F G H B Composition of assembly Set nut (1349172) AP100 ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Inlet pressure (MPa) Set nut (131532) ARM3000 136414 75.5 8 41 40 6.5 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

Compact manifold regulator ARM5 Series

ITV End Block IC O-ring ARM5 E L A ITVH ITVX End block Air supply specification Air supply speicification Symbol 1 2 PVQ Centralized supply Manifold mounting Individual supply VY1 Mounting Symbol A B 1 Applicable for the end block on the right side only.

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Flow Direction Symbols on Body How to Order Meter-out type Meter-in type Indication symbol 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Symbol Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Description Material Note ASF Body A PBT q Handle PBT w Body B Stainless steel 303 e Needle Stainless steel 303 r Needle guide Stainless steel 303 t Seat ring Stainless steel 303 y Lock nut Stainless steel 303 u U seal HNBR i Cassette POM, Stainless steel o Seal NBR !0 O-ring NBR !1 O-ring NBR !2 O-ring NBR !3 O-ring NBR !4 Gasket M5 type only NBR/stainless steel 304 !

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

2 e !1 No. q w e r t y u i o !0 !1 !2 Material Note Description Body A Handle Body B Needle Needle guide Lock nut Panel nut U seal Spacer Cassette Packing O-ring PBT PBT Brass Brass Brass Brass Brass HNBR PBT POM, Stainless steel NBR NBR Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Note) !

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

(Mounting thread) Note) If the fitting attached to the port interferes with the auto switch, please use the extension fitting assembly supplied with the air gripper. 4 x AA thread depth AB (Mounting thread) Prepared hole diameter AC through (Mounting hole) Note) AD depth AE AF depth AG S H When open AS When closed AR When closed AT M T D P B R N G Q F E C A 2 x AH thread depth AJ (Mounting

20

In periodical inspections, check the following items and replace the parts if necessary. a) Scratches, gouges, abrasion, corrosion b) Air leakage c) Twisting, crushing and turning of connected tubes d) Hardening, deterioration and softening of connected tubes e) Loosening of nozzles 2.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Symbol 0 P Side 1 E Side Side Bottom (1) Side Other A, B Side Base specifications 9 2 1 Individual exhaust Common exhaust Note 1) Size of A, B port bottom ported: 3/8, 1/2 Option Stations 02 2 stations 10 10 stations How to Assemble Manifold To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note Platinum silver Platinum silver Black Black q Description Sub-plate Body Aluminum die-casted Stainless steel w e Mounting bolt and gasket are not attached. : Thread type Spool/Sleeve Adapter plate Thread Type r Resin t Resin End plate Nil Standard Rc y Resin Piston NPT N Option T NPTF G F Replacement Parts Description Material Part no. No.

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

In-line Air Filter

Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.

Vacuum Saving Valve

Construction Vacuum generator side Vacuum generator side u w r t No.0.8 e y For the direction of the product, refer to 4 of back page 3. Pad side q u Description Component Parts Material Surface treatment No.