5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure center (A) 4 (B) 2 5 (EA) 3 (EB) 1

25

VDC or less Connected to 0 V Voltage range: 5 VDC or less Current consumption: 5 mA or less Discharge stop signal Voltage range: 19 VDC to power supply voltage Voltage range: 19 VDC to power supply voltage Current consumption: 5 mA or less Input signal Maintenance detection signal Current consumption: 5 mA or less Current consumption: 5 mA or less IZH Max. load current: 100 mA Residual voltage

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

LEC-OM038xx

Setting of controller (LEC) .18 5. External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6. CN4: Power supply connector .23 6.1 Power supply connector.23 1 - 6.2 Power line.23 6. 3 Wiring of the shutdown circuit.24 Shutdown circuit Example.26 7 CN3: Bus conecter.27 8.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer

Large Size Vacuum Module: Series ZR

m AEP HEP How to order When requiring a vacuum switch with a lead wire of 5 m, indicate the part numbers of the vacuum unit switch without a lead wire connector and the 5 m lead wire connector separately.

IR1000/2000/3000

AL 14-5-21

E-P HYREG ® Series VY1 1

VY1B0-5 VY120-5 1 V V V 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 V V V 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 2 2 2 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to page 17-6-3 for Safety Instructions and 17-5-59 to 17-5-61 for High Purity Chemical Valve Precautions.

IDX-OM-W010

150 5 180 5 200 5 250 5 260 5 350 10 Drain Connection Rc3/8 Rc1/2 Rc3/4 Rc1 Drain Connection 10mm Coating Color Panel: Urbanwhite 1 Base: Urbangray 2 Weight kg 16 17 18 22 23 27 28 46 Applicable Compressor(Standard) kW 0.75 1.5 2.2 3.7 5.5 7.5 11 15 Note1: The data for m3/min (ANR) is referring to the conditions of 20C, 1atm. pressure & relative humidity of 65%.

IDX-OM-W029

IDX-OM-W029 5 5 5-1 3 ON OFF () 3 2 R T 5-2 600mm 1 5-2 5-2 10% 5-2 () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W029 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W029 5 5-2 (IDU55E,IDU75E) 1-1 5-1 OFF IDU22E,55E,75E OFF IDU55E IDU75E () ON IDU55E,75E OFF ON IDU Series 5-2 5 3 IDX-OM-W029 6 6 6-1 IDU22E IDU37E IDU55E IDU75E 3/min (ANR)( 1)

IDX-OM-W035

3 ON OFF 3 2 R T () 5-2 600mm 1 5-2 5-2 10% 5-2 () 60cm 1 10% 3 IDFB Series 5-1 5-1 IDX-OM-W035 5 () 60cm 1 2 INOUT IN OUT IDFB Series 5-1 5-2 IDX-OM-W035 5 5-2 (IDFB55E,75E) (IDFB55E, 75E) 1-2 5-1 OFF OFF () ON OFF () ON IDFB Series 5-2(IDFB55E,75E) 5-3 IDX-OM-W035 6 6 6-1 IDFB22E-11 IDFB22E-23 IDFB37E-23 IDFB55E-46 IDFB75E-46 107SCFM 161SCFM 226SCFM 300SCFM

High Purity Chemical Valve

Orifice dia. 4 8 12 20 Symbol 2 3 4 5 Body class 2 3 4 5 Valve type Tubing size 0 1 2 N.C.

Digital Gap Checker

L 1 ISA-5-1 73.0 2 ISA-5-2 135.5 3 ISA-5-3 173.0 4 ISA-5-4 210.5 5 ISA-5-5 248.0 6 ISA-5-6 285.5 1.25 8 4.5 7.5 5.5 35 35 With 3 tapping screws (3 x 8) Bracket for centralized lead wire ISA-20 Lead wire with connector ZS-31-B ZS-31-C Straight 5 m Right angle 5 m Centralized lead wire ISA-19-m Stations Part no. 2 ISA-19-2 3 ISA-19-3 4 ISA-19-4 5 ISA-19-5 6 ISA-19-6 15 3-Color Display

Floating Joint

JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 3 4.5 5 6 8.5 10 16 21 17 20 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5

Slider Type/Ball Bushing Bearing

1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

5 !6 !7 !8 !

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

BORE SIZE A B C D 0.31 0.11 0.11 5-40UNC JM-005 6 (1/4) 0.44 0.50 0.16 1/4-28UNF JM-025 6 (1/4) 0.31 0.36 0.11 6-40UNF JM-006 10 (3/8) JM-03 10 (3/8) 0.50 0.58 0.19 5/16-24UNF 0.38 0.43 0.13 10-32UNF JM-02 16 (5/8) 0.56 0.65 0.23 3/8-24UNF JM-04 16 (5/8) FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE N301