VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 M1 Q L1 L2 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 8 18 41 55.4 23.8 31.6 56.9 24.3

High Vacuum Slit Valve

When the shaft moves up and down, axial seal between a body 21 and outside is realized by O-rings and and a bellows .

VQ7-6/7-8

B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA A B L1 L2 L2 L1 B A PA A B B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5 121 PA 14 PB 12 5 1 R 3 65 54 4-1/8 P 39 (Pilot pressure EXH port) 21

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

AC Servo Motor Driver (MECHATROLINK-III type)

No.1 No.2 No.3 Setting the Station Address Station Address S1 S2 No.1 03H 0 3 04H 0 4 No. 2 05H 0 5 No. 3 21 - 4. Parameter setting (Driver side) The setting is a necessary parameter. Please optionally set it. Please refer to "LECYU manual" for a detailed parameter.

OMS0020

Position 1 AREA B Position 2 21 (2) Step Data Save Command "EU" Details Use after executing Step Data setting comand "EE".

OMR0031

External Connections . 20 4.1 CN1: Power supply connector . 20 4.2 CN2: Motor connector . 20 4.3 CN3: Serial I/O connector . 20 4.4 CN4: Counter connector (option) . 21 4.5 CN5: Parallel I/O connector . 21 5. CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6.

OMR0032

External Connections . 20 4.1 CN1: Power supply connector . 20 4.2 CN2: Motor connector . 20 4.3 CN3: Serial I/O connector . 20 4.4 CN4: Counter connector (option) . 21 4.5 CN5: Parallel I/O connector . 21 5. CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6.

Digital pressure switch for energy-saving control ejector

ZQ-OM01501 Contents Safety Instructions 2 How to order 9 Summary of Product parts 10 Definition and terminology 11 Electrical Connection 14 Wiring 14 Internal circuit and wiring example 15 Easy Setting 16 Measurement mode 16 Function Setting 19 Function selection mode 19 Default setting 19 F0 Unit selection function 21 F1 OUT1 22 F2 OUT2 24 F3 Response time 26 F4 Auto-preset 27 F6 Fine adjustment

ZQ-OM01601

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

Activated Carbon Filter

P A B C D E G J M N Q R S T U V AMK20 1/81/4 40 133.9 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 AMK30 1/43/8 53 167 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 AMK40 1/43/81/2 70 212.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 semi-standard bowl Semi-standard specifications Model Metal bowl No.

High-precision Digital Pressure Switch ( compatible)

No.PS-OMY0007-A PRODUCT NAME High-precision Digital Pressure Switch ( compatible) MODEL / Series / Product Number ISE79S-#-L2 Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 10 Definition and terminology 12 Mounting and Installation 15 Installation 15 Piping 16 Wiring 18 Outline of Settings [Measurement mode] 21 Pressure Setting 21 3 Step

PSxx-OMF0005CN

0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR *Z2 (psi) SL E4 (MPa) PR G4 (MPa) PL *P4 (MPapsi) * *Z4 (psi) * *1psi *21

3/5 Port Solenoid Valve

(VV3K3-21): Body ported (A port top ported) 10 VK300-OMH0002-C VK300/3000 Series Specific Product Precautions 4 Be sure to read this before handling the products.

EX500-GPR1A.eng

EX9-PE1 21.2 59.8 43.2 80.3 22.2 21 26.7 PWR PWR L dimensions The mounting and removing methods of each SI unit are as shown below.

Air Preparation Equipment

Specifications 5 Model 7 Note2) FGGLD Note 1) FGGLC Note 1) FGGLB Note 1) FGGSD Note 1) FGGSC Note 1) FGGSB Note 1) Number of elements 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 28 65 x L250 Stainless steel 304 Stainless steel 304 28 65 x L250 7 Note2) 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 65 x L500 65 x L750 65 x L1000 65 x L500 65 x L750 65 x L1000 Element size Cover Case O-ring

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

Modular Type Regulator Series AR

28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21