XLDV Series

gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46

XMD/XYD Series

1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46

K35-OMW0030

/ Output Signal transition PWR DC24V 24 V (Power supply) 0 V E-STOP ON (Emergency stop) OFF JOG+ ON (JOG operation move to OFF extended end direction) JOGON (JOG operation move to OFF retracted end direction) CAL ON (Manual mode) OFF 20mA Sig-in (+/-) (Analog input signal) 4mA 0mA 20mA Extended end direction Pos-out (Analog output signal) Retracted end direction 4mA 0mA (A) (B) (C) (D) 46

CEx-OMG0106

Blinking UP DOWN LEFT RIGHT Blinking -1.0 +1.0 Setting Point Tolerance Blinking 46 During initial setup, predictive control is executing. Hence, it is suggested to set the maximum retries to 5 or above. After setting of maximum retries. Press WRITE to switch to the next input condition.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

After assembly is completed, perform an operation test and check that there is no air leakage. 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 Direction of the shaft(key) 39 Fig. (19) Direction of assembly of the shaft 46 - Troubleshooting Refere nce Problem Possible cause Solution page 16 Supply pressure isnt applied correctly.

Compact Rotary Actuator

Most sensitive position Auto switch operating range Lm Fig.13 Table 10 Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75 3 180 18 31 22 35 63 12 360 25 52.5 29 56.5 90 18.5 27 22.5 31 15 69 3 180 22.5 39.5 26.5 43.5 52 9 360 30.5 64.5 34.5 68.5 90 36 48.5 40 52.5 20 56 4 180 42 67.5 46

Low-Speed Rotary Actuator

range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.11 Table 9 Reed auto switch Solid state auto switch Size Rotation A B Operation angle A B Operation Hysteresis Hysteresis angle m angle m angle 10 90 15 21.5 63 12 19 25.5 75 3 180 18 31 22 35 15 90 18.5 27 52 9 22.5 31 69 3 180 22.5 39.5 26.5 43.5 20 90 36 48.5 41 9 40 52.5 56 4 180 42 67.5 46

MRQB-OM0002

4 (NPN) 5V,12V F79F IC 3 (NPN ) 5V A76H IC 200V A72 A72H 100V A73 A73H 100V A80 A80H IC 2 24V 12V A80C IC PLC A73C (2 ) A79W 0.5m () A73C 3m L () A73CL 5m Z () A73CZ N () A73CN 6-2. ,56mm ,0.5[Nm] BQ-2 1 6.1 24 6-3. 6.2 6.3 D-A7A8 D-F779 D-F779W 32 12 8 [mm] 40 11 6 7 32 [mm] 40 2 1 1 32 8.5(9) 9 9 A [mm] 40 11(11.5) 11.5 11.5 D-A7A8 D-F77979W 32 55 28 [deg] 40 46

DOC1023125

Timing chart Positioning operation (Double solenoid mode) 46 - Positioning operation by closed center mode Procedure (Closed center mode) 1.Specify and command operation using the operation data by turning IN0 and IN1 inputs ON/OFF. Load the specified operation data.

LEF-OM002xx

/See 2.1 Specification P .9 to 1 1 for LEFS / See 2.2 Specification P .12, 13 for LEFB 4) The pushing operation is performed Review the content of the step data. at the Positioning operation position 46 - No. Phenomenon Cause Countermeasure 5) The cable is not connected Confirm that the cable is connected correctly. /See 4.

LEH_C

/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General

JXCx-OMT0005CN

INP ON *1 * INP ON () INP ON *1 44 - 11.2 ID ID 132 ID () IO IO * [64 ] * [] S S * (+) (+) *1 + mm (-) (-) *1 mm *1 (mm/s) *1 mm/s 2 *1 INP mm mm 0mm 100mm M (0mm) *1 M (100mm) (+) (-) *1 45 - 13 1+(++ 2(+) SW SW 12 SW 1 2 (-) (+) WAREA ON mm W 1W 2 WAREA ON W 1 W 1 *W 1W 2 PARA W 1=W 2=0 WAREA OFF (-) (+) W 2 W 2 * * 1 1 * 11 11 * 12 12 * *1 46

JXCx-OMU0026

Connector specifications . 42 (1) Motor drive power connector : M PWR . 42 (2) Control power supply connector: CI . 42 6.2 Wiring . 43 (1) Wiring of the power supply connector. 43 (2) Wiring of the stop switch . 43 (3) Wiring of the lock release . 44 6.3 Wiring of shutdown circuit . 45 (1) Stop (Stop switch) . 45 (2) Stop (Stop relay contact) . 45 (3) Motor power shutdown (relay contact) . 46

JXCx-OMT0001CN

EtherNet/IP . 43 8. . 44 8.1 . 44 (1) PLC (PLC) . 44 (2) PLC (PLC ) . 44 8.2 . 44 (1) PLC . 44 (2) PLC . 46 9. . 48 9.1 . 48 9.2 . 49 9.3 . 51 9.4 . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 10. . 56 10.1 . 56 -2No.JXC-OMT0001CN-C 10.2 . 57 10.3 . 60 10.4 . 64 10.5 . 67 10.6 . 71 10.7 PLC . 73 10.8 . 73 11. . 74 11.1 . 74 11.2

Step Motor Driver （ Pulse input type ）

Forward direction Forward direction Backward Backward direction direction PP+,NP+,PP+,NP+,(CW) (CW) (CCW) (CCW) Setting vlue of Option set 1 5 0 4 3 7 2 6 1 Initial value at the time of factory shipment 46 - [About the photo coupler ON/OFF in the LECPA pulse input circuit during differential input connection] Photo coupler: ON Command pulse signa Inside of the driver High Positioning unit

LEC-OM038xx

ID Rx1B Rx1A Rx19 Rx18 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 12 1 1 0 0 46 - 12. 4 Gateway unit control flag The flag to control the gateway communication status.

IDX-OM-W094

3/h(ANR) 1.00 0.89 0.80 256 m 3/h(ANR) 7.2 GWP (GWP) GWP Regulation (EU) No 517/2014 Regulation EU No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 2,088 2,090 R410A 1 IDFA60/70/80/90 Series 7-2 IDX-OM-W094 7.3 Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFA60 R1 307 745 605 161 405 681 94 71 46

SMC Wireless System EtherNet/IP ® compatible

Features 10 SMC Wireless System Outline 11 Outline 11 System configuration 12 Base 13 Remote 14 Definition and terminology 15 Assembly 17 Mounting and Installation 20 Installation 20 Model Indication and How to Order 23 Summary of Product Parts 24 Connector (Base only) 25 LED Display 26 LED indication of base 26 LED indication of remote 28 Setting and Adjustment 29 Setting 30 Dimensions 46

SI unit for CC-Link

least significant bit). (3) Fuse disconnection details The power supply fuse disconnection for the SI unit solenoid valves can be monitored by the link special register of the master station. 0: Normal 1: Fuse disconnected Buffer area of master station Example: QJ61BT11N b15 b14 b13 b12 b3 b2 b1 b0 (688H)SW0088 16 15 14 13 4 3 2 1 (689H)SW0089 32 31 30 29 20 19 18 17 (68AH)SW008A 48 47 46

Fieldbus Device Handheld Terminal

(page 42 to 46)) 5. Select the setting value with the , , and buttons and press button. 6. Press the button to complete the setting. To copy the set value to channels of the same type in the unit, press the button. 7. Press the button. Copy is completed, and the screen returns to the channel parameter selection screen. -41No.EX-OML0011-C No.