VZA2000

5 Port Air Operated Valve Series VZA2000 Specifications Fluid Air VZA2121, 2141 0.1 to 1.0 Operating pressure range (MPa) 2 3 4 2 3 4 VZA2 21, 2 41 0 to 1.0 Pilot pressure range (MPa) 0.1 to 1.0 Impact/Vibration resistance (m/s2) Note) 150/50 Operating pressure Pilot pressure Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of

XLAQ/XLDQ

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 469 b XLAQ Series Specifications XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 Model Flange (valve) size 16 25 40 50 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (

In-line Air Filter

0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 20 40 60 80 100 0 0 0 0 50 100 150

ZP3

fitting 133 Variations Compact Type ZP3 Series ZP3 Model Selection Compact Flat Type Bellows Type Flat Type with Groove Bellows Type with Ribs Vacuum inlet direction Flat type Flat type with groove Bellows type Bellows type with ribs Vacuum inlet direction Single unit p. 137 p. 143 p. 149 p. 155 VAC VAC ZP3-T p. 137 p. 143 p. 149 p. 155 With adapter Vertical VAC VAC ZP3-T VAC p. 138 p. 144 p. 150

AFF

Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150

AME

Accessory (Option) Applicable model Bracket assembly With cap bolt and spring washer AME150 AME250 AME350 AME450 AME550 AME650 AME850 BM51 BM52 BM53 BM54 BM55 BM56 BM57 AME 250 03 R B HA Option specifications AT R IN-OUT reversal direction Body size Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 ID Nil Bracket B Nil AMG Port

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

flow: Rated flow of each model Accessory (Option) AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 Applicable model Bracket assembly With cap bolt and spring washer BM51 BM52 BM53 BM54 BM55 BM56 BM57 Removed rate of water (%) = Removed water (Water droplet) (g) How to Order x 100 Inflowed water (Water droplet) (g) Various equipment for drain discharge AMG 250 03 J B Option Body size HA 150

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

Air Tank Series AT 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 45 95 150 170 250 350 450 770 960 Surface: Munsell N-5.5, Inner surface: Non coated Safety valve (1 pc.) R 1/2 R 3/4 R 11/4 R 2 R 1 Accessory (2) Rc 1/2 Valve for drainage (1 pc.) Pressure gauge (1 pc.)

Made to Order Specifications:

Drain Series AFF Size Series AM, AMD, AMH Size 150 Series AFF Size Series AM, AMD, AMG, AMH Size Port size A B Connection A B 239 252 258 284 290 2B 80 1/4 , 3/8 1/8 , 1/4 , 3/8 450 550 650 850 256 260 300 300 349 380 496.5 11B 22B 37B 75B 240 3/4B, FF , 10K 1B, FF , 10K 1 B, FF , 10K 2B, FF , 10K 80 250 4B 1/2 1 2 3/8 , 1/2 3/4 1/2 , 3/4 1 3/4 , 1 1 , 1 1 , 2 80 8B 350 80 305 312 339 80

High Power Cylinder:

Cushion adjustment (Relief adjustment) man-hours are the same as the adjustment (cushion needle adjustment) for general purpose cylinders. 350 High power cylinder 300 General purpose cylinder (SMC Series CG1) Buffer capacity [kgf cm] Quality of cushioning (RHCF40-500, Load weight 5kg, Supply pressure 0.5MPa, Horizontal operation) 250 500 3000mm/s 1000mm/s 2000mm/s 200 500mm/s 400 150 Deflection

RB/RBL/RBQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Ambient temperature range (C) 10 to 80 (No freezing) Extended 1.96 1.96 4.22 4.22 6.86 6.86 8.34 8.83 Spring force (N) Retracted 3.83 4.22 6.18 6.86 15.30 15.98 20.50 20.01 Basic type 15 15 23 23 65 65 150 350 With cap Weight (g) 16 16 25 25 70 70 165

Free Mount Cylinder

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manufacturable stroke range Model Standard strokes CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 60 to 100 10, 20, 30, 40, 50 CX 80 to 150 10, 20, 30, 40, 50, 75 110 to 150 D10, 20, 30, 40, 50, 75, 100 110 to 200 Strokes beyond the standard stroke range are available

Guide Table Series MGF ø40, ø63, ø100 1

m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70 kg, eccentric distance is 60 mm, and the maximum speed is 150

CNG

, 200 201 to 350 301 to 400 301 to 450 301 to 800 D-C7/C8 D-B5/B6 D-H7 D-G5NTL 1500 10 mm 15 mm 25, 50, 75, 100, 125, 150, 200, 250, 300 D-B59W 15 mm 20 mm Note 1) Intermediate strokes other than the above are produced upon receipt of order.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Weight reduced by 53% at the maximum Overall length (Z + Stroke) Overall Length (Z) Weight (mm) (kg) Series MY3A MY3B MY1B Series MY3A MY3B MY1B 63 63 40 40 25 25 16 16 320 8.26 240 2.95 150 0.99 110 0.34 356 8.99 276 3.08 178 1.09 122 0.35 460 14.5 340 4.41 220 1.57 160 0.73 At a 100 mm stroke Series Variations Positioning cushion mechanism The uniquely designed piston shape enables reduction

08-mbq-e

.: GR-L-005 (5 g), GR-L-010 (10 g), GR-L-150 (150 g) 30

Piping: Bottom Direction, Body Color: Dark Blue, Piping Type: Rc, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: Copper Extension Nozzle 150mm Length, VMG1-06-150-150, Nozzle Cover: -, Flow Rate Adjustment: -