CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Power Clamp Cylinder

) 63 How to Order Right type CKZ63 42 3681N R 47 37 54 78 Arm position/Mounting hole A A 20 Arm position Mounting hole Symbol Center type D1 6 6 6 8 8 8 D2 9 9 9 10.2 10.2 10.2 D3 14 14 14 17.5 17.5 17.5 L 6 6 6 8 8 8 Left type A B C D E F Center Right Left Center Right Left 2 x D1H7 through (9) 300.2 2 x D2 through 300.02 1050.1 144 65 280.1 150.2 22 L D3 Sectional view A-A (1:1) 80 How

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

150 to 1000 150 to 700 150 to 700 10 8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21 19.5 19.5 15.5 55.5 49.5 45.5 40 7 6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25

100

G1/8, NPT1/8 (Recommended tightening torque: 3 to 5 Nm) 3(E) With vacuum pressure detection port Refer to the vacuum port figure above for the branch specification.

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

RQ

50 6.6 OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod end nut and accessories.

MLGC

8 !

EXxx-OMS0026CN

1214 mm PCA-1578081 7/8 1214 mm (7) PCA-1558810 7/8 2 m PCA-1558823 7/8 6 m PCA-1558836 7/8 2 m PCA-1558849 7/8 6 m PCA-1564927 M12 B code2 mSPEEDCON PCA-1564930 M12 B code6 mSPEEDCON PCA-1564943 M12 B code2 mSPEEDCON PCA-1564969 M12 B code6 mSPEEDCON TM (8)EtherNet/IP PCA-1446566 M12 D code5 mSPEEDCON EX9-AC010EN-PSRJ M12 D code-RJ451 m EX9-AC020EN-PSRJ M12 D code-RJ452 m EX9-AC030EN-PSRJ

EXxx-OMU0020CN

8 1Module 8 5.1.2.4.

SFOD-OMT0005CN

8-15 2 1() 2 0 0-7 3 3 0 0 4 0 0 0 9 *code 15.2 (P.63) 8-15 4 *1 20(P.83) -36- (3) Offset (Word) 0 1 / 2 / 3 4 () 5 () 6 7 8 9 10 11 12 1 13 14 2 15 16 17 (4) Word0 Word Bit 0 IN0 IN05 (2 )No. )No.3 1 IN1 IN5 IN4 IN3 IN2 IN1 IN0 2 IN2 OFF OFF OFF OFF ON ON 0 3 IN3 (DRIVE ON) No. 4 IN4 5 IN5 6 OFF 7 OFF -37- Word Bit HOLD ON HOLD OFF DRIVE SETUP ON DRIVE or SETUP ON

EXxx-OMQ0016

compatible PCA-1557756 M12 (4 pin), Plug, for AWG22 to AWG18, SPEEDCON compatible (8)Power supply cable PCA-1558810 Cable with 7/8 inch connector, Socket, Straight 2 m PCA-1558823 Cable with 7/8 inch connector, Socket, Straight 6 m PCA-1558836 Cable with 7/8 inch connector, Socket, Right angle 2 m PCA-1558849 Cable with 7/8 inch connector, Socket, Right angle 6 m PCA-1564927 Cable with M12

Fieldbus system (PROFIBUS DP compliant)

No.4 No.5 No.6 Output point COM A COM B COM C COM D OFF OFF OFF 64 16 16 16 16 OFF OFF ON 0 OFF ON OFF 16 8 8 OFF ON ON 24 8 8 8 ON OFF OFF 32 8 8 8 8 ON OFF ON 48 16 16 16 ON ON OFF Reserve ON ON ON : It cannot be set to 0 simultaneously for input and output point. -23No.EX-OMI0032-G 3.

CE

0oi@3 @8 !

ASR

Note 2) Not used for 6 and 8.

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Serial Network

8 inputs are inaccessible to the user.

ISO Interface

Operating Note 3) 2-position 8-6:5, 8-8:6, 8-10:5 8-6:20, 8-8:15, 8-10:10 frequency cycle/sec. 3-position 8-6:3, 8-8:3, 8-10:2 8-6:10, 8-8:10, 8-10:20 Lubrication Not Required Manual override Non-locking push type Protection structure Dust Proof Coil rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 24VDC Allowable voltage range % -15~ +10% of rated voltage Coil insulation Class B or equivalent

Series PF2W Digital Flow Switch For Water

Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

ASR

Note 2) Not used for 6 and 8.