modular-press-e Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.
Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.
Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.
Basic Axial foot Front flange Rear flange U T D Front trunnion Rear trunnion Clevis B L F G Mounting brackets are included, not mounted.
Function number Function name Default setting Page F 0 (Unit) Unit selection [ PA] kPa Page 49 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 50 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot:
Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.
Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through
CHSD40-PS CHSD50-PS CHSD63-PS CHSD80-PS CHSD100-PS Seal kit consists of items @1 to @5 and @9, and can be ordered by using the seal kit number for each bore size. 335 CHSD Series Dimensions Basic: CHSDB Z + Stroke PJ + Stroke Y GB GA J MM 2 x RcP V V D E MA K F G NA Cushion valve M B C A SS NB Air release S + Stroke H ZZ + Stroke Stroke range Bore size (mm) MM A B MA V C D PJ F G NB SS GA
With manually operated handle Proximity switch T TURCK P P&F W None * Switch cassette viewed from the front.
B F MM NA GC GA C A M12 x 1.0 M10 x 1.0 NN M5 x 0.8 M4 x 0.7 NDh8 Z S 12-0.027 10-0.022 4 5 122 121 66 65 0 0 10112122Axial foot style (L) / CJ2WL, CJ2WL GA GC Piping port 4-M5 x 0.8 MM NN GC NN F GA F MM Cover surface D D LY LB LH X A Y Y X LX A NA NA LZ H S + Stroke H + Stroke Z + 2 x Stroke 2-LC Mounting hole (mm) 16 10 15 15 5 4 8 8 11 11 28 28 23 21.5 5.5 5.5 2.3 2.3 GA LC Bore size
F = mg Mass m Movement I: Inertial moment Refer to page 100. Static torque calculation Tf = F x L (Nm) Load . g = 9.8m/s2 F: Pressing force (N) : Angular acceleration Load .
M1 = F x L Port side A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REAH10 REAH10 REAH10 Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL 0.08 0.03 Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 0.5 1.5 2.5 0 0.5 1.5 0 0.5 1.0 1.5 0 1.0 2.0 Moment (Nm) 1.0 Moment (Nm) Moment (Nm) REAH15, 20,
Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA
PNP Analogue 4 to 20mA E and F: Provided for the isolated type only.
Function number Function name Default setting Page F 0 (Unit) Units selection [ PA] kPa Page 47 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 48 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF F 2 (oUt2) (Not available) [. -] Page 50 F 6 ( FSt) Display value compensation [ 0.0] Compensated value
Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size
Type Applicable model HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products HEC002-A5l-F HEC006-A5l-F Aircooled Option symbol N NPT Thread N HEC NPT thread The connection parts of circulating fluid piping, facility water piping and circulating fluid drain port are NPT thread type.
Table roll deflection arrow A due to static roll moment applied at arrow F when Lr=(see table) and table is retracted. Deflection on A when the load is applied at F. Deflection on A when the load is applied at F. Deflection on A when the load is applied at F.