Fieldbus system EtherCAT compatible SI Unit

detection) Enum0800 0=Disable 1=Enable 40x8:0 Lower limit value UNSIGNED8 Number of Channels 40x8:01 40x8:02 Channel 0 Channel 1 (Analogue user setting value of lower limit) UNSIGNED16 0 to 0xF 40x9:0 Filter UNSIGNED8 Number of Channels 40x9:01 40x9:02 Channel 0 Channel 1 (Analogue average filter) 0=None 1=2 value average 2=4 value average 3=8 value average Enum080B -103No.EX-OMA1023

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

5 Port Solenoid Valve Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Serial Network

-963-7099 Fax: 02-501-2937 Chile Phone: 02-270-8600 Fax: 02-270-8601 United Kingdom Phone: 01908 563888 Fax: 01908 561185 Italy Phone/Fax: 02-9271365 Rochester Phone: (716) 321-1300 Fax: (716) 321-1865 Dallas Phone: (972) 446-9554 Fax: (972) 446-5931 Oceania Australia Phone: 02-9354-8222 Fax: 02-9894-5719 Netherlands Phone: 020-5318 Fax: 020-5318880 Mexico Phone: 47-22-55-00 Fax: 47-22-59

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 90 lb

HRX-OM-K003

Caster w/ brake Figure 2-1 Name of Each Section [Tips] The casters have built-in brakes. The disengagement of the brakes is required when transporting the system.

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in10R 1/4AS3201FG-02-10AS3211FG-02-10AS3301FG-02-10AS3311FG-02-10

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/4-02-04AS2211FG-02-04-02-04-02-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/4AS3201FG-02-08AS3211FG-02-08AS3301FG-02-08AS3311FG-02-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in12R 1/4AS3201FG-02-12AS3211FG-02-12AS3301FG-02-12AS3311FG-02-12

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4R 1/4-02-04AS2211FG-02-04-02-04-02-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/4-02-08AS2211FG-02-08-02-08-02-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in10R 1/4-02-10AS2211FG-02-10AS2301FG-02-10AS2311FG-02-10

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/4-02-06AS2211FG-02-06-02-06-02-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6R 1/4-02-06AS2211FG-02-06-02-06-02-06

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in8R 1/4-02-08AS2211FG-02-08-02-08-02-08

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in10R 1/4-02-10AS2211FG-02-10AS2301FG-02-10AS2311FG-02-10