Suction Flow Rate: 600 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F06 [Vacuum: G3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector),

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage

Air/Manually Operated High Purity Chemical Valve Series LV

Consult P/A regarding fluids other than the above. Consult P/A regarding operating conditions. 1.12-6

EXxx-OMN0035CN

32 10 SI SI ON/OFF PNP NPN PNP NPN PNP NPN EX600 D -9No.EX-OMN0035CN-A (1) 1.51.6 Nm (2) 1 10 SI (3)SI SI -10No.EX-OMN0035CN-A (4) M3X8 EX600-ZMV 0.60.7 Nm SV 2 S0700 2 VQC10002 VQC20003 VQC40004 SY 2 (EX600-ZMV) (EX600-ZMV) (EX600-ZMV) (EX600-ZMV) (5) SI SI M4X62 0.70.8 Nm -11No.EX-OMN0035CN-A (1) 6 ,2 (M4X5)(EX600-ZMB1) EX600 0.70.8 Nm (2) (M4) 0.70.8 Nm n(

SMC Wireless System EtherNet/IP ® compatible

P-tight screw (4 x 14) 2 pcs. EX600-ZMA3 (Specialized for the SY series) Enclosed parts: Round head screw with washer (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. 2. Valve Plate EX600-ZMV1 Enclosed parts: Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. EX600-ZMV2 (Specialized for the SY series) Enclosed parts: Round head screw (M4 x 6) 2 pcs.

SMC Wireless System PROFINET compatible

P-tight screw (4 x 14) 2 pcs. EX600-ZMA3 (Specialized for the SY series) Enclosed parts: Round head screw with washer (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. 2. Valve Plate EX600-ZMV1 Enclosed parts: Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. EX600-ZMV2 (Specialized for the SY series) Enclosed parts: Round head screw (M4 x 6) 2 pcs.

Pressure switch for energy-saving control ejector with N.O. type valve

System Error If the error can not be reset after the above measures are taken, then please contact SMC. -54NO.TQ1050188-OM002 Specification Specifications Rated pressure range 100 to -100 kPa Set pressure range 105 to -105 kPa Proof pressure 500 kPa Smallest settable increment 0.1 kPa Applicable fluid Air Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (Protected against reverse

Fieldbus system Digital unit

PNP N NPN Names and Functions of Product EX600-DM E No.

E-P HYREG ® VY1 Series

E-P HYREG VY1 Series How to Order Made to Order X39 Low wattage specification P.1003 E-P HYREG Maximum operating pressure: 0.9 MPa Pilot type 0 1 Internal pilot External pilot Note 1) Note 1) Except body size D 0 1 01 0 VY1 Thread type Nil F N T Rc G(2) Symbol Power source voltage DC Command signal DC Input impedance Power source/Command signal NPT NPTF Nil 1 to 5 V 10 k 67 k 1 0 to 10V Note

Miniature Fittings M3, R(PT) 1/8, M5 Series M

Straight union Bulkhead connector P. 97 KFH Use to connect same size tubes in the same direction. P. 99 KFE Use for transit connection of a tube and a male screw for installation of panel. Male elbow Bulkhead union P. 97 KFL Use to pipe at right angle to female thread portion. Most general type. P. 99 KFE Use to junction connection of tubes for installation of panel.

KF

P. 49 KFH P. 50 KFF Use to pipe from male thread such as pressure gauge. Straight union Bulkhead connector K P. 49 KFH P. 51 KFE Use to connect male thead and tube through a panel. Use to connect tubes in the same direction. M H D Male elbow Bulkhead union P. 49 KFL P. 51 KFE Use to pipe at right angles to female thread. Most general type. MS Use to connect tubes through a panel.