7ND9071en

R K05 Omron D2VW-5, 3 A 250 V AC, 0.4 A 125 V DC, 5 A 30 V DC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4". Omron D2VW-01, gold plated contacts, 100 mA 30 V DC / 125 V AC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4".

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 5 3 5 90 5 90 90 20 20 20 20 A 20 20 (3 x SA) MHSHJ3-63D MHSHJ3-80D Section SD SD 4 4 10 5 11 3 5 5 3 90 5 90 20 20 20 20 (mm) NB A Model L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5 10.5 11.5 13 14 CB 19 19 26.5 28 31 B 54 62 74

Integrated Controller

Motor Maintain a space of 40 mm or more. e-Actuator rod type built-in magnet portion (Piston) 40 40 40 Maintain a space of 40 mm or more. 40 40 e-Actuator slider type built-in magnet portion (Table unit) An air cylinder with an auto switch cannot be installed in the shaded area. 63 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Rotary Clamp Cylinders

Auto switch mounting surface Bore size (mm) 20, 25 32, 40, 50 63 Port side Port side Port side C A C A C A B B B Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch model A, B, C side Port side A, B, C side Port, A, B, C side qBQ-2 wBQ2-012 Two types of auto switch mounting bracket are used as a set.

HRX-OM-Q026

HRSH250/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9

CNA

MGG (Max.)W1 B DX Z + Stroke MGC DDH10 hole 90 B MGF 4-DT B DS A DH DF CY1 DO DO DC DE DU DU DL DA 4-DR MY1 Rotation angle (mm) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 A B A + B + 90 Part No.

Electric Actuator

mA or less 2.5 to 40 mA Load current 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .

Free Mount Cylinder

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load which generates a surge, such as a relay or solenoid valve, use a switch with a built-in surge absorbing element. 7.

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

C95

Contents CS95-32 Piston seal 32 #8 1 CS95-40 NBR Tube gasket 40 #9 2 CS95-50 NBR Kits include items Rod seal A 50 $0 1 CS95-63 NBR #0 and #8 to $1.

4/5 Port Solenoid Valve

(DIN 16.6) 16.5 11.5 0.5 122 [126.4] 107.4 [111.8] 62.3 (DIN 63.6) R P R 61.5 (DIN 62.8) A A A A A 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 21 60 B B B B B 1/4 (P, R port) (Pitch) P = 19 Manual override 23.5 (Station n) (Station 1) (Light/surge voltage suppressor) + + + + + 58 [65] 42.6 26 B B 19 40 A A 1/8 (A, B port) 2 (Pitch) P = 19 23.5 L plug connector (L) M plug connector (M) DIN terminal

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

A parallel key is used on the long shaft for size 40.

Modular F.R.L. Units

AFD20-A) and NPT1/4 (applicable to the AFM30-A/40-A, AFD30-A/40-A).

Table of Contents

panel of a device.

Guide Cylinder Series MGG

B B A A A A A Hs Hs Hs Hs 20 20 30.5 45.5 29.5 44.5 28.5 43.5 24.5 27 27.5 24 29 44 33 48 38.5 41.5 40 23.5 26.5 25 27.5 25 25 30.5 45.5 29.5 44.5 28.5 43.5 27 29.5 30 26.5 29 44 33 48 38.5 41.5 40 23.5 26.5 25 30 32 32 31.5 46.5 30.5 45.5 29.5 44.5 30.5 33 33.5 30 30 45 34 49 39.5 42.5 41 24.5 27.5 26 33.5 40 40 36.5 55.5 35.5 54.5 34.5 53.5 35 37.5 38 34.5 35 54 39 58 48.5 51.5 50 29.5

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M39 x 1.5 40 Note) The pin, keeper plate and cap bolt are included with a double knuckle joint.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 40 ZZ Z G H (NN 1) x H 10.5 24 10.5 24 A B 10.5 10.5 5.1 9.5 26 1 6 NN x M6 x 1 thread depth 12 B A 5H9 depth 4 +0.030 0 Section AA Section BB 5H9 depth 4 +0.030 0 GA HA (mm) Model F 35 35 35 40 30 55 65 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 GA 16 16 16 16 51 61 109 159 HA 40 40 40 50 30 70 70

MHZ

2 20 to 40: Hard anodized w Piston Parallel pin 20 to 40: Aluminum alloy Stainless steel !3 Type C snap ring Heat treated Stainless steel Carbon steel Nickel plated e !4 Lever Exhaust plug A Heat treated Stainless steel Brass Electroless nickel plated r !5 Guide Exhaust filter A Heat treated Stainless steel Polyvinyl formal t !

MHZ

2 20 to 40: Hard anodized w Piston Parallel pin 20 to 40: Aluminum alloy Stainless steel !3 Type C snap ring Heat treated Stainless steel Nickel plated Carbon steel e !4 Lever Exhaust plug A Heat treated Stainless steel Electroless nickel plated Brass r !5 Guide Exhaust filter A Heat treated Stainless steel Polyvinyl formal t !